Semiconductor light emitting device and method for manufacturing the same

1. A method for manufacturing a semiconductor light emitting device including a first semiconductor layer including an n-type semiconductor layer; a second semiconductor layer including a p-type semiconductor layer; and a light emitting part provided between the first semiconductor layer and the second semiconductor layer, and including a plurality of barrier layers and a well layer provided between the barrier layers, the first semiconductor layer having: a first major surface on an opposite side to the light emitting part, a first irregularity provided on the first major surface and having a bottom face and a top face, and a second irregularity provided on the bottom face and the top face and having a bottom portion and a top portion, the first irregularity having a first level difference between the bottom face and the top face along a first direction from the first semiconductor layer toward the second semiconductor layer; and the second irregularity having a second level difference between the bottom portion and the top portion along the first direction, the second level difference being smaller than the first level difference, the method comprising:

forming a third irregularity serving as a basis of the second irregularity on a substrate major surface of a substrate;

forming a mask material having a pattern shape corresponding to a pattern of the first irregularity on the substrate major surface on which the third irregularity is formed;

processing the substrate major surface using the mask material as a mask to form a fourth irregularity serving as a basis of the first irregularity; and

forming the first semiconductor layer on the substrate major surface on which the third irregularity and the fourth irregularity have been formed.

2. The method according to claim 1 , wherein

at least one of the first level difference, a width of the bottom face along a direction perpendicular to the first direction, and a width of the top face along the direction perpendicular to the first direction is larger than a peak wavelength of light emitted from the light emitting part.

3. The method according to claim 1 , wherein

at least one of the second level difference, a width of the bottom portion along a direction perpendicular to the first direction, and a width of the top portion along the direction perpendicular to the first direction is not more than a peak wavelength of light emitted from the light emitting part.

4. The method according to claim 1 , wherein

the first irregurality further has a wall face provided between the bottom face and the top face, and

the wall face is inclined with respect to the first direction.

5. The method according to claim 1 , wherein

the first level difference is 1 micrometer or more and 5 micrometers or less.

6. The method according to claim 5 , wherein

a width of the bottom face along a direction perpendicular to the first direction and a width of the top face along the direction perpendicular to the first direction are 1 micrometer or more and 5 micrometers or less.

7. The method according to claim 1 , wherein

the second level difference is 10 nanometers or more and 500 nanometers or less.

8. The method according to claim 7 , wherein

a width of the bottom portion along a direction perpendicular to the first direction and a width of the top portion along the direction perpendicular to the first direction are 10 nanometers or more and 500 nanometers or less.

9. The method according to claim 1 , wherein

the second level difference is one-tenth or less than the first level difference.

10. The method according to claim 1 , wherein

a width of the bottom portion along a direction perpendicular to the first direction and a width of the top portion along the direction perpendicular to the first direction are one-tenth or less than a width of the bottom face along the direction perpendicular to the first direction and a width of the top face along the direction perpendicular to the first direction.