APPARATUS FOR EVALUATING LUBRICAN
An apparatus having a vacuum vessel that has a mechanism using a lubricant therein and not causing defects and faults to samples introduced into the vacuum vessel even it is an apparatus where lubricating oil or grease is applied is provided. An apparatus having a vacuum vessel that has a mechanism using a lubricant therein such as CD-SEM, in which a lubricant (oil, grease) whose adsorption amount per minute to a surface of a material introduced into the vacuum vessel of an apparatus for evaluating a lubricant after the start of vacuum evacuation and after reaches a quasi-equilibrium state is below 0.09 ng/cm 2 is employed.
1 . An apparatus for evaluating lubricant, comprising:
a vacuum vessel;
a quadrupole analyzer;
an angle valve connected to a surface that faces a surface connected to the quadrupole analyzer of the vacuum vessel;
a turbo-molecular pump connected to the angle valve;
a dry scroll pump connected to the turbo-molecular pump;
a plate for lubricant application provided inside the vacuum vessel; and
a crystal oscillator element provided inside the vacuum vessel.
2 . The apparatus for evaluating lubricant according to claim 1 ,
wherein the crystal oscillator element is attached inside a flange coupled to a surface that is different from the surface to which the quadrupole analyzer of the vacuum vessel and the angle valve are connected.
3 . The apparatus for evaluating lubricant according to claim 1 ,
wherein the plate for lubricant application has a folded structure in a U-shape having fold-back sides having different lengths.
4 . The apparatus for evaluating lubricant according to claim 3 ,
wherein a circular hole is provided to a longer side of the fold-back sides of the plate or lubricant application.
5 . The apparatus for evaluating lubricant according to claim 1 ,
wherein the plate for lubricant application is formed by folding a stainless plate having a length of 31 cm, a width of 16 cm, and a thickness of 1.5 mm.