Non-planar semiconductor structure
View Patent ↗A non-planar semiconductor structure includes a substrate, at least two fin-shaped structures, at least an isolation structure, and a plurality of epitaxial layers. The fin-shaped structures are located on the substrate. The isolation structure is located between the fin-shaped structures, and the isolation structure has a nitrogen-containing layer. The epitaxial layers respectively cover a part of the fin-shaped structures and are located on the nitrogen-containing layer. A non-planar semiconductor process is also provided for forming the semiconductor structure.
1. A non-planar semiconductor structure, comprising:
a substrate;
at least two fin-shaped structures located on the substrate;
at least an isolation structure located between the fin-shaped structures, the isolation structure and the fin-shaped structures having a nitrogen-containing layer; and
a plurality of epitaxial layers respectively covering a part of the fin-shaped structures and located on the nitrogen-containing layer.
2. The non-planar semiconductor structure according to claim 1 , wherein the substrate comprises a silicon substrate or a silicon-on-insulator substrate.
3. The non-planar semiconductor structure according to claim 1 , further comprising a gate structure covering the fin-shaped structures between the epitaxial layers.
4. The non-planar semiconductor structure according to claim 3 , wherein the gate structure further comprises:
a gate dielectric layer covering the fin-shaped structures;
a gate electrode covering the gate dielectric layer;
a cap layer covering the gate electrode; and
a spacer located beside the gate dielectric layer, the gate electrode and the cap layer.
5. The non-planar semiconductor structure according to claim 1 , wherein the nitride layer comprises a silicon nitride layer or a silicon oxynitride layer.
6. The non-planar semiconductor structure according to claim 1 , wherein the nitrogen-containing layer is also located between the fin-shaped structures and the epitaxial layers.