Thin-film transistor substrate and method of manufacturing the thin-film transistor substrate
A thin film transistor substrate includes the following elements: a base substrate, a data line disposed on the base substrate, a source electrode contacting the data line, a drain electrode spaced from the source electrode, a channel disposed between the source electrode and the drain electrode, a pixel electrode electrically connected to the drain electrode, a gate insulation pattern disposed on the channel, and a gate electrode disposed on the gate insulation pattern.
1. A thin film transistor substrate comprising:
a base substrate;
a data line disposed on the base substrate and configured to transmit a data signal;
a source electrode contacting the data line;
a drain electrode spaced from the source electrode;
a channel disposed between the source electrode and the drain electrode;
a pixel electrode electrically connected to the drain electrode;
a gate insulation pattern disposed on the channel, wherein a width of the channel is substantially equal to a width of the gate insulation pattern, and wherein the width of the gate insulation pattern is equal to a distance between a first flat side of the gate insulation pattern and a second flat side of the gate insulation pattern; and
a gate electrode disposed on the gate insulation pattern,
wherein a first flat side of the gate electrode is directly connected to the first flat side the gate insulation pattern and is oblique with respect to the first flat side the gate insulation pattern.
2. The thin film transistor substrate of claim 1 , wherein the source electrode, the drain electrode, the pixel electrode, and the channel are each formed of at least one of zinc oxide (ZnO), zinc tin oxide (ZTO), zinc indium oxide (ZIO), indium oxide (InO), titanium oxide (TiO), indium gallium zinc oxide (IGZO), and indium zinc tin oxide (IZTO).
3. The thin film transistor substrate of claim 1 , further comprising a gate line electrically connected to the gate electrode and configured to transmit a gate signal, wherein the gate electrode extends parallel to the data line.
4. The thin film transistor substrate of claim 1 , further comprising:
a light-blocking pattern disposed between the channel and the base substrate; and
a buffer layer disposed between the light-blocking pattern and the channel,
wherein the source electrode and the data line are directly connected to each other through a contact hole of the buffer layer.
5. The thin film transistor substrate of claim 4 , wherein the data line and the light-blocking pattern are disposed in a same layer.
6. The thin film transistor substrate of claim 4 , wherein the light-blocking pattern comprises at least one of silicon-germanium alloy, germanium, and titanium oxide.
7. The thin film transistor substrate of claim 4 , wherein the thickness of the light-blocking pattern is in a range of about 1000 Å to about 2,000 Å.
8. The thin film transistor substrate of claim 1 , further comprising a passivation layer formed in a same layer as the pixel electrode, wherein the passivation layer comprises an opening through which at least a portion of the pixel electrode is exposed.