Pre-cut wafer applied underfill film
View Patent ↗A method for preparing a semiconductor with preapplied underfill comprises providing a semiconductor wafer with a plurality of metallic bumps on its top side and, optionally, through-silica-vias vertically through the silicon wafer; laminating a back grinding tape to the top of the wafer covering the metallic bumps and through silicon vias; thinning the back side of the wafer; mounting a dicing tape to the back side of the thinned wafer and mounting the silicon wafer and dicing tape to a dicing frame; removing the back grinding tape; providing an underfill material precut into the shape of the wafer; aligning the underfill on with the wafer and laminating the underfill to the wafer.
1. A method for producing a thinned semiconductor wafer with applied underfill, said method consisting of:
(a) providing a semiconductor wafer with a plurality of metallic bumps on its top side and, optionally, through-silica-vias vertically through the silicon wafer;
(b) laminating a back grinding tape to the top of the wafer covering the metallic bumps and the through silicon vias, if present, wherein the backgrinding tape is disposed in contact with the metallic bumps;
(c) thinning the back side of the wafer to form a thinned wafer;
(d) mounting a dicing tape to the back side of the thinned wafer and mounting the silicon wafer and dicing tape to a dicing frame;
(e) removing the back grinding tape;
(f) providing an underfill material precut into the shape of the thinned wafer;
(g) aligning the underfill with the thinned wafer and laminating the underfill to the thinned wafer;
wherein prior to (g), no underfill is disposed in between the metallic bumps.
2. The method of claim 1 wherein said semiconductor wafer is silicon.
3. The method of claim 1 wherein said semiconductor wafer does not contain through-silica-vias.
4. The method of claim 1 wherein said semiconductor wafer does contain through-silica-vias.
5. The method of claim 1 wherein said back grinding tape comprises a heat sensitive adhesive, a pressure sensitive adhesive or a UV sensitive adhesive on a flexible substrate selected from a polyolefin or a polyimide.
6. The method of claim 1 wherein said dicing tape comprises a heat sensitive adhesive, a pressure sensitive adhesive or a UV sensitive adhesive on a flexible substrate selected from a polyolefin or a polyimide.
7. The method of claim 1 wherein said underfill material is provided in a three layer form in which the first layer is a carrier, the second layer is the underfill material, and the third layer is a release liner, in that order.
8. A method for producing a thinned semiconductor wafer with applied underfill, said method consisting of:
(a) laminating a back grinding tape to the top of a semiconductor wafer with a plurality of metallic bumps on its top side and, optionally, through-silica-vias vertically through the silicon wafer, thereby covering the metallic bumps and through silicon vias, wherein the back grinding tape is disposed in contact with the metallic bumps;
(b) thinning the back side of the wafer to form a thinned wafer;
(c) mounting a dicing tape to the back side of the thinned wafer and mounting the silicon wafer and dicing tape to a dicing frame;
(d) removing the back grinding tape;
(e) aligning underfill material precut into the shape of the wafer with the thinned wafer and laminating the underfill to the thinned wafer;
wherein prior to (e), no underfill is disposed in between the metallic bumps.
9. A method for producing a thinned semiconductor wafer with applied underfill, said method consisting of:
(a) thinning the back side of a semiconductor wafer to produce a thinned wafer with a plurality of metallic bumps on its top side and, optionally, through-silica-vias vertically through the silicon wafer, wherein a back grinding tape has been laminated to the top of the semiconductor wafer, thereby covering the metallic bumps and through silicon vias, wherein the back grinding tape is disposed in contact with the metallic bumps;
(b) mounting a dicing tape to the back side of the thinned wafer and mounting the silicon wafer and dicing tape to a dicing frame;
(c) removing the back grinding tape;
(d) aligning underfill material precut into the shape of the wafer with the thinned wafer and laminating the underfill to the thinned wafer;
wherein prior to (d), no underfill is disposed in between the metallic bumps.
10. The method of claim 1 wherein the thinned wafer is continuously supported throughout the production process by the backgrinding tape, the dicing tape, or both.
11. The method of claim 8 wherein the thinned wafer is continuously supported throughout the production process by the backgrinding tape, the dicing tape, or both.
12. The method of claim 9 wherein the thinned wafer is continuously supported throughout the production process by the backgrinding tape, the dicing tape, or both.