Methods for forming microlenses

1. A method of forming microlenses on a substrate, comprising:

placing a substrate having a plurality of microlens objects having a lens shape within the interior of a processing chamber of an inductively coupled plasma processing apparatus, the inductively coupled plasma processing apparatus comprising at least one inductive element and a grounded Faraday shield disposed between the inductive element and the interior of the process chamber;

providing a process gas to the interior of the processing chamber, the process gas comprising a mixture of CF 4 and CHF 3 ;

energizing the at least one inductive element to generate a substantially inductive plasma within the interior of the processing chamber; and

performing a plasma etching process with the process gas on the substrate to modify the lens shape of the microlens objects on the substrate.

2. The method of claim 1 , wherein the process gas further comprises one or more of O 2 , Ar, CO, or N 2 .

3. The method of claim 1 , wherein performing the plasma etching process reduces the distance between adjacent microlens objects on the substrate.

4. The method of claim 3 , wherein performing the plasma etching process reduces the diagonal distance between adjacent microlens objects on the substrate.

5. The method of claim 1 , wherein the substrate comprises a lens material layer and a mask layer, the microlens objects being initially located on the mask layer prior to performing the plasma etching process, the plasma etching process transcribing the lens shape of the microlens objects located on the mask layer to the lens material layer such that the plurality of microlens objects are located on the lens material layer after the plasma etching process.

6. The method of claim 1 , wherein providing a process gas to the interior of the processing chamber comprises decreasing a flow rate of CF 4 to reduce the distance between adjacent microlens objects on the substrate.

7. The method of claim 1 , wherein providing a process gas to the interior of the process chamber comprises increasing a flow rate of CHF 3 to reduce the distance between adjacent microlens objects on the substrate.

8. The method of claim 1 , wherein the inductively coupled plasma processing apparatus comprises an RF energy source configured to provide RF source power to the at least one inductive element and a bias energy source configured to provide bias power to the inductively coupled plasma processing apparatus.

9. The method of claim 8 , wherein the method comprises decreasing the bias power provided by the bias energy source to reduce the distance between adjacent microlens objects on the substrate.

10. The method of claim 8 , wherein energizing the at least one inductive element comprises providing RF power from the RF energy source to the at least one inductive element such that the plasma etching process is performed in an etch dominate regime.

11. The method of claim 10 , wherein the method comprises increasing the RF power provided to the at least one inductive element to reduce the distance between adjacent microlens objects on the substrate and to increase an etch rate associated with the plasma etching process.

12. A method of forming microlenses on a semiconductor substrate, the method comprising:

performing an inductively coupled plasma etching process using a process gas in the interior of a processing chamber of an inductively coupled plasma processing apparatus on a substrate, the substrate comprising a lens material layer and a mask layer, the substrate comprising a plurality microlens objects having a lens shape formed on the mask layer, the inductively coupled plasma etching process transcribing the lens shape of the microlens objects formed on the mask layer to the lens material layer such that the plurality of microlens objects are formed on the lens material layer;

wherein the process gas comprises a mixture of CF 4 and CHF 3 ;

wherein the inductive coupled plasma processing apparatus comprises at least one inductive element and a grounded Faraday shield disposed between the at least one inductive element and the interior of the processing chamber.

13. The method of claim 12 , wherein the process gas further comprises one or more of O 2 , Ar, CO, or N 2 .

14. The method of claim 12 , wherein the inductively coupled plasma etching process reduces the distance between adjacent microlens objects on the substrate.

15. The method of claim 14 , wherein the inductively coupled plasma etching process reduces the diagonal distance between adjacent microlens objects on the substrate.

16. The method of claim 12 , wherein the method comprises adjusting flow rates of CF 4 and CHF 3 to reduce the distance between adjacent microlens objects on the substrate during the inductively coupled plasma etching process.

17. The method of claim 1 , wherein the inductively coupled plasma processing apparatus comprises an RF energy source configured to provide RF source power to the at least one inductive element and a bias energy source configured to provide bias power to the inductively coupled plasma processing apparatus.

18. The method of claim 17 , wherein the method comprises decreasing the bias power provided by the bias energy source to reduce the distance between adjacent microlens objects on the substrate.

19. The method of claim 17 , wherein the method comprises providing RF power from the RF energy source to the at least one inductive element such that the inductively coupled plasma etching process is performed in an etch dominate regime.

20. The method of claim 19 , wherein the method comprises increasing the RF power provided to the at least one inductive element to reduce the distance between adjacent microlens objects on the substrate and to increase an etch rate associated with the inductively coupled plasma etching process.