Scanned source oriented nanofiber formation
Nanofibers are formed using electrospray deposition from microfluidic source. The source is brought close to a surface, and scanned in one embodiment to form oriented or patterned fibers. In one embodiment, the surface has features, such as trenches on a silicon wafer. In further embodiments, the surface is rotated to form patterned nanofibers, such as polymer nanofibers. The nanofibers may be used as a mask to create features, and as a sacrificial layer to create nanochannels.
1. A method comprising:
depositing a depolymerizable nanofiber on a substrate;
covering the nanofiber with a capping layer; and
removing the nanofiber to create a nanochannel.
2. A method comprising:
depositing a depolymerizable nanofiber on a substrate;
covering the nanofiber with a capping layer; and
removing the nanofiber to create a nanochannel, wherein the nanofiber is removed by:
creating openings in the capping layer on either side of a portion of the nanofiber; and
depolymerizing the nanofiber.
3. The method of claim 2 wherein the nanochannel is substantially elliptical in cross section.
4. A method comprising:
electrospraying a depolymerizable nanofiber on a substrate;
covering the nanofiber with a capping layer; and
removing the nanofiber to create a nanochannel.
5. The method of claim 4 wherein the nanofiber is removed by:
creating openings in the capping layer on either side of a portion of the nanofiber; and
depolymerizing the nanofiber.
6. The method of claim 5 wherein the nanochannel is substantially elliptical in cross section.