X-ray measurement apparatus
A portable, for example, a hand-held-type, X-ray measurement apparatus, wherein the vibration or hand-shaking of the X-ray measurement apparatus is detected by a vibration-detection sensor such as a distance sensor, a gyro sensor, or the like, and a measurement value for the X-ray intensity obtained using a two-dimensional X-ray detector is corrected on the basis of a variation quantity obtained using the vibration-detection sensor. The correction may be a correction related to an X-ray source, a correction related to an X-ray detector, a correction calculated using the CPU of a computer and a software program, or the like.
1. An X-ray measurement apparatus having:
an X-ray source for generating an X-ray incident on a measurement object;
X-ray detection means for detecting an X-ray leaving the measurement object; and
a housing containing the X-ray source and the X-ray detection means;
the X-ray measurement apparatus comprising:
a vibration quantity detection sensor for detecting a vibration quantity of the housing; and
a controller for controlling the X-ray source, the X-ray detection means and the vibration quantity detection sensor, wherein the controller:
obtains X-ray intensity at each sampling time by using the X-ray detection means;
integrates the obtained X-ray intensity;
detects the vibration quantity at each sampling time by using the vibration quantity detection sensor;
determines a variation quantity of a position of the housing in relation to the measurement object based on the vibration quantity;
determines measurement condition values based on the variation quantity for compensation for the variation quantity; and
when any one of the measurement condition values has a variation large enough so that compensation is not possible, the corresponding X-ray intensity is not included in the integration.
2. The X-ray measurement apparatus according to claim 1 , wherein the vibration quantity detected by the vibration quantity detection sensor is at least one of:
(A) the amount of variation in distance between the vibration quantity detection sensor and the measurement object;
(B) the amount of variation within a plane orthogonal to a line connecting the vibration quantity detection sensor and the measurement object; or
(C) the amount of variation in inclination of the vibration quantity detection sensor relative to the measurement object.
3. The X-ray measurement apparatus according to claim 2 , wherein the vibration quantity detection sensor comprises any one or a combination of two or more of a distance sensor for detecting variation in distance, a speed sensor for detecting variation in speed, an acceleration sensor for detecting variation in acceleration, and an angular velocity sensor for detecting variation in angular velocity of the X-ray measurement apparatus.
4. The X-ray measurement apparatus according to claim 1 , wherein the vibration quantity detection sensor is secured to the housing.
5. The X-ray measurement apparatus according to claim 1 , wherein the process for correcting a measurement value obtained using the X-ray detection means is performed by controlling the position of the X-ray detection means.
6. The X-ray measurement apparatus according to claim 5 , wherein controlling the position of the X-ray detection means causes variation in the distance between the X-ray detection means and the measurement object.
7. The X-ray measurement apparatus according to claim 5 , wherein controlling the position of the X-ray detection means causes movement of the X-ray detection means in a direction at a right angle to the center line of the X-ray leaving the measurement object.
8. The X-ray measurement apparatus according to claim 5 , wherein controlling the position of the X-ray detection means causes variation in the inclination angle of the X-ray detection means in relation to the measurement object.
9. The X-ray measurement apparatus according to claim 5 , wherein controlling the position of the X-ray detection means is a combination of any two or three of the following:
causing variation in the distance between the X-ray detection means and the measurement object;
causing movement of the X-ray detection means in a direction at a right angle to the center line of an X-ray leaving the measurement object; and
causing variation in the inclination angle of the X-ray detection means in relation to the measurement object.
10. The X-ray measurement apparatus according to claim 1 , wherein the process for correcting a measurement value obtained using the X-ray detection means is a process for causing the X-ray that leaves the X-ray source and is incident on the measurement object to be incident on the measurement object at a fixed position.
11. The X-ray measurement apparatus according to claim 10 , wherein the process for causing the X-ray that leaves the X-ray source and is incident on the measurement object to be incident on the measurement object at a fixed position controls the orientation of the X-ray source in relation to the measurement object.
12. The X-ray measurement apparatus according to claim 10 , wherein the process for causing the X-ray that leaves the X-ray source and is incident on the measurement object to be incident on the measurement object at a fixed position controls the direction of advance of the X-ray leaving the X-ray source by controlling the position of at least one of a plurality of X-ray optical elements constituting an incident optical system, the X-ray optical elements including the X-ray source.
13. The X-ray measurement apparatus according to claim 1 , wherein the process for correcting a measurement value obtained using the X-ray detection means is a process in which the data obtained by the X-ray detection means is calculated by a software program.
14. The X-ray measurement apparatus according to claim 1 , wherein the X-ray detection means is a one-dimensional X-ray detector, a two-dimensional X-ray detector, or a pixel detector.
15. The X-ray measurement apparatus according to claim 1 , wherein the housing can be carried manually by a person, and the person performs measurement while manually holding the housing and placing an opening in the housing for outputting an X-ray so that the opening faces the measurement object.
16. The X-ray measurement apparatus according to claim 3 , wherein the vibration quantity detection sensor is secured to the housing.
17. The X-ray measurement apparatus according to claim 16 , wherein the process for correcting a measurement value obtained using the X-ray detection means is performed by controlling the position of the X-ray detection means.
18. The X-ray measurement apparatus according to claim 16 , wherein the process for correcting a measurement value obtained using the X-ray detection means is a process for causing the X-ray that leaves the X-ray source and is incident on the measurement object to be incident on the measurement object at a fixed position.
19. The X-ray measurement apparatus according to claim 16 , wherein the process for correcting a measurement value obtained using the X-ray detection means is a process in which the data obtained by the X-ray detection means is calculated by a software program.