IP Library Granted Patent US 9,829,798
Granted Patent B2
US 9,829,798 · App. 13/835,631 · Granted Nov 28, 2017

Flow lithography technique to form microstructures using optical arrays

Inventors: Kai Melde (San Francisco, CA); Philipp H. Schmaelzle (Los Altos, CA)
Assignee: Palo Alto Research Center Incorporated
G03F7/70141B81C99/0095G03F1/50G03F7/16G03F7/2012G03F7/24
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,829,798
App. No.
13/835,631
Granted
Nov 28, 2017
Kind
B2
Abstract

A continuous flow projection lithography system to form microstructures using an optical array incorporated in a continuous coating process is provided. A mask is placed at a distance from the array. Each element of the array projects one image of the mask onto a substrate, effectively forming an array thereon. A coating process allows flows that can be used to define functional regions of particles or supporting layers that prevent adhesion of crosslinked polymers to surfaces.

Claims (49)

1. A system for synthesizing microstructures comprising:

a light source;

a mask having or generating at least one mask feature and being positioned to convey light from the light source ;

a moving target substrate having precursor material carried thereon; and,

an array of optical elements formed on a surface of a cylinder and positioned such that each optical element corresponds to a mask feature projected from the light source via the mask onto the moving target substrate to form microstructures in the precursor material.

2. The system as set forth in claim 1 wherein the array of optical elements is a microlens array.

3. The system as set forth in claim 1 wherein the array of optical elements is a mirror array.

4. The system as set forth in claim 1 wherein the light source is an ultraviolet light source.

5. The system as set forth in claim 1 wherein the mask comprises at least one of a static mask or a digital micromirror device.

6. The system as set forth in claim 1 further comprising air gaps or sheaths positioned to prevent binding between the precursor material and the moving substrate or the array.

7. The system as set forth in claim 1 wherein the light source and mask are positioned on an interior of the cylinder.

8. The system as set forth in claim 1 wherein the light source and mask are positioned on an exterior of the cylinder.

9. The system as set forth in claim 1 wherein the cylinder is formed of glass material.

10. A system for synthesizing microstructures comprising:

a light source;

a mask having or generating at least one mask feature and being positioned to convey light from the light source;

an array of optical elements positioned such that each optical element corresponds to a mask feature projected from the light source via the mask; and,

a cylinder having a surface with wells formed therein to align with the optical elements, the surface configured to carry precursor material in which microstructures are formed based on light projected from the light source onto the precursor material.

11. The system as set forth in claim 10 further comprising a source for the precursor, the source being configured to coat the cylinder with the precursor material.

12. The system as set forth in claim 10 further comprising a target to which formed particles are transferred from the cylinder.

13. The system as set forth in claim 10 wherein the array of optical elements is on the surface of the cylinder.

14. The system as set forth in claim 10 wherein the array of optical elements is positioned on the exterior of the cylinder.

15. The system as set forth in claim 10 wherein the light source and mask are positioned on an interior of the cylinder.

16. The system as set forth in claim 10 wherein the light source and mask are positioned on an exterior of the cylinder.

17. The system as set forth in claim 10 wherein the cylinder is formed of a glass material.

18. The system as set forth in claim 10 wherein the light source is an ultraviolet light source.

19. The system as set forth in claim 10 wherein the mask comprises at least one of a static mask or a digital micromirror device.

20. The system as set forth in claim 10 further comprising air gaps or sheaths positioned to prevent binding between the precursor material and the moving substrate or the array.

21. The system as set forth in claim 10 wherein the array of optical elements is a microlens array.

22. The system as set forth in claim 10 wherein the array of optical elements is a mirror array.

23. A system for synthesizing microstructures comprising:

a light source;

a mask having or generating at least one mask feature and being positioned to convey light from the light source;

a moving target substrate having precursor material carried thereon;

an array of optical elements positioned such that each optical element corresponds to a mask feature projected from the light source via the mask onto the moving target substrate to form microstructures in the precursor material; and

air gaps or sheaths positioned to prevent binding between the precursor material and the moving substrate or the array.

24. The system as set forth in claim 23 wherein the array of optical elements is a microlens array.

25. The system as set forth in claim 23 wherein the array of optical elements is a mirror array.

26. The system as set forth in claim 23 wherein the light source is an ultraviolet light source.

27. The system as set forth in claim 23 wherein the mask comprises at least one of a static mask or a digital micromirror device.

28. A system for synthesizing microstructures comprising:

a light source;

a dynamic mask comprising at least one digital micromirror device and having or generating at least one mask feature and being positioned to convey light from the light source;

a moving target substrate having precursor material carried thereon;

an array of optical elements positioned such that each optical element corresponds to a mask feature projected from the light source via the dynamic mask onto the moving target substrate to form microstructures in the precursor material; and

air gaps or sheaths positioned to prevent binding between the precursor material and the moving substrate or the array.

29. The system as set forth in claim 28 wherein the array of optical elements is a microlens array.

30. The system as set forth in claim 28 wherein the array of optical elements is a mirror array.

31. The system as set forth in claim 28 wherein the light source is an ultraviolet light source.

Assignments (9)
SECOND LIEN NOTES PATENT SECURITY AGREEMENT Recorded Jul 2, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 071785/0550 →
FIRST LIEN NOTES PATENT SECURITY AGREEMENT Recorded Apr 11, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 070824/0001 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT RF 064760/0389 Recorded Feb 13, 2024
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: XEROX CORPORATION
Reel/Frame 068261/0001 →
SECURITY INTEREST Recorded Feb 13, 2024
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 066741/0001 →
SECURITY INTEREST Recorded Nov 20, 2023
From: XEROX CORPORATION
To: JEFFERIES FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 065628/0019 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVAL OF US PATENTS 9356603, 10026651, 10626048 AND INCLUSION OF US PATENT 7167871 PREVIOUSLY RECORDED ON REEL 064038 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 28, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064161/0001 →
SECURITY INTEREST Recorded Jun 22, 2023
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 064760/0389 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064038/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 15, 2013
From: MELDE, KAI; SCHMAELZLE, PHILIPP H.
To: PALO ALTO RESEARCH CENTER INCORPORATED
Reel/Frame 030014/0239 →
Continuity (1)
Related Publication 20140268077A1 · Sep 18, 2014