Semiconductor device
To suppress stress variation on a channel forming region, a semiconductor device includes an element isolating region on the semiconductor substrate principal surface, and an element forming region on the principal surface to be surrounded by the element isolating region. The principal surface has orthogonal first and second directions. A circumferential shape of the element forming region has a first side extending along the first direction. The element forming region has a first transistor region (TR 1 ), a second transistor region (TR 2 ) arranged between the first side and TR 1 , and a dummy region on the first direction side of TR 1 . TR 1 has a first channel forming region facing the first side. TR 2 has a second channel forming region facing the first side. The first channel forming region has a non-facing region that is not facing the second channel forming region. The dummy region faces the non-facing region in the second direction.
1. A semiconductor device comprising:
a semiconductor substrate, wherein on the substrate is an element forming region surrounded by an element isolating region separating the element forming region from other regions, the element forming region including:
a first transistor having a first gate forming region between first diffusion layers, said first gate forming region extending in a first direction which is a gate width direction;
a second transistor arranged adjacent to said first transistor in said first direction, said second transistor having a second gate forming region between second diffusion layers, said second gate forming region extending in said first direction to be arranged in plan-view straight-line alignment with said first gate forming region;
a first separation region arranged between said first transistor and said second transistor, wherein in said plan view, said first diffusion layers are discrete from and spaced apart from said second diffusion layers by said first separation region, and said first gate forming region is discrete from and spaced apart from said second gate forming region by said first separation region;
a third transistor arranged adjacent to said first transistor in a second direction which is perpendicular to said first direction, and said third transistor having a third gate forming region between third diffusion layers, said third gate forming region extending in said first direction;
a fourth transistor arranged adjacent to said third transistor in said first direction, and said fourth transistor having a fourth gate forming region between fourth diffusion layers, said fourth gate forming region extending in said first direction to be arranged in plan-view straight-line alignment with said third gate forming region; and
a second separation region arranged between said third transistor and said fourth transistor, wherein in said plan view, said third diffusion layers are discrete from and spaced apart from said fourth diffusion layers by said second separation region, and said third gate forming region is discrete from and spaced apart from said fourth gate forming region by said first separation region;
wherein i) a sum of a length of said first diffusion layer in said first direction, a length of said second diffusion layers in said first direction and a length of said first separation region in said first direction is equal to ii) a sum of a length of said third diffusion layers in said first direction, a length of said fourth diffusion layers in said first direction and a length of said second separation region in said first direction; and
a first dummy gate forming region extending in said first direction between said first diffusion layers and said third diffusion layers, with said first dummy gate forming region further extending in said first direction from an end of said first diffusion layers along and past an end part of said first separation region and between said second diffusion layers and said fourth diffusion layers to at least partially space said second diffusion layers apart from said fourth diffusion layers.
2. The semiconductor device according to claim 1 , wherein said second and fourth gate forming regions are dummy gate forming regions, and a predetermined voltage applied to said second and fourth gate forming regions makes said second and fourth forming regions inactive.
3. The semiconductor device according to claim 2 , wherein said predetermined voltage is a power supply voltage or ground.
4. The semiconductor device according to claim 1 , wherein said length of said first diffusion layers in said first direction is different from said length of said third diffusion layers in said first direction.
5. The semiconductor device according to claim 1 , wherein an edge of said first diffusion layers and an edge of said third diffusion layers are aligned in said first direction.
6. The semiconductor device according to claim 1 , wherein said first diffusion layers and said third diffusion layers are continuous, and said second diffusion layers and said fourth diffusion layers are continuous.
7. The semiconductor device according to claim 1 ,
wherein said first dummy gate forming region further extends in said first direction between said second diffusion layers and said fourth diffusion layers to completely space said second diffusion layers apart from said fourth diffusion layers.
8. The semiconductor device according to claim 1 , wherein,
a width of said first diffusion layers in said first direction is different from a width of said second diffusion layers in said first direction.
9. The semiconductor device according to claim 8 , wherein,
a width of said third diffusion layers in said first direction is different from a width of said fourth diffusion layers in said first direction.