Hybrid substrate, method for manufacturing the same, and semiconductor integrated circuit package
View Patent ↗A hybrid substrate includes a core layer composed of a glass woven cloth as a reinforcing material, and a glass-ceramic sintered body which at least has a glass component and a metal oxide component. The glass woven cloth and the glass-ceramic sintered body formed by an impregnation with respect to the glass woven cloth are in a form of sintering integration with each other.
1. A method for manufacturing a hybrid substrate, comprising:
(i) impregnating a glass woven cloth with a slurry comprising a precursor component of a glass-ceramic sintered body, and thereby forming a glass-ceramic green sheet in which the glass woven cloth is contained as a base material; and
(ii) subjecting the glass-ceramic green sheet to a sintering process, and thereby forming a core layer composed of the glass woven cloth and the glass-ceramic sintered body such that the glass woven cloth is contained in the whole interior of the core layer,
wherein the method further comprises at least one step of forming a build-up layer on at least one side of the core layer, in which step, a build-up resin layer and a wiring layer disposed on the build-up resin layer are respectively formed, and thereafter a bore is formed in the build-up resin layer, and a via-hole is formed from the bore,
wherein, during said subjecting of the glass-ceramic green sheet to the sintering process, a dummy green sheet which does not finally serve as a constituent component of the hybrid substrate is used wherein the dummy green sheet is disposed on each of opposing both sides of the glass-ceramic green sheet, and thereafter the glass-ceramic green sheet with the dummy green sheet provided thereon is subjected to the sintering process,
wherein at least one through-bore is formed in the glass-ceramic green sheet at a point in time between said impregnating the glass woven cloth with the slurry and said subjecting of the glass-ceramic green sheet to the sintering process, and thereafter the through-bore is filled with an electrically conductive paste to form a through-hole precursor therefrom, and a through-hole is formed from the through-hole precursor upon performing said subjecting the glass-ceramic green sheet to the sintering process,
wherein a thermoset resin layer precursor is provided on each of opposing sides of the core layer, and a metal foil is provided on the thermoset resin layer precursor, and the thermoset resin layer precursor and the metal foil are subjected to a heat treatment to form a thermoset resin layer from the thermoset resin layer precursor, and the metal foil is subjected to a patterning process to from a wiring layer from the metal foil, and
wherein at least one through-bore passing through the core layer, the thermoset resin layer and the metal foil is formed at a point in time after said heat treatment, and thereafter a through-hole is formed from the through-bore.
2. The method according to claim 1 , wherein the slurry comprises a glass powder whose softening point is lower than that of the glass woven cloth.
3. The method according to claim 1 , wherein the dummy green sheet is a green sheet comprising a metal oxide which cannot be sintered at a temperature of the sintering process.
4. The method according to claim 3 , further comprising removing the dummy green sheet at a point in time after said subjecting the glass-ceramic green sheet to a sintering process, and
removing the metal oxide derived from the dummy green sheet during said removing of the dummy green sheet.
5. The method according to claim 1 , wherein an electrically conductive paste is printed on each of the opposing sides of the core layer to form a wiring layer precursor, and thereafter subjecting the wiring layer precursor to a heat treatment to form a wiring layer therefrom.