Wafer back side coating as dicing tape adhesive
View Patent ↗A semiconductor assembly comprises a semiconductor wafer, an adhesive coating disposed on the back side of the wafer, and a bare dicing tape, preferably UV radiation transparent. The assembly is prepared by the method comprising (a) providing a semiconductor wafer, (b) disposing a wafer back side coating on the semiconductor wafer, (c) partially curing the wafer back side coating to the extent that it adheres to the back side of the wafer and remains tacky, and (d) contacting the bare dicing tape to the partially cured and tacky wafer back side coating, optionally with heat and pressure.
1. A method for preparing an assembly of semiconductor wafer, wafer back side coating, and bare dicing tape, the method comprising
(a) providing a semiconductor wafer,
(b) disposing a wafer back side coating in direct contact with the semiconductor wafer,
(c) partially curing the wafer back side coating to the extent that it adheres to the back side of the wafer and remains tacky, and
(d) contacting the bare dicing tape to the partially cured and tacky wafer back side coating to form a laminated wafer, optionally with heat and pressure,
wherein the bare dicing tape does not contain an adhesive layer.
2. The method of claim 1 , wherein the bare dicing tape is UV radiation transparent.
3. The method of claim 2 further comprising (e) exposing to laminated wafer to UV radiation to further cure the wafer back side coating.
4. A method for preparing an assembly of semiconductor wafer, wafer back side coating, and bare dicing tape, the method consisting of
(a) providing a semiconductor wafer,
(b) disposing a wafer back side coating in direct contact with the semiconductor wafer,
(c) partially curing the wafer back side coating to the extent that it adheres to the back side of the wafer and remains tacky, and
(d) contacting the bare dicing tape to the partially cured and tacky wafer back side coating to form a laminated wafer, optionally with heat and pressure,
wherein the bare dicing tape does not contain an adhesive layer.
5. A method of removal of dies from a back side coated semiconductor wafer laminated with a bare dicing tape, the method comprising:
(a) providing a back side coated semiconductor wafer formed by
(i) applying a wafer back side coating in direct contact with the semiconductor wafer,
(ii) partially curing the wafer back side coating to the extent that it adheres to the back side of the wafer and remains tacky, and
(b) laminating the bare dicing tape directly to the partially cured wafer back side coating to form a laminated wafer, wherein the bare dicing tape is transparent to UV radiation;
(d) dicing to form a diced laminated wafer;
(e) exposing the diced laminated wafer to UV radiation to further cure the wafer back side and reduce tackiness; and
(f) removing the dies from the diced laminated wafer,
wherein the bare dicing tape does not contain an adhesive layer.