IP Library Granted Patent US 8,939,428
Granted Patent B2
US 8,939,428 · App. 13/853,674 · Granted Jan 27, 2015

Liquid flow controller and precision dispense apparatus and system

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Quick Facts
Patent No.
US 8,939,428
App. No.
13/853,674
Granted
Jan 27, 2015
Kind
B2
Abstract

Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.

Claims (22)

1. An assembly, comprising

a valve housing having a cavity, a diaphragm in said cavity adapted to deflect upon the application of force, a first valve cavity, a first diaphragm in said first valve cavity, a second valve cavity, a second diaphragm in said second valve cavity, and a spring biasing said second diaphragm to prevent fluid communication between said first and second valve cavities, and

an actuator in communication with said first diaphragm, wherein application of force by said actuator allows fluid communication between said first and second valve cavities.

2. The assembly of claim 1 , wherein said first and second valve cavities are annular, and wherein said first cavity is in fluid communication with a linear fluid inlet path, and said second valve cavity is in fluid communication with a linear fluid outlet path.

3. The assembly of claim 2 , further comprising a pressure sensor in said linear fluid outlet path.

4. The assembly of claim 2 , wherein fluid enters said first valve cavity from said fluid inlet path and remains therein until the force applied by a motor overcomes the bias of said spring.

5. The assembly of claim 2 , wherein said fluid inlet path defines a first horizontal plane, said fluid outlet path defines a second horizontal plane, and wherein said first and second planes do not intersect.

6. A valve with reduced hysteresis, comprising

a valve housing having a cavity, a first valve cavity having a fluid inlet, a first diaphragm in said first valve cavity, a second valve cavity having a fluid outlet, a second diaphragm in said second valve cavity, and a spring biasing said second diaphragm to prevent fluid communication between said first and second valve cavities, and

an actuator in communication with said first diaphragm, wherein application of force by said actuator allows fluid communication between said first cavity and said second cavity to allow fluid communication between said fluid inlet and said fluid outlet.

7. The valve of claim 6 , wherein the valve is substantially linear.

8. The valve of claim 6 , further comprising a motor to drive the actuator.

9. The valve of claim 8 , wherein the motor comprises a stepper motor.

10. The valve of claim 6 , wherein the fluid inlet is in fluid communication with a linear fluid inlet flow path.

11. The valve of claim 10 , wherein the fluid outlet is in fluid communication with a linear fluid outlet flow path.

12. The valve of claim 11 , wherein in the fluid inlet flow path is located along a tangential of the first valve cavity and the fluid outlet flow path is located along a tangential of the second valve cavity.

13. The valve of claim 11 , wherein said fluid inlet path defines a first horizontal plane, said fluid outlet flow path defines a second horizontal plane, and wherein said first and second planes do not intersect.

14. The valve of claim 6 , wherein a passageway connects the first valve cavity and the second valve cavity, the passageway partially defined by a valve seat configured to seat a portion of the second diaphragm seats and wherein application of force by the actuator causes the second diaphragm to unseat from the passageway.

15. The valve of claim 14 , wherein the first diaphragm is configured to bow away from the second diaphragm when the second diaphragm is seated and the first diaphragm is pulled away from the second diaphragm by the actuator.

16. The valve of claim 6 , wherein the first valve cavity and second valve cavity are annular cavities.

17. The valve of claim 6 , wherein the actuator and the spring counter each other.

18. The valve of claim 6 , further comprising a pneumatic diaphragm, wherein deflection of the pneumatic diaphragm causes deflection of the first diaphragm and second diaphragm.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 8, 2014
From: MCLOUGHLIN, ROBERT F.; GONNELLA, GEORGE; GASHGAEE, IRAJ; LAVERDIERE, MARC; MARRS, JENNIFER
To: MYKROLIS CORPORATION
Reel/Frame 032847/0761 →
MERGER Recorded May 8, 2014
From: MYKROLIS CORPORATION
To: ENTEGRIS, INC.
Reel/Frame 032854/0167 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →