Packages for semiconductor devices, packaged semiconductor devices, and methods of cooling packaged semiconductor devices
Packages for semiconductor devices, packaged semiconductor devices, and methods of cooling packaged semiconductor devices are disclosed. In some embodiments, a package for a semiconductor device includes a substrate including a semiconductor device mounting region, a cover coupled to a perimeter of the substrate, and members disposed between the substrate and the cover. The package includes partitions, with each partition being disposed between two adjacent members. The package includes a fluid inlet port coupled to the cover, and a fluid outlet port coupled to one of the partitions.
1. A package for a semiconductor device, comprising:
a substrate including a semiconductor device mounting region;
a cover coupled to a perimeter of the substrate;
a plurality of members disposed between the substrate and the cover;
a plurality of outer partitions, each of the plurality of outer partitions being disposed between two adjacent members of the plurality of members, and extending from the cover to the substrate, and an inner partition that surrounds the device mounting region;
an inner ring member between the inner partition and the plurality of outer partition, the inner ring member including a first portion that allows fluid flow between the inner partition and a first one of the plurality of outer partitions and a second portion to prevents fluid flow between the inner partition and a second one of the plurality of outer partitions;
a fluid inlet port coupled to the cover, the fluid inlet port opening into the inner partition; and
a fluid outlet port coupled to the second one of the plurality of outer partitions.
2. The package according to claim 1 , further comprising an outer ring member disposed around the plurality of outer partitions proximate the perimeter of the substrate, wherein the outer ring member is disposed between the cover and the substrate.
3. The package according to claim 2 , further comprising an inner ring member disposed around a perimeter of the semiconductor device mounting region.
4. The package according to claim 3 , further comprising a plurality of apertures in the inner ring member.
5. The package according to claim 3 , wherein the plurality of members, the outer ring member, or the inner ring member are integral to the cover.
6. The package according to claim 1 , further comprising an underfill material non-wettable region disposed on the substrate in the semiconductor device mounting region.
7. A packaged semiconductor device, comprising:
a substrate including a semiconductor device mounting region;
a semiconductor device coupled to the semiconductor device mounting region of the substrate;
an outer ring member disposed around a perimeter of the substrate;
an inner ring member disposed around a perimeter of the semiconductor device mounting region, the inner ring member defining an inner partition;
a plurality of members disposed on the substrate between the outer ring member and the inner ring member;
a cover coupled to the outer ring member, the inner ring member, the plurality of members, and a top surface of the semiconductor device;
a plurality of outer partitions, each of the plurality of outer partitions being disposed between two adjacent members of the plurality of members, each of the plurality of outer partitions being disposed between the outer ring member and the inner ring member, wherein the inner ring member is porous between the inner partition and one of the plurality of outer partitions and is non-porous between the inner partition and a second one of the plurality of outer partitions;
a fluid inlet port coupled to the cover; and
a fluid outlet port coupled to one of the plurality of outer partitions.
8. The packaged semiconductor device according to claim 7 , wherein the semiconductor device comprises one or more integrated circuit dies coupled to an interposer substrate, and wherein the inner ring member is disposed around a perimeter of the interposer substrate.
9. The packaged semiconductor device according to claim 8 , wherein the interposer substrate is coupled to the substrate by a plurality of conductive bumps, further comprising an underfill material disposed beneath a portion of the interposer substrate.
10. The packaged semiconductor device according to claim 9 , wherein the underfill material includes one or more channels that extend from a first side of the interposer substrate to a second side of the interposer substrate, or wherein the underfill material comprises a peripheral pattern around the plurality of conductive bumps, a parallel strip pattern around the plurality of conductive bumps, a corner pattern around the plurality of conductive bumps, or a tile pattern around the plurality of conductive bumps.
11. The packaged semiconductor device according to claim 7 , wherein each of the plurality of members comprises an elongated diagonal member that extends from a corner of the substrate to a corner of the semiconductor device mounting region, and wherein the plurality of outer partitions comprises four trapezoidal-shaped partitions.
12. The packaged semiconductor device according to claim 7 , wherein the semiconductor device comprises a through interposer stacking (TIS) device or a through transistor stacking (TTS) device.