Semiconductor device and method for manufacturing the same
An ultrasonic welding tool is used to bond end portions of an external connection terminal to circuit patterns of an insulating substrate, with a Vickers hardness not lower than 90 . Bonding end portions are provided integrally with a bar in the external connection terminal. A bonding end portion located substantially in the lengthwise center of the bar is bonded first, then others are bonded alternately in order toward either end. Hardness of the bonding end portions is increased so that strength of the ultrasonic welding portions is increased, and displacement of the bonding end portion in either end from its regular position is suppressed to keep bonding strength high. Bonding strength of the ultrasonic welding portions between the external connection terminal and the circuit patterns of the insulating substrate can be increased so that long-term reliability can be secured in a semiconductor device.
1. A method for manufacturing a semiconductor device, comprising the steps of:
mounting a power semiconductor chip on an insulating substrate; and
bonding an external connection terminal to a circuit pattern by ultrasonic welding, the circuit pattern being formed in the insulating substrate; wherein:
the external connection terminal is made of copper and has a plurality of bonding end portions with at least 90 in Vickers hardness arrayed in one and the same direction, and includes, as bonding end portions, at least a first bonding end portion, a second bonding end portion and a third bonding end portion in its longitudinal direction, with the second bonding end portion being located substantially in the center of the external connection terminal, wherein the external connection terminal is bonded to the circuit pattern on the insulating substrate in such a manner that the second bonding end portion is bonded first, and then the first bonding end portion and the third bonding end portion are bonded.
2. A method for manufacturing a semiconductor device according to claim 1 , wherein the ultrasonic welding is performed by applying horizontal ultrasonic vibration with a frequency of 19.15 kHz and an amplitude of about 50 micrometers to each of the bonding end portions 1.0 mm thick for 500 milliseconds while applying a vertical load of about 500 N to a bonding interface to the bonding end portion.