Capacitors using porous alumina structures
View Patent ↗Capacitors and methods of making the same are disclosed herein. In one embodiment, a capacitor comprises a structure having first and second oppositely facing surfaces and a plurality of pores each extending in a first direction from the first surface towards the second surface, and each having pore having insulating material extending along a wall of the pore; a first conductive portion comprising an electrically conductive material extending within at least some of the pores; and a second conductive portion comprising a region of the structure consisting essentially of aluminum surrounding individual pores of the plurality of pores, the second conductive portion electrically isolated from the first conductive portion by the insulating material extending along the walls of the pores.
1. A capacitor, comprising:
a structure having first and second oppositely facing surfaces and a plurality of pores each extending in a first direction from the first surface towards the second surface, and each having pore having insulating material extending along a wall of the pore,
a first conductive portion comprising an electrically conductive material extending within at least some of the pores; and
a second conductive portion comprising a region of the structure consisting essentially of aluminum surrounding individual pores of the plurality of pores, the second conductive portion electrically isolated from the first conductive portion by the insulating material extending along the walls of the pores.
2. The capacitor of claim 1 , wherein each pore having a diameter of less than two micrometers.
3. The capacitor of claim 1 , wherein the insulating material is alumina.
4. The capacitor of claim 1 , further comprising:
a first capacitor electrode electrically connected with the first conductive portion;
a second capacitor electrode electrically connected with the second conductive portion,
each of the first and second capacitor electrodes being accessible for connection with at least one component external to the capacitor.
5. The capacitor of claim 4 , wherein the first capacitor electrode is accessible for connection with the at least one component at a location adjacent to the first surface of the structure.
6. The capacitor of claim 5 , wherein the second capacitor electrode is accessible for connection with the at least one component at a location adjacent to the second surface of the structure.
7. The capacitor of claim 5 , wherein the second capacitor electrode is accessible for connection with the at least one component at a location adjacent to the first surface of the structure.
8. The capacitor of claim 1 , further comprising a dielectric material electrically isolating the second conductive portion from the first conductive portion, the dielectric material having a dielectric constant K signifying a permittivity greater than about 10 times a permittivity of free space.
9. The capacitor of claim 8 , wherein the dielectric material includes at least one material selected from the group consisting of ferroelectric dielectric materials, zeolites, and lead zirconium titanate (PZT).
10. The capacitor of claim 1 , wherein the first conductive portion further comprises:
a plurality of openings disposed in a direction of thickness of the first conductive portion, each opening disposed above and coincident with one of the plurality of pores.
11. The capacitor of claim 10 , wherein the electrically conductive material extends from an interior surface of each opening and along an interior surface of a pore coincident with the opening.
12. The capacitor of claim 1 , further comprising:
a dielectric region overlying the first surface, the dielectric region partially surrounding a first region of the first conductive portion and separating the first region of the first conductive portion from the second conductive portion.
13. The capacitor of claim 11 , wherein the second conductive portion further comprises:
a second region overlying the dielectric region; and
a plurality of conductive elements extending through the dielectric region in the first direction towards the first surface of the structure, the conductive elements connecting the second region to the region of the structure consisting essentially of aluminum.