Inspection apparatus
View Patent ↗In semiconductor surface inspection apparatus, foreign matter that sticks to the wafer can reduce the quality of the wafer. The present invention is directed to improving the internal cleanliness of the apparatus. Specifically, during rotation of a semiconductor wafer, foreign matter suspended in an atmosphere surrounding the wafer is attracted to a central section of the wafer, and that while heading from the central section of the wafer, towards an outer edge thereof, the foreign matter is most likely to stick to the wafer. In conventional techniques, sufficient consideration is not given to such likelihood of foreign matter sticking. This invention supplies a medium from two directions to an inner circumferential section of a substrate. In accordance with the invention, foreign matter that sticks to a wafer can be reduced more significantly than in the conventional techniques.
1. An apparatus for inspecting a substrate, comprising:
a supply unit that supplies, from two opposing directions, towards an inner circumferential section of the substrate, a medium cleaner than an atmosphere surrounding the substrate;
a rotating unit that rotates the substrate; and
a moving unit that moves the substrate rectilinearly, wherein
the supply unit supplies the medium to the inner circumferential section of the substrate while the moving unit moves.
2. The apparatus according to claim 1 , wherein:
the supply unit is formed from two ducts arranged in a facing manner; and
a plurality of the supply units are disposed in a direction that the moving unit moves.
3. The apparatus according to claim 1 , wherein:
the supply unit includes a plurality of blowout ports to supply the medium; and
the blowout ports for supplying the medium are selectively switched according to a rate at which the substrate moves.
4. The apparatus according to claim 1 , wherein:
the supply unit changes a flow rate of the medium according to a rotating speed at which the substrate rotates.
5. The apparatus according to claim 1 , wherein:
the supply unit changes a flow velocity of the medium according to a rotating speed at which the substrate rotates.
6. The apparatus according to claim 1 , wherein:
the supply unit changes a temperature of the medium.
7. The apparatus according to claim 1 , wherein:
the supply unit supplies a first medium to the inner circumferential section of the substrate and supplies a second medium to an outer circumferential section of the substrate; and
the first medium has a temperature higher than that of the second medium.
8. An apparatus for inspecting a substrate, comprising:
a supply unit that supplies, from two opposing directions, towards an inner circumferential section of the substrate, a medium cleaner than an atmosphere surrounding the substrate; and
a rotating unit that rotates the substrate, wherein
the supply unit changes a flow rate of the medium according to a rotating speed at which the substrate rotates.
9. The apparatus according to claim 8 , further comprising:
a moving unit that moves the substrate rectilinearly, wherein
the supply unit supplies the medium to the inner circumferential section of the substrate while the moving unit moves.
10. The apparatus according to claim 8 , wherein:
the supply unit is formed from two ducts arranged in a facing manner; and
a plurality of the supply units are disposed in a direction that the moving unit moves.
11. The apparatus according to claim 8 , wherein:
the supply unit includes a plurality of blowout ports to supply the medium; and
the blowout ports for supplying the medium are selectively switched according to a rate at which the substrate moves.
12. The apparatus according to claim 8 , wherein:
the supply unit changes a flow velocity of the medium according to a rotating speed at which the substrate rotates.
13. The apparatus according to claim 8 , wherein:
the supply unit changes a temperature of the medium.
14. The apparatus according to claim 8 , wherein:
the supply unit supplies a first medium to the inner circumferential section of the substrate and supplies a second medium to an outer circumferential section of the substrate; and
the first medium has a temperature higher than that of the second medium.
15. An apparatus for inspecting a substrate, comprising:
a supply unit that supplies, from two opposing directions, towards an inner circumferential section of the substrate, a medium cleaner than an atmosphere surrounding the substrate; and
a rotating unit that rotates the substrate, wherein
the supply unit supplies a first medium to the inner circumferential section of the substrate and supplies a second medium to an outer circumferential section of the substrate, and
the first medium has a temperature higher than that of the second medium.
16. The apparatus according to claim 15 , further comprising:
a moving unit that moves the substrate rectilinearly, wherein
the supply unit supplies the medium to the inner circumferential section of the substrate while the moving unit moves.
17. The apparatus according to claim 15 , wherein:
the supply unit is formed from two ducts arranged in a facing manner; and
a plurality of the supply units are disposed in a direction that the moving unit moves.
18. The apparatus according to claim 15 , wherein:
the supply unit includes a plurality of blowout ports to supply the medium, and
the blowout ports for supplying the medium are selectively switched according to a rate at which the substrate moves.
19. The apparatus according to claim 15 , wherein:
the supply unit changes a flow rate of the medium according to a rotating speed at which the substrate rotates.
20. The apparatus according to claim 15 , wherein:
the supply unit changes a flow velocity of the medium according to a rotating speed at which the substrate rotates.
21. The apparatus according to claim 15 , wherein:
the supply unit changes a temperature of the medium.