Substrate support with advanced edge control provisions
Embodiments of the present invention generally provide an apparatus with a recess and a cavity formed therein for future hardware retrofit and uniformity enhancement and methods for controlling the same. In one embodiment, a substrate support includes a supporting body having an outer wall, a ground path disposed against and bounding the outer wall of the supporting body, a mounting plate coupled to a lower surface of the supporting body, wherein the mounting plate includes a lip extending outward from the mounting plate defining an upper surface; and a recess formed at a perimeter of the supporting body above the upper surface of the lip of the mounting plate, the recess lining on the ground path extending at least partially to the mounting plate.
1. A substrate support, comprising:
a supporting body having an outer wall;
a ground path disposed against and bounding the outer wall of the supporting body;
a mounting plate coupled to a lower surface of the supporting body, wherein the mounting plate includes a lip extending outward from the mounting plate defining an upper surface; and
a recess formed at a perimeter of the supporting body above the upper surface of the lip of the mounting plate, the recess on the ground path extending at least partially to the mounting plate, wherein the supporting body comprises:
a substrate supporting plate;
a cooling plate coupled to the substrate supporting plate;
an inlet/outlet plate coupled to the cooling plate; and
a base plate coupled to the inlet and outlet plate.
2. The substrate support of claim 1 , further comprising:
a ground plate disposed between the supporting body and the mounting plate.
3. The substrate support of claim 1 , further comprising:
a liner disposed between the supporting body and the ground path.
4. The substrate support of claim 1 , further comprising:
a main chassis disposed to the mounting plate.
5. The substrate support of claim 1 , further comprising:
at least one cavity defined in the mounting plate.
6. The substrate support of claim 4 , further comprising:
at least one cavity defined between the mounting plate and the main chassis.
7. The substrate support of claim 1 , wherein the ground path disposed in a lower part of the recess above an upper surface of the lip.
8. The substrate support of claim 1 , wherein the recess has a width between about 5 mm and about 30 mm.
9. The substrate support of claim 5 , wherein the cavity has a width between about 10 mm and about 50 mm.
10. The substrate support of claim 5 , wherein the cavity has a height between about 10 mm and about 80 mm.
11. The substrate support of claim 5 , wherein the cavity is configured to receive an electrode, a RF electrode, cooling or heating elements, a RF ground path, magnets, coils, light sources or lift pins to be disposed therein.
12. The substrate support of claim 1 , wherein the recess circumscribes the perimeter of the supporting body above the lip of the mounting plate.
13. The substrate support of claim 1 , wherein the recess is configured to receive an electrode, a RF power electrode, a ground path, heating elements, cooling elements, coil, magnetic wires, or light sources to be disposed therein.
14. A substrate support, comprising:
a supporting body;
a mounting plate coupled to the supporting body; and
at least one cavity defined in the mounting plate extending at least partially into a main chassis coupled to the supporting body, wherein the cavity is formed in a position in the mounting plate outward from lift pins disposed in the mounting plate, wherein the supporting body comprises:
a substrate supporting plate;
a cooling plate coupled to the substrate supporting plate;
an inlet/outlet plate coupled to the cooling plate; and
a base plate coupled to the inlet and outlet plate.
15. The substrate support of claim 14 , wherein the cavity is in form of individual spaced apart holes, space, apertures, channels.
16. The substrate support of claim 14 , wherein the cavity is formed at an interface defined between the mounting plate and the main chassis.
17. The substrate support of claim 14 , wherein the cavity has a width between about 10 mm and about 50 mm.
18. The substrate support of claim 14 , wherein the cavity is configured to receive an electrode, a RF electrode, cooling or heating elements, a RF ground path, magnets, coils, light sources or lift pins to be disposed therein.
19. A substrate support, comprising:
a supporting body;
a ground plate coupled to the supporting body;
a mounting plate coupled to the ground plate, wherein the mounting plate has a lip extending outward from the mounting plate, defining a recess above the lip of the mounting plate circumscribing the supporting body and the ground plate; and
at least one cavity formed between the mounting plate and a main chassis coupled to the mounting plate, wherein the supporting body comprises:
a substrate supporting plate;
a cooling plate coupled to the substrate supporting plate;
an inlet/outlet plate coupled to the cooling plate; and
a base plate coupled to the inlet and outlet plate.
20. The substrate support of claim 19 , further comprising:
a ground path disposed in the recess.