Group III-V and group IV composite switch
View Patent ↗In one implementation, a group III-V and group IV composite switch includes a group IV transistor in a lower active die, the group IV transistor having a source and a gate situated on a bottom side of the lower active die. The group III-V and group IV composite switch also includes a group III-V transistor in an upper active die stacked over the lower active die, the group III-V transistor having a drain, a source, and a gate situated on a top side of the upper active die. The source of the group III-V transistor is electrically coupled to a drain of the group IV transistor using a through-semiconductor via (TSV) of the upper active die.
1. A composite switch comprising:
a group IV transistor in a lower active die, a source and a gate of said group IV transistor being situated on a bottom side of said lower active die;
a group III-V transistor in an upper active die stacked over said lower active die, a drain, a source, and a gate of said group III-V transistor being situated on a top side of said upper active die;
said source of said group III-V transistor being electrically coupled to a drain of said group IV transistor using a through-semiconductor via (TSV) of said upper active die;
a source contact of said group III-V transistor formed directly on top of a drain of said group IV transistor.
2. The composite switch of claim 1 , wherein said group IV transistor is a vertical group IV transistor.
3. The composite switch of claim 1 , wherein said TSV does not reach a bottom side of said upper active die.
4. The composite switch of claim 3 , wherein said TSV reaches a highly conductive substrate in said upper active die, said highly conductive substrate being in electrical contact with said drain of said group IV transistor.
5. The composite switch of claim 1 , wherein said TSV reaches a bottom side of said upper active die.
6. The composite switch of claim 1 , wherein said group III-V transistor is a normally ON transistor and said composite switch is configured to be normally OFF.
7. The composite switch of claim 1 , wherein said group III-V transistor is a high-voltage (HV) transistor and said group IV transistor is a low-voltage (LV) transistor.
8. The composite switch of claim 1 , wherein said group III-V transistor is a III-Nitride high electron mobility transistor (III-Nitride HEMT).
9. The composite switch of claim 1 , wherein said group transistor comprises gallium nitride (GaN).
10. The composite switch of claim 1 , wherein said group IV transistor comprises silicon.