Adjustable avalanche diode in an integrated circuit
View Patent ↗An avalance diode including, between two heavily-doped regions of opposite conductivity types arranged at the surface of a semiconductor region, a lightly-doped region, with length L of the lightly-doped region between the heavily-doped regions approximately ranging between 50 and 200 nm.
1. An avalanche diode comprising:
two heavily-doped regions of opposite conductivity types arranged at the surface of a semiconductor region; and
a lightly-doped region, with length L of the lightly-doped region between the heavily-doped regions ranging between 120 and 200 nm, said lightly-doped region not being covered by a gate, wherein the lightly-doped region has a doping level ranging between 10 17 and 10 18 atoms/cm 3 , and the reverse-mode current leakage up to the avalanche threshold occurs between 4.0 to 7.5 volts.
2. An integrated circuit, comprising:
a first avalanche diode comprising, between two first heavily-doped regions of opposite conductivity types arranged at the surface of a first semiconductor region, a first lightly-doped region, with length L of the first lightly-doped region between the heavily-doped regions ranging between 120 and 200 nm, said first lightly-doped region not being covered by a gate, wherein the first lightly-doped region has a doping level ranging between 10 17 and 10 18 atoms/cm 3 , and the reverse-mode current leakage up to the avalanche threshold occurs between 4.0 to 7.5 volts; and
a second avalanche diode comprising, between two second heavily-doped regions of opposite conductivity types arranged at the surface of a second semiconductor region, a second lightly-doped region, with second length L of the second lightly-doped region between the two second heavily-doped regions ranging between 120 and 200 nm, said second lightly-doped region not being covered by a gate, wherein the second lightly-doped region has a doping level ranging between 10 17 and 10 18 atoms/cm 3 , wherein the second length is different than the first length.
3. A method for adjusting the breakdown voltage of the avalanche diode of claim 1 , comprising selecting by masking the distance between the two heavily-doped regions.