Interlayer filler composition for three-dimensional integrated circuit
To provide an interlayer filler composition which, in 3D lamination of semiconductor device chips, forms a highly thermally conductive filling interlayer simultaneously with the bonding of solder bumps or the like and lands between semiconductor device chips, a coating fluid and a process for producing a three-dimensional integrated circuit. An interlayer filler composition for a three-dimensional integrated circuit, which comprises a resin (A) having a melt viscosity at 120° C. of at most 100 Pa·s and a flux (B), the content of the flux (B) being at least 0.1 part by weight and at most 10 parts by weight per 100 parts by weight of the resin (A).
1. An interlayer filler composition, consisting essentially of:
an epoxy resin (A) having a melt viscosity at 120° C. of at most 100 Pa·s;
a flux (B);
a curing agent (C);
an inorganic filler (D) having a maximum volume particle size of at most 10 μm and a volume average particle size of least 0.1 μm and at most 5 μm; and
at least one additive selected from the group consisting of a coupling agent, an ultraviolet inhibitor, an antioxidant, a plasticizer, a flame retardant, a coloring agent, a dispersing agent, a fluidity-improving agent, and an adhesion-improving agent;
wherein:
a content of the flux (B) is at least 0.1 part by weight and at most 10 parts by weight per 100 parts by weight of the resin (A); and
the curing agent (C) is at least one member selected from the group consisting of a phenol type curing agent, an acid anhydride type curing agent, an amide type curing agent, a tertiary amine, imidazole or a derivative thereof, an organic phosphine, a phosphonium salt, a tetraphenylborate salt, an organic acid dihydrazide, a boron halide amine complex, a polymercaptan type curing agent, an isocyanate type curing agent, and a blocked isocyanate type curing agent.
2. The interlayer filler composition according to claim 1 , which contains the inorganic filler (D) in an amount of at least 50 parts by weight and at most 400 parts by weight per 100 parts by weight of the resin (A).
3. The interlayer filler composition according to claim 2 , wherein the amount of the inorganic filler (D) is at least 5 vol % and at most 60 vol % based on the total volume of the resin (A) and the inorganic filler (D).
4. The interlayer filler composition according to claim 2 , wherein the inorganic filler (D) is boron nitride.
5. The interlayer filler composition according to claim 1 , wherein the melt viscosity of the resin (A) at 50° C. is at least 2,000 Pa·s.
6. The interlayer filler composition according to claim 1 , wherein the resin (A) is a thermosetting resin.
7. The interlayer filler composition according to claim 1 , wherein the epoxy resin is an epoxy resin (A1) which is a phenoxy resin, or a mixture of the epoxy resin (A1) and an epoxy resin (A2) which is an epoxy resin having at least two epoxy groups in its molecule.
8. The interlayer filler composition according to claim 1 , wherein the flux (B) is an organic carboxylic acid.
9. The interlayer filler composition according to claim 8 , wherein the decomposition temperature of the organic carboxylic acid is at least 130° C.
10. The interlayer filler composition according to claim 1 , wherein the curing agent (C) is imidazole or a derivative thereof.
11. A coating fluid of an interlayer filler composition, which comprises the interlayer filler composition as defined in claim 1 and further comprises an organic solvent (E).
12. The interlayer filler composition according to claim 1 , wherein the content of the flux (B) is at least 0.1 part by weight and at most 5 parts by weight per 100 parts by weight of the resin (A).
13. The interlayer filler composition according to claim 1 , wherein the inorganic filler (D) is alumina.
14. The interlayer filler composition according to claim 1 , wherein the interlayer filler composition comprises 0.1 to 60 parts by weight of the curing agent (C) per 100 parts by weight of the epoxy resin (A).
15. The interlayer filler composition according to claim 1 , wherein the inorganic filler (D) has a coefficient of thermal conductivity of at least 2 W/mK.
16. The interlayer filler composition according to claim 1 , wherein the wherein the inorganic filler (D) is alumina or boron nitride.
17. An interlayer filler composition, consisting of:
an epoxy resin (A) having a melt viscosity at 120° C. of at most 100 Pa·s;
a flux (B);
a curing agent (C);
an inorganic filler (D) having a maximum volume particle size of at most 10 μm and a volume average particle size of least 0.1 μm and at most 5 μm; and
at least one additive selected from the group consisting of a coupling agent, an ultraviolet inhibitor, an antioxidant, a plasticizer, a flame retardant, a coloring agent, a dispersing agent, a fluidity-improving agent, and an adhesion-improving agent;
wherein:
a content of the flux (B) is at least 0.1 part by weight and at most 10 parts by weight per 100 parts by weight of the resin (A); and
the curing agent (C) is at least one member selected from the group consisting of a phenol type curing agent, an acid anhydride type curing agent, an amide type curing agent, a tertiary amine, imidazole or a derivative thereof, an organic phosphine, a phosphonium salt, a tetraphenylborate salt, an organic acid dihydrazide, a boron halide amine complex, a polymercaptan type curing agent, an isocyanate type curing agent, and a blocked isocyanate type curing agent.
