Electrode, an electronic device, and a method for manufacturing an optoelectronic device
According to various embodiments, an electrode may include at least one layer including a chemical compound including aluminum and titanium.
1. An electrode, comprising:
a bottom layer comprising tantalum and titanium nitride;
at least one layer disposed directly on the bottom layer, the at least one layer comprising a chemical compound comprising aluminum and titanium, and
a titanium nitride layer disposed directly on the at least one layer, wherein the titanium nitride layer provides an upper surface of the electrode.
2. The electrode according to claim 1 ,
wherein the at least one layer comprises an intermetallic chemical compound comprising aluminum and titanium.
3. The electrode according to claim 1 ,
wherein the at least one layer comprises an alloy comprising aluminum and titanium.
4. The electrode according to claim 1 ,
wherein the upper surface of the electrode has a roughness of equal to or less than 3 nm RMS roughness.
5. An electronic device, comprising:
an electronic circuit; and
an electrode comprising a bottom layer, the bottom layer comprising tantalum and titanium nitride; at least one layer disposed on the bottom layer, the at least one layer comprising a chemical compound comprising aluminum and titanium, wherein the ratio of aluminum and titanium in the at least one layer changes substantially along a direction, and
a titanium nitride layer disposed on the at least one layer, wherein the titanium nitride layer provides an upper surface of the electrode,
wherein the electrode is electrically coupled with the electronic circuit.
6. The electronic device according to claim 5 ,
wherein the electronic circuit comprises a complementary metal oxide semiconductor circuit.
7. The electronic device according to claim 5 ,
wherein the electronic circuit is electrically coupled to the at least one electrode via a metallization structure.
8. The electronic device according to claim 5 , further comprising:
an optoelectronic structure electrically conductively coupled to the electrode.
9. The electronic device according to claim 8 ,
wherein the optoelectronic structure is configured as an optoelectronic device selected from a group of optoelectronic devices consisting of:
a light emitting device;
a photovoltaic cell; and
an optoelectronic sensor.
10. The electronic device according to claim 8 ,
wherein the optoelectronic structure comprises at least one light emitting diode.
11. The electronic device according to claim 10 ,
wherein the at least one light emitting diode is configured as an organic light emitting diode.
12. An electronic device, comprising:
a driver circuit;
an electrode coupled to the driver circuit, the electrode comprising a bottom layer, the bottom layer comprising at least one of tantalum and titanium nitride; at least one layer disposed on the bottom layer, the at least one layer comprising a chemical compound comprising aluminum and titanium, and a titanium nitride layer disposed directly on the at least one layer, wherein the titanium nitride layer provides an upper surface of the electrode; and
an organic light emitting diode disposed on the electrode and electrically coupled to the electrode,
wherein the electrode is configured to provide a driver current from the driver circuit to the organic light emitting diode and to reflect light emitted by the organic light emitting diode.
13. The electronic device according to claim 12 ,
wherein the driver circuit comprises a complementary metal oxide semiconductor circuit.
14. The electronic device according to claim 12 ,
wherein the driver circuit is electrically coupled to the at least one electrode via a metallization structure of a back-end-of line structure.