Method of Manufacturing Glass Substrate for Information Recording Medium, and Suction Instrument
An object of the invention is to provide a method of manufacturing a glass substrate for an information recording medium, which suppresses an increase in the number of foreign matter adhering to the surface of the glass substrate or damages on the surface of the glass substrate in suckingly holding the glass substrate by a suctorial holding portion, and to provide a suction instrument which makes it easy to dismount a glass substrate from a polishing pad of a polishing device. A suction instrument 1 of the invention has a suction pad 32 . The suction pad 32 is provided with a center hole 32 a , and a groove 32 b extending from the center hole 32 a to an end of an outer periphery of the contacting pad 32.
1 . A method of manufacturing a glass substrate for an information recording medium, the glass substrate for an information recording medium having a disc shape and formed with a through-hole in a center portion thereof, the method comprising:
a step of polishing a surface of a disc-shaped glass member formed with a through-hole in a center portion thereof by a polishing device to form a glass substrate for an information recording medium; and
a step of contacting the polished glass substrate for an information recording medium with a suction instrument, and taking out the glass substrate for an information recording medium from the polishing device in a state that the glass substrate for an information recording medium is sucked by the suction instrument, wherein
the suction instrument is provided with a suction instrument main body having a suction air passage to be suckingly connected to a suction device, and a suctorial holding portion having a suction port communicating with the suction air passage, the suctorial holding portion being integral with the suction instrument main body,
in the step of taking out the glass substrate for an information recording medium from the polishing device, the glass substrate for an information recording medium is sucked by the suctorial holding portion through the suction port of the suctorial holding portion via the suction air passage in response to activation of the suction device in a contacted state that the suctorial holding portion is contacted with the glass substrate for an information recording medium, whereby the glass substrate for an information recording medium is suckingly held by the suctorial holding portion, and
the suction instrument is configured to communicate between the through-hole formed in the glass substrate for an information recording medium and the exterior in the contacted state.
2 . The manufacturing method according to claim 1 , wherein
the polishing device is provided with a polishing pad which polishes the surface of the disc-shaped glass member, and
the polishing pad is so configured as to block the through-hole from one side of the disc-shaped glass member when the polishing pad is placed on the disc-shaped glass member.
3 . The manufacturing method according to claim 1 , wherein
the suction instrument is formed with an air passage for external communication, the air passage being configured to communicate between the through-hole formed in the glass substrate for an information recording medium and the exterior in the contacted state, and
the air passage for external communication is provided with a communication port which is opened toward the suctorial holding portion and communicates with the through-hole in the contacted state, and a communication path which communicates between the communication port and the exterior.
4 . The manufacturing method according to claim 3 , wherein the suctorial holding portion is provided with a contacting pad which is operable to contact with the glass substrate for an information recording medium,
the contacting pad has a center hole which is formed in a center portion thereof, and a groove which extends from the center hole to an end of an outer periphery of the contacting pad in such a manner as to communicate between the center hole and the exterior in the contacted state, the communication port is constituted of the center hole, and
the communication path is constituted of the groove.
5 . The manufacturing method according to claim 3 , wherein
the suctorial holding portion is provided with a contacting pad which is operable to contact with the glass substrate for an information recording medium,
the contacting pad has a center hole which is formed in a center portion thereof,
the suction instrument main body is formed with a main body communication hole which passes from the center hole to an outer surface of the suction instrument main body in such a manner as to communicate between the center hole and the exterior in the contacted state, the communication port is constituted of the center hole, and
the communication path is constituted of the main body communication hole.
6 . The manufacturing method according to claim 1 , wherein
the suctorial holding portion is provided with a contacting pad which is operable to contact with the glass substrate for an information recording medium,
the contacting pad is formed at a location including a periphery of the suction port, and
the through-hole formed in the glass substrate for an information recording medium is communicated with the exterior at the location devoid of the contacting pad.
7 . A suction instrument, comprising:
a suction instrument main body including a suction air passage to be suckingly connected to a suction device; and
a suctorial holding portion having a suction port communicating with the suction air passage and being integral with the suction instrument main body, wherein
the suction instrument is configured to suckingly hold a member to be sucked by the suctorial holding portion by sucking the member to be sucked through the suction port of the suctorial holding portion via the suction air passage in response to activation of the suction device in a contacted state that the suctorial holding portion is contacted with the member to be sucked, the member to be sucked having a disc shape and being formed with a through-hole, and
the suction instrument is configured to communicate between the through-hole formed in the member to be sucked and the exterior in the contacted state.
8 . The suction instrument according to claim 7 , wherein
the suction instrument is formed with an air passage for external communication, the air passage being configured to communicate between the through-hole formed in the member to be sucked and the exterior, and
the air passage for external communication is provided with a communication port which is opened toward the suctorial holding portion and communicates with the through-hole in the contacted state, and a communication path which communicates between the communication port and the exterior.
9 . The suction instrument according to claim 8 , wherein
the suctorial holding portion is provided with a contacting pad which is operable to contact with the member to be sucked,
the contacting pad has a center hole which is formed in a center portion thereof, and a groove which extends from the center hole to an end of an outer periphery of the contacting pad in such a manner as to communicate between the center hole and the exterior in the contacted state,
the communication port is constituted of the center hole, and
the communication path is constituted of the groove.
10 . The suction instrument according to claim 8 , wherein
the suctorial holding portion is provided with a contacting pad which is operable to contact with the member to be sucked,
the contacting pad has a center hole which is formed in a center portion thereof,
the suction instrument main body is formed with a main body communication hole which passes from the center hole to an outer surface of the suction instrument main body in such a manner as to communicate between the center hole and the exterior in the contacted state,
the communication port is constituted of the center hole, and
the communication path is constituted of the main body communication hole.
11 . The suction instrument according to claim 7 , wherein
the suctorial holding portion is provided with a contacting pad which is operable to contact with the member to be sucked,
the contacting pad is formed at a location including a periphery of the suction port, and the through-hole formed in the member to be sucked is communicated with the exterior at the location devoid of the contacting pad.