Method of forming an integrated circuit having varying substrate depth
View Patent ↗A method for forming a semiconductor device includes providing a substrate having a first major surface and a second major surface, removing a first portion of the substrate to form a cavity at the first major surface of the substrate, bonding the first major surface of the substrate to a carrier substrate after forming the cavity, and reducing a thickness of the substrate. The method further includes forming a first accelerometer device at the second major surface such that at least a portion of the first accelerometer device is over the cavity and forming a second accelerometer device at the second major surface such that the second accelerometer device is not disposed over the cavity.
1. A method, comprising:
providing a substrate having a first major surface and a second major surface;
removing a first portion of the substrate to form a cavity at the first major surface of the substrate;
bonding the first major surface of the substrate to a carrier substrate after forming the cavity;
reducing a thickness of the substrate such that the substrate has a first thickness between the second major surface and a bottom of the cavity and a second thickness between the first major surface and the second major surface after the thickness is reduced, the first thickness less than the second thickness;
forming a first accelerometer device at the second major surface such that at least a portion of the first accelerometer device is over the cavity; and
forming a second accelerometer device at the second major surface such that the second accelerometer device is not disposed over the cavity.
2. The method of claim 1 , wherein the first thickness is less than 65 percent of the second thickness.
3. The method of claim 1 , wherein the first thickness is less than 60 percent of the second thickness.
4. The method of claim 1 , wherein the first thickness is less than 25 percent of the second thickness.
5. The method of claim 1 , wherein the portion of the first accelerometer device comprises an accelerometer spring.
6. The method of claim 1 , wherein the second accelerometer device comprises an accelerometer spring.
7. The method of claim 1 , wherein reducing the thickness comprises grinding the semiconductor substrate.
8. The method of claim 1 , further comprising forming a polysilicon layer over a portion of the first major surface prior to bonding the first side to the carrier substrate.
9. The method of claim 8 , further comprising depositing a dielectric layer over the polysilicon layer.
10. The method of claim 1 , wherein the first accelerometer device is associated with a first direction and wherein the second accelerometer device is associated with a second direction different from the first direction.
11. The method of claim 10 , further comprising forming a third accelerometer device at the second major surface such that at least a portion of the third accelerometer is not disposed over the bottom of the cavity.
12. The method of claim 11 , wherein the portion of the third accelerometer device comprises an accelerometer spring.
13. The method of claim 11 , wherein the third accelerometer device is associated with a third direction different from the first and second directions.
14. A method, comprising:
bonding a first major surface of a substrate to a carrier substrate, the substrate having the first major surface and a second major surface, the substrate including a cavity at the first major surface;
removing material from the second major surface of the substrate such that the substrate has a first thickness between the second major surface and a bottom of the cavity and a second thickness between the first major surface and the second major surface after the material is removed, the first thickness less than the second thickness;
forming a first accelerometer device from the second major surface such that an accelerometer spring of the first accelerometer device is over the cavity; and
forming a second accelerometer device and a third accelerometer device from the second major surface such that the second accelerometer device and the third accelerometer device are not disposed over the cavity, the first, second and third accelerometer devices associated with different directions of three directions.
15. The method of claim 14 , wherein the first thickness is less than 65 percent of the second thickness.
16. The method of claim 14 , wherein removing the material comprises grinding the semiconductor substrate.
17. The method of claim 14 , further comprising forming a polysilicon layer over a portion of the first major surface prior to bonding the first side to the carrier substrate.