Power storage element, manufacturing method thereof, and power storage device
Disclosed is a power storage element including a positive electrode current collector layer and a negative electrode current collector layer which are arranged on the same plane and can be formed through a simple process. The power storage element further includes a positive electrode active material layer on the positive electrode current collector layer; a negative electrode active material layer on the negative electrode current collector layer; and a solid electrolyte layer in contact with at least the positive electrode active material layer and the negative electrode active material layer. The positive electrode active material layer and the negative electrode active material layer are formed by oxidation treatment.
1. A power storage element comprising:
a positive electrode and a negative electrode over a substrate;
a solid electrolyte layer over and in contact with the positive electrode and the negative electrode;
a carrier supplying layer over the solid electrolyte layer; and
a sealing layer over the positive electrode, the negative electrode, the solid electrolyte layer, and the carrier supplying layer,
wherein the positive electrode and the negative electrode are arranged in a same plane,
wherein the positive electrode comprises a first metal and an oxide of the first metal, and the negative electrode comprises a second metal and an oxide of the second metal, and
wherein the oxide of the first metal covers an upper surface and side surfaces of the first metal, and the oxide of the second metal covers an upper surface and side surfaces of the second metal.
2. The power storage element according to claim 1 , wherein the carrier supplying layer overlaps with at least one of the positive electrode and the negative electrode.
3. The power storage element according to claim 1 , wherein the oxide of the first metal contains one of vanadium and manganese.
4. The power storage element according to claim 1 , wherein the oxide of the second metal contains one of niobium, copper, cobalt, nickel, iron, tungsten, molybdenum, and tantalum.
5. The power storage element according to claim 1 , wherein the carrier supplying layer contains lithium.
6. An electrical device comprising the power storage element according to claim 1 .
7. The power storage element according to claim 1 , wherein the sealing layer is in contact with the positive electrode, the negative electrode, the solid electrolyte layer, and the carrier supplying layer.
8. The power storage element according to claim 1 , wherein the oxide of the first metal does not contain lithium.
9. A power storage device comprising:
a transistor over a substrate; and
a power storage element over the transistor,
wherein the power storage element comprises:
a positive electrode and a negative electrode over the substrate;
a solid electrolyte layer over and in contact with the positive electrode and the negative electrode;
a carrier supplying layer over the solid electrolyte layer; and
a sealing layer over the positive electrode, the negative electrode, the solid electrolyte layer, and the carrier supplying layer,
wherein the transistor is electrically connected to one of the positive electrode and the negative electrode,
wherein the positive electrode and the negative electrode are arranged in a same plane,
wherein the positive electrode comprises a first metal and an oxide of the first metal, and the negative electrode comprises a second metal and an oxide of the second metal, and
wherein the oxide of the first metal covers an upper surface and side surfaces of the first metal, and the oxide of the second metal covers an upper surface and side surfaces of the second metal.
10. The power storage device according to claim 9 , wherein the carrier supplying layer overlaps with at least one of the positive electrode and the negative electrode.
11. The power storage device according to claim 9 , wherein the oxide of the first metal contains one of vanadium and manganese.
12. The power storage device according to claim 9 , wherein the oxide of the second metal contains one of niobium, copper, cobalt, nickel, iron, tungsten, molybdenum, and tantalum.
13. The power storage device according to claim 9 , wherein the carrier supplying layer contains lithium.
14. An electrical device comprising the power storage device according to claim 9 .
15. The power storage device according to claim 9 , wherein the sealing layer is in contact with the positive electrode, the negative electrode, the solid electrolyte layer, and the carrier supplying layer.
16. The power storage device according to claim 9 , wherein the oxide of the first metal does not contain lithium.
17. A manufacturing method of a power storage element, comprising:
forming a first metal layer and a second metal layer over a substrate;
performing oxidation treatment on the first metal layer and the second metal layer to form a first metal oxide layer on an upper surface and side surfaces of the first metal layer and a second metal oxide layer on an upper surface and side surfaces of the second metal layer;
forming a solid electrolyte layer over and in contact with the first metal oxide layer and the second metal oxide layer;
forming a carrier supplying layer over the solid electrolyte layer; and
forming a sealing layer over the first metal oxide layer, the second metal oxide layer, the solid electrolyte layer, and the carrier supplying layer,
wherein the first metal layer and the second metal layer are arranged in a same plane.
18. The manufacturing method of a power storage element, according to claim 17 , wherein the carrier supplying layer overlaps with at least one of the first metal layer and the second metal layer.
19. The manufacturing method of a power storage element, according to claim 17 , wherein the first metal layer contains one of vanadium and manganese.
20. The manufacturing method of a power storage element, according to claim 17 , wherein the second metal layer contains one of niobium, copper, cobalt, nickel, iron, tungsten, molybdenum, and tantalum.
21. The manufacturing method of a power storage element, according to claim 17 , wherein the carrier supplying layer contains lithium.
22. The manufacturing method of a power storage element, according to claim 17 , wherein the sealing layer is in contact with the first metal oxide layer, the second metal oxide layer, the solid electrolyte layer, and the carrier supplying layer.
23. The manufacturing method of a power storage element, according to claim 17 , wherein the first metal oxide layer does not contain lithium.