IP Library Granted Patent US 8,963,243
Granted Patent B2
US 8,963,243 · App. 13/807,287 · Granted Feb 24, 2015

P-channel LDMOS transistor and method of producing a p-channel LDMOS transistor

Inventors: Jong Mun Park (Graz, AT); Martin Knaipp (Unterpremstatten, AT)
Assignee: AMS AG
H01L29/7816H01L29/0653H01L29/1083H01L29/66659H01L29/7835H01L29/66681
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Quick Facts
Patent No.
US 8,963,243
App. No.
13/807,287
Granted
Feb 24, 2015
Kind
B2
Abstract

The p-channel LDMOS transistor comprises a semiconductor substrate ( 1 ), an n well ( 2 ) of n-type conductivity in the substrate, and a p well ( 3 ) of p-type conductivity in the n well. A portion of the n well is located under the p well. A drain region ( 4 ) of p-type conductivity is arranged in the p well, and a source region ( 9 ) of p-type conductivity is arranged in the n well. A gate dielectric ( 7 ) is arranged on the substrate, and a gate electrode ( 8 ) is arranged on the gate dielectric. A body contact region ( 14 ) of n-type conductivity is arranged in the n well. A p implant region ( 17 ) is arranged in the n well under the p well in the vicinity of the p well. The p implant region locally compensates n-type dopants of the n well.

Claims (21)

1. A p-channel LDMOS transistor, comprising:

a semiconductor substrate;

an n well of n-type conductivity in the substrate;

a p well of p-type conductivity in the n well, a portion of the n well being located under the p well;

a drain region of p-type conductivity in the p well;

a gate dielectric on the substrate;

a gate electrode on the gate dielectric;

a source region of p-type conductivity in the n well;

a body contact region of n-type conductivity in the n well;

a p implant region arranged in the n well under the p well in the vicinity of the p well, the p implant region locally compensating n-type dopants of the n well; and

a drift region located in the p well.

2. The LDMOS transistor of claim 1 , wherein the p implant region is adjacent to the p well.

3. The LDMOS transistor of claim 1 or 2 , further comprising:

a shallow n well in the n well, the source region and the body contact region being arranged in the shallow n well.

4. The LDMOS transistor of claim 3 , wherein the shallow n well is arranged at a distance from the p well.

5. The LDMOS transistor of claim 1 , wherein the p well, the gate electrode and the source region are arranged symmetrically with respect to the position of the drain region.

6. The LDMOS transistor of claim 1 , further comprising:

an isolation region embedded in the p well,

the isolation region being arranged above the drift region between the drain region and the source region.

7. The LDMOS transistor of claim 1 , further comprising:

an isolation region between the source region and the body contact region.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 18, 2013
From: PARK, JONG MUN, DR.; KNAIPP, MARTIN, DR.
To: AMS AG
Reel/Frame 030035/0152 →
Priority Claims (1)
EP 10006806 · Jul 1, 2010 · regional
Continuity (1)
Related Publication 20130168769A1 · Jul 4, 2013