Biomagnetism measuring device, biomagnetism measuring system, and biomagnetism measuring method

1. A biomagnetism measuring device comprising:

a magnetic sensor including:

a plurality of tunnel magneto-resistive elements, each of said plurality of tunnel magneto-resistive elements including:

a fixed magnetic layer in which a direction of magnetization is fixed;

a free magnetic layer in which a direction of magnetization is changed by being influenced by a magnetic flux from outside; and

an insulating layer disposed between the fixed magnetic layer and the free magnetic layer, and having resistance being changed by a tunnel effect depending on an angle difference between the direction of the magnetization of the fixed magnetic layer and the direction of the magnetization of the free magnetic layer; and

a support unit made of an elastic material which supports the magnetic sensor such that the plurality of tunnel magneto-resistive elements are adapted to face a living body

wherein the plurality of tunnel magneto-resistive elements are arranged as:

a first tunnel magneto-resistive element array in which the direction of the magnetization of the respective fixed magnetic layers are fixed in a first direction,

a second tunnel magneto-resistive element array in which the direction of the magnetization of the respective fixed magnetic layers are fixed in a second direction which intersects with the first direction, and

a third tunnel magneto-resistive element array in which the direction of the magnetization of the respective fixed magnetic layers are fixed in a third direction which is at right angles to the first direction and the second direction, the first, second and third tunnel magneto-resistive element arrays being configured in individual chips, and each of said individual chips being mounted on the same wiring substrate,

wherein each tunnel magneto-resistive array outputs an output signal in accordance with a resistance value of the insulating layer of each of the plurality of tunnel magneto-resistive elements in the respective tunnel-magneto-resistive array, the resistance value being configured to be changed by magnetism emitted from the living body,

wherein the support unit has a shape configured to surround a measurement target part of the living body and is adapted to cover the measurement target part and a vicinity of the measurement target part, and is further adapted to partially or entirely touch a surface of the living body at the measurement target part and/or the vicinity of the measurement target part so that the biomagnetism measuring device can be worn by the living body,

wherein the plurality of tunnel magneto-resistive elements are connected in a lattice in the first, second and third tunnel magneto-resistive element arrays, and the output signal from each tunnel magneto-resistive array is output from a shared output terminal provided for the plurality of tunnel magneto-resistive elements in each tunnel magneto-resistive array,

wherein bonding faces of fixed magnetic layers and insulating layers and/or bonding faces of free magnetic layers and insulating layers of the plurality of tunnel magnetoresistive elements of the respective tunnel magneto-resistive element array are disposed on a shared plane,

wherein the shared plane of the first tunnel magneto-resistive element array is adapted along a direction perpendicular to a measurement target part of the living body,

wherein the plurality of tunnel magneto-resistive elements are connected in the lattice between two shared output terminals provided for the respective tunnel magneto-resistive element array to output the output signal; and

wherein, on a substrate in a chip in which the tunnel magneto-resistive element arrays are configured, groups of tunnel magneto-resistive elements are formed in two rows of two tunnel magneto-resistive elements which share a shared lower electrode among the tunnel magneto-resistive elements of a respective group, the groups being repeatedly arranged lengthwise and breadthwise, wherein four tunnel magneto-resistive elements of four different groups that are not sharing a shared lower electrode share a shared upper electrode, such that the plurality of tunnel magneto-resistive elements are connected in the lattice between the two shared output terminals.

2. A biomagnetism measuring method comprising:

supporting a magnetic sensor with a support unit such that a plurality of tunnel magneto-resistive elements are adapted to face a living body, the magnetic sensor including the plurality of tunnel magneto-resistive elements, each element of the plurality of tunnel magneto-resistive elements including:

a fixed magnetic layer in which a direction of magnetization is fixed;

a free magnetic layer in which a direction of magnetization is changed by being influenced by a magnetic flux from outside; and

an insulating layer disposed between the fixed magnetic layer and the free magnetic layer, and having resistance being changed by a tunnel effect depending on an angle difference between the direction of the magnetization of the fixed magnetic layer and the direction of the magnetization of the free magnetic layer;

wherein the support unit has a shape configured to surround a measurement target part of the living body and is adapted to cover the measurement target part and a vicinity of the measurement target part, and is adapted to partially or entirely touch a surface of the living body at the measurement target part and/or the vicinity of the measurement target part so that the biomagnetism measuring device is configured to be worn by the living body,

wherein the magnetic sensor further includes the plurality of tunnel magneto-resistive elements arranged as a first tunnel magneto-resistive element array in which the direction of the magnetization of the respective fixed magnetic layers are fixed in a first direction, a second tunnel magneto-resistive element array in which the direction of the magnetization of the respective fixed magnetic layers are fixed in a second direction which intersects with the first direction, and a third tunnel magneto-resistive element array in which the direction of the magnetization of the respective fixed magnetic layers are fixed in a third direction which is at right angles to the first direction and the second direction, the first, second and third tunnel magneto-resistive element arrays being configured in individual chips, and each of said individual chips being mounted on the same wiring substrate,

wherein the plurality of tunnel magneto-resistive elements are connected in a lattice in the first, second and third tunnel magneto-resistive element arrays, and each tunnel magneto-resistive array outputs an output signal from a shared output terminal provided for the plurality of tunnel magneto-resistive elements in each tunnel magneto-resistive array,

wherein bonding faces of fixed magnetic layers and insulating layers and/or bonding faces of free magnetic layers and insulating layers of the plurality of tunnel magneto-resistive elements of the respective tunnel magneto-resistive element array are disposed on a shared plane,

wherein the shared plane of the first tunnel magneto-resistive element array is adapted along a direction perpendicular to a measurement target part of the living body, and

measuring magnetism of the living body based on the output signals, wherein each output signal is in accordance with a resistance value of the insulating layer of each of the plurality of tunnel magneto-resistive elements in the respective tunnel magneto-resistive array, the resistance value being configured to be changed by the magnetism emitted from the living body;

wherein the plurality of tunnel magneto-resistive elements are connected in the lattice between two shared output terminals provided for the respective tunnel magneto-resistive element array to output the output signal; and

wherein, on a substrate in a chip in which the tunnel magneto-resistive element arrays are configured, groups of tunnel magneto-resistive elements are formed in two rows of two tunnel magneto-resistive elements which share a shared lower electrode among the tunnel magneto-resistive elements of a respective group, the groups being repeatedly arranged lengthwise and breadthwise, wherein four tunnel magneto-resistive elements of four different groups that are not sharing a shared lower electrode share a shared upper electrode, such that the plurality of tunnel magneto-resistive elements are connected in the lattice between the two shared output terminals.