18. An interlayer filler composition, consisting essentially of:
an epoxy resin (A) having a melt viscosity at 120° C. of at most 100 Pa·s;
a flux (B);
a curing agent (C); and
an inorganic filler (D) having a maximum volume particle size of at most 10 μm and a volume average particle size of least 0.1 μm and at most 5 μm
wherein:
a content of the flux (B) is at least 0.1 part by weight and at most 10 parts by weight per 100 parts by weight of the resin (A); and
the curing agent (C) is at least one member selected from the group consisting of a phenol type curing agent, an acid anhydride type curing agent, an amide type curing agent, a tertiary amine, imidazole or a derivative thereof, an organic phosphine, a phosphonium salt, a tetraphenylborate salt, an organic acid dihydrazide, a boron halide amine complex, a polymercaptan type curing agent, an isocyanate type curing agent, and a blocked isocyanate type curing agent.
19. The interlayer filler composition according to claim 18 , which contains the inorganic filler (D) in an amount of at least 50 parts by weight and at most 400 parts by weight per 100 parts by weight of the resin (A).
20. The interlayer filler composition according to claim 19 , wherein the amount of the inorganic filler (D) is at least 5 vol % and at most 60 vol % based on the total volume of the resin (A) and the inorganic filler (D).
21. The interlayer filler composition according to claim 19 , wherein the inorganic filler (D) is boron nitride.
22. The interlayer filler composition according to claim 18 , wherein the melt viscosity of the resin (A) at 50° C. is at least 2,000 Pa·s.
23. The interlayer filler composition according to claim 18 , wherein the resin (A) is a thermosetting resin.
24. The interlayer filler composition according to claim 18 , wherein the epoxy resin is an epoxy resin (A1) which is a phenoxy resin, or a mixture of the epoxy resin (A1) and an epoxy resin (A2) which is an epoxy resin having at least two epoxy groups in its molecule.
25. The interlayer filler composition according to claim 18 , wherein the flux (B) is an organic carboxylic acid.
26. The interlayer filler composition according to claim 25 , wherein the decomposition temperature of the organic carboxylic acid is at least 130° C.
27. The interlayer filler composition according to claim 18 , wherein the curing agent (C) is imidazole or a derivative thereof.
28. The interlayer filler composition according to claim 18 , wherein the content of the flux (B) is at least 0.1 part by weight and at most 5 parts by weight per 100 parts by weight of the resin (A).
29. The interlayer filler composition according to claim 18 , wherein the inorganic filler (D) is alumina.
30. The interlayer filler composition according to claim 18 , wherein the interlayer filler composition comprises 0.1 to 60 parts by weight of the curing agent (C) per 100 parts by weight of the epoxy resin (A).
31. The interlayer filler composition according to claim 18 , wherein the inorganic filler (D) has a coefficient of thermal conductivity of at least 2 W/mK.
32. The interlayer filler composition according to claim 18 , wherein the wherein the inorganic filler (D) is alumina or boron nitride.
33. A coating fluid of an interlayer filler composition, which comprises the interlayer filler composition as defined in claim 18 and further comprises an organic solvent (E).
34. An interlayer filler composition, consisting of:
an epoxy resin (A) having a melt viscosity at 120° C. of at most 100 Pa·s;
a flux (B);
a curing agent (C); and
an inorganic filler (D) having a maximum volume particle size of at most 10 μm and a volume average particle size of least 0.1 μm and at most 5 μm;
wherein;
a content of the flux (B) is at least 0.1 part by weight and at most 10 parts by weight per 100 parts by weight of the resin (A); and
the curing agent (C) is at least one member selected from the group consisting of a phenol type curing agent, an acid anhydride type curing agent, an amide type curing agent, a tertiary amine, imidazole or a derivative thereof, an organic phosphine, a phosphonium salt, a tetraphenylborate salt, an organic acid dihydrazide, a boron halide amine complex, a polymercaptan type curing agent, an isocyanate type curing agent, and a blocked isocyanate type curing agent.