IP Library Granted Patent US 8,659,366
Granted Patent B2
US 8,659,366 · App. 13/772,251 · Granted Feb 25, 2014

MEMS switches in an integrated circuit package

Inventors: Ahmadreza Rofougaran (Newport Coast, CA); Maryam Rofougaran (Rancho Palos Verdes, CA)
Assignee: Broadcom Corporation
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Quick Facts
Patent No.
US 8,659,366
App. No.
13/772,251
Granted
Feb 25, 2014
Kind
B2
Abstract

Methods and systems for MEMS switches fabricated in an integrated circuit package are disclosed and may include controlling switching of RF components, and signals handled by the RF components, within an integrated circuit. One or more MEMS switch arrays embedded within a multi-layer package bonded to the integrated circuit may be utilized for the switching and signal control. The RF components and one or more MEMS switch arrays may be integrated in the multi-layer package. The RF components may be electrically coupled to the integrated circuit via the one or more MEMS switch arrays. The MEMS switch arrays may be electrostatically or magnetically activated. The RF components may be coupled to one or more capacitor arrays in the integrated circuit. The RF components may include transformers, inductors, transmission lines, microstrip and/or coplanar waveguide filters and/or surface mount devices. The integrated circuit may be coupled to the multiple-layer package utilizing a flip-chip bonding technique.

Claims (24)

1. A wireless communication system comprising:

a multi-layer package bonded to an integrated circuit, wherein said multi-layer package comprises an RF component and a MEMS switch array, and wherein said RF component is electrically coupled to said integrated circuit via said MEMS switch array;

wherein said RF component is coupled to a capacitor array within said integrated circuit, and wherein said MEMS switch array is magnetically activated.

2. The wireless communication system of claim 1 , wherein said RF component is tuned by said MEMS switch array.

3. The wireless communication system of claim 1 , wherein said RF component is tuned by said integrated circuit.

4. The wireless communication system of claim 1 , wherein said RF component is switched by said MEMS switch array.

5. The wireless communication system of claim 1 , wherein said RF component is switched by said integrated circuit.

6. The wireless communication system of claim 1 , wherein said MEMS switch array is electrostatically activated.

7. The wireless communication system of claim 1 , wherein said RF component comprises a transformer.

8. The wireless communication system of claim 1 , wherein said RF component comprises an inductor.

9. The wireless communication system of claim 1 , wherein said RF component comprises a transmission line.

10. The wireless communication system of claim 1 , wherein said RF component comprises a microstrip filter.

11. The wireless communication system of claim 1 , wherein said RF component comprises a coplanar filter.

12. The wireless communication system of claim 1 , wherein said RF component comprises a surface mount device.

13. The wireless communication system of claim 1 , wherein said integrated circuit is coupled to said multiple-layer package as a flip-chip.

14. A method comprising:

in a wireless system, controlling switching of an RF component and signals handled by said RF component within an integrated circuit by a MEMS switch array integrated in a multi-layer package;

wherein said RF component is coupled to a capacitor array integrated in said multi-layer package, said capacitor array being within said integrated circuit.

15. The method of claim 14 , wherein said MEMS switch array is magnetically activated.

16. The method of claim 14 , wherein said RF component is tuned by said MEMS switch array.

17. The method of claim 14 , wherein said RF component is tuned by said integrated circuit.

18. The method of claim 14 , wherein said RF component comprises a transformer.

19. The method of claim 14 , wherein said RF component comprises an inductor.

20. The method of claim 14 , wherein said MEMS switch array is electrostatically activated.

Assignments (7)
CORRECTIVE ASSIGNMENT TO CORRECT THE ERROR IN RECORDING THE MERGER IN THE INCORRECT US PATENT NO. 8,876,094 PREVIOUSLY RECORDED ON REEL 047351 FRAME 0384. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER. Recorded Mar 8, 2019
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 049248/0558 →
CORRECTIVE ASSIGNMENT TO CORRECT THE EFFECTIVE DATE OF THE MERGER PREVIOUSLY RECORDED AT REEL: 047230 FRAME: 0910. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER. Recorded Oct 29, 2018
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 047351/0384 →
MERGER Recorded Oct 4, 2018
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 047230/0910 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS Recorded Feb 3, 2017
From: BANK OF AMERICA, N.A., AS COLLATERAL AGENT
To: BROADCOM CORPORATION
Reel/Frame 041712/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 1, 2017
From: BROADCOM CORPORATION
To: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
Reel/Frame 041706/0001 →
PATENT SECURITY AGREEMENT Recorded Feb 11, 2016
From: BROADCOM CORPORATION
To: BANK OF AMERICA, N.A., AS COLLATERAL AGENT
Reel/Frame 037806/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 25, 2013
From: ROFOUGARAN, AHMADREZA; ROFOUGARAN, MARYAM
To: BROADCOM CORPORATION
Reel/Frame 029871/0472 →
Continuity (2)
Continuation 11956106 · Dec 13, 2007
Related Publication 20130154762A1 · Jun 20, 2013