Method for manufacturing nitride semiconductor crystal layer
View Patent ↗According to one embodiment, a method is disclosed for manufacturing a nitride semiconductor crystal layer. The method can include forming the nitride semiconductor crystal layer having a first thickness on a silicon crystal layer. The silicon crystal layer is provided on a base body. The silicon crystal layer has a second thickness before the forming the nitride semiconductor crystal layer. The second thickness is thinner than the first thickness. The forming the nitride semiconductor crystal layer includes making at least a portion of the silicon crystal layer incorporated into the nitride semiconductor crystal layer to reduce a thickness of the silicon crystal layer from the second thickness.
1. A method for manufacturing a nitride semiconductor crystal layer, comprising:
forming the nitride semiconductor crystal layer having a first thickness not less than 1 micrometer on a silicon crystal layer having a second thickness not more than 50 nanometers, the silicon crystal layer being provided on a base body,
the silicon crystal layer having said second thickness before the forming the nitride semiconductor crystal layer,
fully interdiffusing the silicon crystal layer into the nitride semiconductor crystal layer during forming of the nitride semiconductor crystal layer to cause disappearance of the silicon crystal layer.
2. The method according to claim 1 , wherein
the base body includes a substrate,
the forming the nitride semiconductor crystal layer further includes:
forming a structure including
the substrate, and
the nitride semiconductor crystal layer provided on the substrate, and silicon included in the silicon crystal layer is introduced in the nitride semiconductor crystal layer.
3. The method according to claim 2 , wherein the base body has a crystal profile which differs from a crystal profile of the silicon crystal layer.
4. A method for manufacturing a nitride semiconductor crystal layer comprising:
forming the nitride semiconductor crystal layer having a first thickness on a silicon crystal layer, the silicon crystal layer being provided on a base body,
the silicon crystal layer having a second thickness before the forming the nitride semiconductor crystal layer, the second thickness being thinner than the first thickness,
the forming the nitride semiconductor crystal layer including making the silicon crystal layer incorporated into the nitride semiconductor crystal layer to reduce a thickness of the silicon crystal layer from the second thickness and to cause disappearance of the silicon crystal layer,
the base body including a substrate,
the forming the nitride semiconductor crystal layer further including:
forming a structure including
the substrate, and
the nitride semiconductor crystal layer provided on the substrate, and silicon included in the silicon crystal layer being introduced in the nitride semiconductor crystal layer,
wherein a melt back etching of the silicon crystal layer by a group III element is limited by the second thickness.
5. The method according to claim 1 , wherein
the base body includes
a substrate, and
an intermediate layer formed on the substrate,
the forming the nitride semiconductor crystal layer further includes:
forming a structure including
the substrate,
the intermediate layer formed on the substrate, and
the nitride semiconductor crystal layer provided on the intermediate layer, and silicon included in the silicon crystal layer is introduced in the nitride semiconductor crystal layer.
6. The method according to claim 5 , wherein the base body has a crystal profile which differs from a crystal profile of the silicon crystal layer.
7. A method for manufacturing a nitride semiconductor crystal layer comprising:
forming the nitride semiconductor crystal layer having a first thickness on a silicon crystal layer, the silicon crystal layer being provided on a base body,
the silicon crystal layer having a second thickness before the forming the nitride semiconductor crystal layer, the second thickness being thinner than the first thickness,
the forming the nitride semiconductor crystal layer including making the silicon crystal layer incorporated into the nitride semiconductor crystal layer to reduce a thickness of the silicon crystal layer from the second thickness and to cause disappearance of the silicon crystal layer,
the base body including
a substrate, and
an intermediate layer formed on the substrate,
the forming the nitride semiconductor crystal layer further including:
forming a structure including
the substrate,
the intermediate layer formed on the substrate, and
the nitride semiconductor crystal layer provided on the intermediate layer, and
silicon included in the silicon crystal layer being introduced in the nitride semiconductor crystal layer,
wherein a melt back etching of the silicon crystal layer by a group III element is limited by the second thickness.
8. The method according to claim 5 , wherein the substrate is a silicon substrate.
9. The method according to claim 5 , wherein the substrate includes a silicon polycrystal.
10. The method according to claim 5 , wherein the substrate includes a silicon single crystal.
11. The method according to claim 5 , wherein the intermediate layer is a silicon oxide film.
12. The method according to claim 1 , wherein the second thickness is not more than 20 nanometers.
13. The method according to claim 1 , wherein an orientation of a crystal plane of the silicon crystal layer is a (111) plane.
14. The method according to claim 1 , wherein the forming the nitride semiconductor crystal layer includes:
forming a first portion of the nitride semiconductor crystal layer on the silicon crystal layer at a first temperature, and
forming a second portion of the nitride semiconductor crystal layer on the first portion at a second temperature, the second temperature being higher than the first temperature.
15. The method according to claim 14 , wherein a thickness of the first portion is thinner than a thickness of the second portion.
16. The method according to claim 1 , wherein
the silicon crystal layer has a surface which is terminated by hydrogen, and
the nitride semiconductor crystal layer is formed on the surface terminated by hydrogen.
17. The method according to claim 1 , wherein
the silicon crystal layer is divided into island-like shapes having a characteristic length of not less than 0.5 mm and not more than 10 mm in a plane parallel to a layer face of the silicon crystal layer, and
the forming the nitride semiconductor crystal layer includes forming the nitride semiconductor crystal layer on the divided silicon crystal layer.
18. The method according to claim 1 , wherein a concentration of silicon of the nitride semiconductor crystal layer in a first region on a side of the base body is higher than a concentration of silicon of the nitride semiconductor crystal layer in a second region, the second region being farther from the base body than the first region.