PLASMA PROCESSING APPARATUS AND MICROWAVE OUTPUT DEVICE
A plasma processing apparatus includes: a high voltage power supply for supplying a high voltage power to a magnetron; and a detector for detecting a microwave output from the magnetron, wherein based on a result of comparing a signal, which is obtained by adding an output from the detector to an AC component of a current detected from an output of the high voltage power supply, with a setting value of the output of the high voltage power supply, the output of the high voltage power supply is adjusted.
1 . A plasma processing apparatus that forms plasma inside a processing chamber using microwave formed by a magnetron and processes a wafer arranged inside the processing chamber, the plasma processing apparatus comprising:
a high voltage power supply for supplying a high voltage power to the magnetron; and
a detector for detecting a microwave output from the magnetron, wherein
based on a result of comparing a signal, which is obtained by adding an output from the detector to an AC component of a current detected from an output of the high voltage power supply, with a setting value of the output of the high voltage power supply, the output of the high voltage power supply is adjusted.
2 . The plasma processing apparatus according to claim 1 , wherein based on a result of comparing a signal, which is obtained by adding an output from the detector to an AC component of an anode current output from the high voltage power supply, with a setting value of an output of the high voltage power supply, the output of the high voltage power supply is adjusted.
3 . A plasma processing apparatus that forms plasma inside a processing chamber using microwave formed by a magnetron and processes a wafer arranged inside the processing chamber, the plasma processing apparatus comprising:
a high voltage power supply for supplying a high voltage power to the magnetron: and
a detector for detecting a microwave output from the magnetron, wherein
based on a result of comparing a signal, which is obtained as a result of comparing an output from the detector with a setting value of an output of the high voltage power supply, with a signal indicative of a value of a current detected from the output of the high voltage power supply, the output of the high voltage power supply is adjusted.
4 . The plasma processing apparatus according to claim 1 , wherein a signal obtained by detecting an AC component of a current from an output of the high voltage power supply is output as an alarm signal.
5 . A microwave output device used for a plasma processing apparatus that forms plasma inside a processing chamber using microwave formed by a magnetron and processes a wafer arranged inside the processing chamber, the microwave output device comprising:
a high voltage power supply for supplying a high voltage power to the magnetron; and
a detector for detecting a microwave output from the magnetron, wherein
based on a result of comparing a signal, which is obtained by adding an output from the detector to an AC component of a current detected from an output of the high voltage power supply, with a setting value of the output of the high voltage power supply, the output of the high voltage power supply is adjusted.
6 . The microwave output device according to claim 5 , wherein based on a result of comparing a signal, which is obtained by adding an output from the detector to an AC component of an anode current output from the high voltage power supply, with a setting value of an output of the high voltage power supply, the output of the high voltage power supply is adjusted.
7 . A microwave output device used for a plasma processing apparatus that forms plasma inside a processing chamber using microwave formed by a magnetron and processes a wafer arranged inside the processing chamber, the microwave output device comprising:
a high voltage power supply for supplying a high voltage power to the magnetron; and
a detector for detecting a microwave output from the magnetron, wherein
based on a result of comparing a signal, which is obtained as a result of comparing an output from the detector with a setting value of an output of the high voltage power supply, with a signal indicative of a value of a current detected from the output of the high voltage power supply, the output of the high voltage power supply is adjusted.
8 . The microwave output device according to claim 5 , wherein a signal obtained by detecting an AC component of the current from the output of the high voltage power supply is output as an alarm signal.