Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
View Patent ↗Strategies for tool designs and their uses wherein the tools can operate in either closed or open modes of operation. The tools easily transition between open and closed modes on demand. According to one general strategy, environmentally controlled pathway(s) couple the ambient to one or more process chambers. Air amplification capabilities upstream from the process chamber(s) allow substantial flows of air to be introduced into the process chamber(s) on demand. Alternatively, the fluid pathways are easily closed, such as by simple valve actuation, to block egress to the ambient through these pathways. Alternative flows of nonambient fluids can then be introduced into the process chamber(s) via pathways that are at least partially in common with the pathways used for ambient air introduction. In other strategies, gap(s) between moveable components are sealed at least with flowing gas curtains rather than by relying only upon direct physical contact for sealing.
1. A method for processing a microelectronic workpiece, comprising:
a) positioning the workpiece in a processing chamber, said workpiece having an outer periphery;
b) providing a moveable cover overlying the workpiece, the moveable cover having an outer periphery and comprising at least one inlet through which at least one treatment fluid can be introduced into the processing chamber;
c) defining, with a moveable boundary, at least a portion of an exhaust duct having an inlet proximal to the outer periphery of the workpiece wherein the moveable boundary comprises an inner periphery proximal to but spaced apart from the outer periphery of the cover during at least a portion of a treatment of the workpiece so a gap exists between the cover and the moveable boundary; and
d) isolating the chamber from ambient air during at least a portion of the treatment by forming a boundary across the gap with a curtain of flowing gas, and further providing a plenum comprising a fluid pathway to help distribute the flow of the curtain of flowing gas to the gap;
wherein the curtain of flowing gas flows across and through the gap.
2. A method for processing a microelectronic workpiece, comprising:
a) positioning the workpiece in a processing chamber, said workpiece having an outer periphery;
b) providing a moveable cover overlying the workpiece, the moveable cover having an outer periphery and comprising at least one inlet through which at least one treatment fluid can be introduced into the processing chamber;
c) defining, with a moveable boundary, at least a portion of an exhaust duct having an inlet proximal to the outer periphery of the workpiece wherein the moveable boundary comprises an inner periphery proximal to but spaced apart from the outer periphery of the cover during at least a portion of a treatment of the workpiece so a gap exists between the cover and the moveable boundary; and
d) isolating the chamber from ambient air during at least a portion of the treatment by forming a boundary across the gap with a curtain of flowing gas, and further providing a plenum comprising a fluid pathway to help distribute the flow of the curtain of flowing gas to the gap;
further comprising the step of providing a physical seal between the moveable cover and the moveable boundary to help isolate the chamber from ambient air.
3. The method of claim 2 , comprising the further step of introducing the gas flow into the plenum through one or more gas introduction channels in the moveable cover.
4. The method of claim 2 , comprising the further step of providing a barrier plate overlying the process chamber and an annular member attached to the barrier plate, the annular member overlying the moveable boundary and having a surface being spaced apart from the moveable boundary to define a plenum upstream from the gap.
5. The method of claim 4 , further comprising the step of providing an annular seal ring between the barrier plate and the annular member wherein the annular seal ring seals an annular trough, said annular trough being coupled to a plurality of aspirating channels.