Group 13 nitride semiconductor device and method of its manufacture
View Patent ↗Disclosed is a semiconductor device comprising a substrate ( 10 ); at least one semiconducting layer ( 12 ) comprising a nitride of a group 13 element on said substrate; and an ohmic contact ( 20 ) on the at least one semiconducting layer, said ohmic contact comprising a silicon-comprising portion ( 22 ) on the at least one semiconducting layer and a metal portion ( 24 ) adjacent to and extending over said silicon-comprising portion, the metal portion comprising titanium and a further metal. A method of manufacturing such a semiconductor device is also disclosed.
1. A semiconductor device comprising:
a substrate;
at least one semiconducting layer comprising a nitride of a group 13 element on said substrate; and
an ohmic contact on the at least one semiconducting layer, said ohmic contact comprising a silicon-comprising portion on the at least one semiconducting layer and a metal portion adjacent to and extending over said silicon-comprising portion, the metal portion comprising titanium and a further metal, wherein the ohmic contact does not contain gold, wherein the metal portion comprises a titanium layer, a layer of the further metal over the titanium layer, and a capping layer made of a material containing titanium for protecting the layer of the further metal, wherein the silicon-comprising portion comprises a first silicon-comprising portion and a second silicon-comprising portion laterally separated from the first silicon-comprising portion, wherein a part of the metal portion extends between the first silicon-comprising portion and the second silicon-comprising portion, and wherein the metal portion completely envelopes the first silicon-comprising portion and the second silicon-comprising portion.
2. The semiconductor device of claim 1 , wherein the silicon source of the silicon-comprising portion is selected from silicon, silicon oxide and silicon nitride.
3. The semiconductor device of claim 1 , wherein the metal portion comprises:
the titanium layer on the at least one semiconducting layer and extending over the silicon-comprising portion; and
the layer of the further metal over the titanium layer; and/or
an alloy layer of said titanium and the further metal.
4. The semiconductor device of claim 1 , wherein the first silicon-comprising portion and the second silicon-comprising portion are spacers or stripes.
5. The semiconductor device of claim 1 , wherein the nitride of a group 13 element is selected from aluminum nitride, gallium nitride and indium nitride.
6. The semiconductor device of claim 4 , wherein the at least one semiconducting layer on said substrate comprises a gallium nitride layer and an aluminum gallium nitride barrier layer in between said gallium nitride layer and the ohmic contact.
7. The semiconductor device of claim 1 , wherein the further metal is aluminum.
8. An integrated circuit comprising a semiconductor device of claim 1 .
9. The semiconductor device of claim 1 , wherein the capping layer is made of TiW or TiN.
10. The semiconductor device of claim 1 , wherein the first and second silicon-comprising portions are in direct contact with the at least one semiconducting layer, and wherein the first and second silicon-comprising portions are completely covered by the titanium layer.
11. A method of manufacturing a semiconductor device, comprising:
providing a substrate having thereon at least one semiconducting layer comprising a nitride of a group 13 element; and
forming an ohmic contact on the at least one semiconducting layer by:
forming a silicon-comprising layer on the at least one semiconducting layer;
patterning said silicon-comprising layer to form a silicon-comprising portion;
forming a metal portion metal portion adjacent to and extending over said silicon-comprising portion by:
depositing a metal portion comprising titanium and a further metal on the resultant structure said metal portion not containing gold, wherein the metal portion comprises a titanium layer, a layer of the further metal over the titanium layer, and a capping layer made of a material containing titanium for protecting the layer of the further metal, wherein the silicon-comprising portion comprises a first silicon-comprising portion and a second silicon-comprising portion laterally separated from the first silicon-comprising portion, wherein a part of the metal portion extends between the first silicon-comprising portion and the second silicon-comprising portion, and wherein the metal portion completely envelopes the first silicon-comprising portion and the second silicon-comprising portion; and
patterning the metal portion and the patterned silicon-comprising layer using at least one etch recipe; and
annealing the resultant structure to react the metal portion with silicon from the silicon-comprising layer.
12. The method of claim 11 , wherein the step of depositing a metal portion comprises depositing a titanium layer on the resultant structure and depositing a further metal layer such as an aluminum layer on the titanium layer.
13. The method of claim 11 , wherein the metal portion is deposited by evaporation or physical vapor deposition.
14. The method of claim 11 , wherein said patterning step comprises:
patterning the metal portion using the silicon-comprising portion as an etch stop; and
further patterning the silicon-comprising portion using the at least one semiconducting layer as an etch stop.
15. The method of claim 11 , wherein said annealing step is performed in a range of 600-900° C.