Nonvolatile memory device and fabricating method thereof
View Patent ↗A nonvolatile memory device comprises a substrate, a gate electrode, a single charge trapping sidewall and a source/drain region. The gate electrode is disposed on and electrically isolated from the substrate. The single charge trapping sidewall is disposed adjacent to a sidewall of the gate electrode and electrically isolated from the substrate and the gate electrode, so as to form a non-straight angle between the substrate and the single charge trapping sidewall. The source/drain region is disposed in the substrate and adjacent to the gate electrode.
1. A method for fabricating a nonvolatile memory device, comprising steps as follows:
forming a first dielectric layer and a gate electrode layer in sequence on a substrate;
patterning the gate electrode layer and the first dielectric layer to form a gate structure;
forming a second dielectric layer and a charge trapping layer in sequence to cover at least one sidewall of the gate structure;
removing portions of the charge trapping layer and the gate structure to form a single charge trapping sidewall adjacent to the sidewall of the remaining gate structure; and
forming a source/drain region in the substrate adjacent to the remaining gate structure.
2. The method for fabricating a nonvolatile memory device according to claim 1 , wherein the process for patterning the gate electrode layer and the first dielectric layer comprises steps of:
etching the gate electrode layer to form a gate electrode; and
performing an isotropic etching process to remove a portion of the first dielectric layer using the gate electrode as a mask, so as to form a plurality of undercuts at a bottom of the gate structure.
3. The method for fabricating a nonvolatile memory device according to claim 1 , wherein the undercuts are filled by the subsequently formed charge trapping layer, instead of the second dielectric layer.
4. The method for fabricating a nonvolatile memory device according to claim 1 , wherein the process for removing a portion of the charge trapping layer comprises a step of patterning the charge trapping layer to form a first single charge trapping sidewall adjacent to a first sidewall of the gate structure, and a second single charge trapping sidewall adjacent to a second sidewall of the gate structure.
5. The method for fabricating a nonvolatile memory device according to claim 4 , wherein the process for removing a portion of the gate structure comprises dividing the gate structure into a first gate structure portion and a second gate structure portion, wherein the first gate structure portion includes the first sidewall and the first single charge trapping sidewall, and the second gate structure portion includes the second sidewall and the second single charge trapping sidewall.
6. The method for fabricating a nonvolatile memory device according to claim 1 , further comprising steps of:
forming a first spacer adjacent to the first gate structure portion and the first single charge trapping sidewall; and
forming a second spacer adjacent to the second gate structure portion and the second single charge trapping sidewall.
7. The method for fabricating a nonvolatile memory device according to claim 1 , wherein the process for forming the source/drain region comprises steps of performing at least one ion implantation to form a common source/drain region between the first gate structure portion and the second gate structure portion.