Crystalline aluminum carbide thin film, semiconductor substrate having the aluminum carbide thin film formed thereon and method of fabricating the same
View Patent ↗Embodiments of the invention provide a crystalline aluminum carbide thin film, a semiconductor substrate having the crystalline aluminum carbide thin film formed thereon, and a method of fabricating the same. Further, the method of fabricating the AlC thin film includes supplying a carbon containing gas and an aluminum containing gas to a furnace, to growing AlC crystals on a substrate.
1. A method of fabricating a crystalline AlC thin film, comprising:
supplying a carbon-containing gas and an aluminum-containing gas into a furnace, to grow the AlC thin film on a substrate.
2. The method of claim 1 , wherein the AlC thin film is grown by metal organic chemical vapor deposition.
3. The method of claim 1 , wherein the substrate is a sapphire substrate or a silicon carbide substrate.
4. The method of claim 3 , wherein the AlC thin film is formed on a c-plane of the sapphire substrate.
5. The method of claim 1 , wherein the carbon containing gas is methane and the aluminum containing gas is tri-methyl aluminum.
6. The method of claim 5 , wherein:
the tri-methyl aluminum is supplied at a flow rate of from 33 μmol/min to 66 μmol/min; and
the methane is supplied at a flow rate of from 13 mmol/min to 27 mmol/min.
7. The method of claim 6 , wherein the AlC thin film is grown at a temperature of at least 700° C.
8. The method of claim 6 , wherein the AlC thin film is grown at a temperature of at least 1100° C.
9. A method of fabricating a semiconductor substrate having a cyrstalline AlC thin film formed thereon, comprising:
supplying a carbon containing gas and an aluminum containing gas to a furnace, grow the AlC thin film on a substrate.
10. The method of claim 9 , wherein the AlC thin film is grown by metalorganic chemical vapor deposition.
11. The method of claim 9 , wherein the substrate is a sapphire substrate or a silicon carbide substrate.
12. The method of claim 9 , wherein:
the substrate is a sapphire substrate; and
the AlC thin film is formed on a c-plane of the sapphire substrate.
13. The method of claim 9 , wherein the carbon containing gas is methane and the aluminum containing gas is tri-methyl aluminum.
14. The method of claim 13 , wherein:
the tri-methyl aluminum is supplied at a flow rate of 33 μmol/min to 66 μmol/min; and
the methane is supplied at a flow rate of 13 mmol/min to 27 mmol/min.
15. The method of claim 14 , wherein the AlC thin film is grown at a temperature of at least 700° C.
16. The method of claim 14 , wherein the AlC thin film is grown at a temperature of at least 1100° C.