Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater
A method of manufacturing a ceramic sintered body, includes: a film forming step of forming, on a surface of a heat-resistant metal material, a metal coating film made of a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material; a molding step of disposing the heat-resistant metal material provided with the coating film in the film forming step at a predetermined position in powder that serves as a starting material of a ceramic base, and molding a ceramic green body by press-molding the powder; and a sintering step of generating a ceramic sintered body by sintering the ceramic green body molded in the molding step.
1. A method of manufacturing a ceramic sintered body, comprising:
a film forming step of forming, on a surface of a heat-resistant metal material which is molybdenum or a molybdenum alloy, a metal coating film made of titanium, tantalum, or zirconium which is a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material;
a molding step of disposing the heat-resistant metal material provided with the coating film in the film forming step at a predetermined position in powder that serves as a starting material of a ceramic base, and molding a ceramic green body by press-molding the powder; and
a sintering step of generating a ceramic sintered body by sintering the ceramic green body molded in the molding step;
wherein the metal coating film suppresses a carbonization reaction of the heat-resistant metal material during the sintering.
2. The method of manufacturing a ceramic sintered body according to claim 1 ,
wherein the ceramic base is aluminum nitride, silicon nitride, or aluminum oxide.
3. The method of manufacturing a ceramic sintered body according to claim 1 ,
wherein a sintering temperature of the ceramic sintered body is 1,300 to 2,000° C.
4. The method of manufacturing a ceramic sintered body according to claim 1 ,
wherein a thickness of the metal coating film is 0.10 to 10.0 μm.
5. A ceramic sintered body formed by sintering a precursor ceramic, the precursor ceramic comprising:
a heat-resistant metal material which is molybdenum or a molybdenum alloy;
a metal coating film which is formed on a surface of the heat-resistant metal material, and is formed of titanium, tantalum, or zirconium which is a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material; and
a ceramic green body obtained by disposing the heat-resistant metal material provided with the metal coating film at a predetermined position in powder that serves as a starting material of a ceramic base, and press-molding the powder,
wherein a metal carbide coating film is formed when the metal coating film is carbonized during the sintering.
6. The ceramic sintered body according to claim 5 ,
wherein the ceramic base is aluminum nitride, silicon nitride, or aluminum oxide.
7. The ceramic sintered body according to claim 5 ,
wherein a sintering temperature of the ceramic sintered body is 1,300 to 2,000° C.
8. The ceramic sintered body according to claim 5 ,
wherein a thickness of the metal coating film is 0.10 to 10.0 μm.
9. A ceramic heater comprising a ceramic sintered body formed by sintering a precursor ceramic, the precursor ceramic comprising:
a heat-resistant metal material which is molybdenum or a molybdenum alloy;
a metal coating film which is formed on a surface of the heat-resistant metal material, and is formed of titanium, tantalum, or zirconium which is a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material; and
a ceramic green body obtained by disposing the heat-resistant metal material provided with the metal coating film at a predetermined position in powder that serves as a starting material of a ceramic base, and press-molding the powder,
wherein a metal carbide coating film is formed when the metal coating film is carbonized during the sintering.