Metal PVD-free conducting structures
View Patent ↗Structures and methods of forming the same are disclosed herein. In one embodiment, a structure can comprise a region having first and second oppositely facing surfaces. A barrier region can overlie the region. An alloy region can overlie the barrier region. The alloy region can include a first metal and one or more elements selected from the group consisting of silicon (Si), germanium (Ge), indium (Id), boron (B), arsenic (As), antimony (Sb), tellurium (Te), or cadmium (Cd).
1. A structure, comprising:
a region having first and second oppositely facing surfaces and an opening having a wall extending in a first direction from the first surface towards the second surface;
a barrier region overlying and extending in the first direction along the wall of the opening, the barrier region comprising at least one of silicon dioxide (SiO 2 ), or silicon carbide (SiC), silicon oxycarbide (SiOC), or silicon oxynitride (SiON);
an alloy region on the barrier region extending in the first direction along the wall, the alloy region including a first metal and one or more elements selected from the group consisting of silicon (Si), germanium (Ge), indium (Id), boron (B), arsenic (As), antimony (Sb), tellurium (Te), or cadmium (Cd).
2. The structure of claim 1 , wherein the first metal includes one or more of copper (Cu), nickel (Ni), cobalt (Co) aluminum (Al), tin (Sn), gold (Au), molybdenum (Mo), or tungsten (W).
3. The structure of claim 1 , wherein the region comprises silicon (Si).
4. The structure of claim 1 , wherein the alloy region comprises copper-silicon (CuSi) or copper-germanium (CuGe).
5. The structure of claim 1 , further comprising:
a metal region overlying the alloy region, the metal region one of electrolessly or electrolytically deposited.
6. The structure of claim 5 , wherein the metal region comprises at least one of copper (Cu), nickel (Ni), gold (Au), or aluminium (Al).
7. The structure of claim 5 , wherein the concentration of the one or more elements from the alloy region present in the metal region is less than about 1 atomic percent (atom %).
8. The structure of claim 7 , wherein the concentration of the one or more elements from the alloy region is not uniformly distributed within the metal region.
9. The structure of claim 7 , wherein the concentration of the one or more elements from the alloy region is uniformly distributed within the metal region.
10. The structure of claim 5 , wherein the metal region extends in a first direction of thickness through the region between the first and second surfaces, and is separated from the region by at least one of the barrier region, or the alloy region.
11. The structure of claim 1 , wherein the region further comprises:
one or more openings, each opening extending in a first direction from the first surface towards the second surface, the barrier region overlying a wall of each opening.
12. The structure of claim 11 , further comprising:
a metal region overlying the alloy region, the metal region at least one of electrolessly or electrolytically deposited.
13. The structure of claim 12 , wherein the structure is an interposer and the metal region provides an electrically conductive path between the first and second surface.
14. A structure, comprising:
a silicon region having first and second oppositely facing surfaces and including one or more openings, each opening extending in a first direction from the first surface towards the second surface,
a barrier region overlying a wall of each opening, the barrier region including at least one of silicon nitride or silicon carbide; and
an alloy region overlying the barrier region, the alloy region including a first metal and at least one of silicon (Si), germanium (Ge), indium (Id), boron (B), arsenic (As), antimony (Sb), tellurium (Te), or cadmium (Cd).
15. The structure of claim 14 , further comprising:
a metal region overlying the alloy region, the metal region including an electrolessly or electrolytically deposited first metal.
16. The structure of claim 15 , wherein the first metal comprises one or more of copper (Cu), nickel (Ni), aluminum (Al), tin (Sn), gold (Au), molybdenum (Mo), or tungsten (W).
17. A structure, comprising:
a region having first and second oppositely facing surfaces, the region comprising an insulating material including borosilicate glass (BSG);
an adhesive layer overlying the region;
an alloy region overlying the adhesive layer the alloy region including a first metal and one or more elements selected from the group consisting of silicon (Si), germanium (Ge), indium (Id), boron (B), arsenic (As), antimony (Sb), tellurium (Te), or cadmium (Cd).
18. The structure of claim 17 , wherein the first metal includes one or more of copper (Cu), nickel (Ni), cobalt (Co) aluminum (Al), tin (Sn), gold (Au), molybdenum (Mo), or tungsten (W).
19. The structure of claim 18 , wherein the adhesive layer includes at least one of titanium (Ti) or chromium (Cr).
20. The structure of claim 18 , wherein the adhesive layer has a thickness of less than about 5 nm.
21. The structure of claim 18 , wherein the region includes an opening having a wall extending in a direction between the first and second surfaces, wherein the adhesive layer overlies the wall of the region and the alloy region overlies the adhesive layer overlying the wall.
22. The structure of claim 21 , the alloy region being on the adhesive layer overlying the wall.