Semiconductor device and fabrication method thereof
View Patent ↗A semiconductor device includes a fin structure, an isolation structure, a gate structure and an epitaxial structure. The fin structure protrudes from the surface of the substrate and includes a top surface and two sidewalls. The isolation structure surrounds the fin structure. The gate structure overlays the top surface and the two sidewalls of a portion of the fin structure, and covers a portion of the isolation structure. The isolation structure under the gate structure has a first top surface and the isolation structure at two sides of the gate structure has a second top surface, wherein the first top surface is higher than the second top surface. The epitaxial layer is disposed at one side of the gate structure and is in direct contact with the fin structure.
1. A fabrication method for a semiconductor device, comprising:
forming a fin structure, protruding from a surface of a substrate, wherein the fin structure comprises a top surface and two side surfaces;
forming an isolation structure to surround the fin structure;
forming a gate structure, overlaying the top surface and the two side surfaces of a portion of the fin structure, and covering a portion of the isolation structure;
after the step of forming the gate structure, etching the isolation structure exposed from the gate structure until a top surface of the isolation structure is etched down to a first depth;
forming a recess in the fin structure at a side of the gate structure; and
forming an epitaxial layer to fill up the recess, wherein a bottom surface of the recess has a second depth, and the second depth is deeper than the first depth.
2. The fabrication method according to claim 1 , wherein the isolation structure is a shallow trench isolation structure.
3. The fabrication method according to claim 1 , wherein a step for etching the isolation structure comprises wet etching or dry etching.
4. The fabrication method according to claim 1 , wherein the gate structure is a dummy gate structure.
5. The fabrication method according to claim 1 , wherein a step for forming the recess comprises wet etching or dry etching.
6. The fabrication method according to claim 1 , wherein the epitaxial structure comprises silicon germanium, silicon phosphide or phosphor-doped silicon carbide.
7. The fabrication method according to claim 1 , further comprising forming a spacer before etching the isolation structure, wherein the spacer is disposed on a sidewall of the gate structure.
8. The fabrication method according to claim 7 , wherein a step for forming the spacer comprises:
depositing a material layer to conformally cover the gate structure and the fin structure, and
etching the material layer until the isolation structure is exposed.
9. The fabrication method according to claim 1 , further comprising:
depositing an interlayer dielectric to surround the gate structure;
removing the gate structure to leave a trench;
forming a gate dielectric layer to conformally cover a sidewall and a bottom of the trench; and
forming a conductive layer to fill up the trench.