Radiation-sensitive resin composition and compound

1. A radiation-sensitive resin composition comprising:

a compound represented by formula (1); and

a polymer that comprises a structural unit comprising an acid-labile group:

wherein, in the formula (1),

R 1 represents —ZR 5 , and R 4 represents —ZR 6 , wherein each Z represents —O— or —NH—, and R 5 and R 6 each independently represent an alicyclic group having 3 to 10 carbon atoms or a group comprising a lactone structure having 4 to 12 carbon atoms;

R 2 and R 3 each independently represent a hydrogen atom or a monovalent organic group;

X 1 and X 2 each independently represent a hydrogen atom, a hydroxyl group, a thiol group, a sulfonyl group or a monovalent organic group, or X 1 and X 2 taken together represent —S—, —O—, —SO 2 —, an alkanediyl group having 1 to 10 carbon atoms or a combined group thereof; and

A represents an ethanediyl group,

wherein at least one hydrogen atom included in X 1 , X 2 and A is substituted by —Y—SO 3 − M + , wherein Y represents an alkanediyl group having 1 to 10 carbon atoms that is substituted with a fluorine atom, and two fluorine atoms bond to a carbon atom adjacent to SO 3 − , and M + represents a monovalent onium cation, and in the case where —Y—SO 3 − M + is present in a plurality of number, a plurality of Ys are each identical or different and a plurality of M + s are each identical or different.

2. The radiation-sensitive resin composition according to claim 1 , wherein the compound is represented by formula (2):

wherein, in the formula (2), R 1 to R 4 , Y and M + are as defined in the formula (1); X represents —S—, —O—, —SO 2 —, an alkanediyl group having 1 to 10 carbon atoms or a combined group thereof; and n is an integer of 1 to 4.

3. The radiation-sensitive resin composition according to claim 1 , wherein

R 1 represents —OR 5 , and R 4 represents —OR 6 , wherein R 5 and R 6 each independently represent an alicyclic group having 3 to 10 carbon atoms or a group comprising a lactone structure having 4 to 12 carbon atoms.

4. The radiation-sensitive resin composition according to claim 1 , wherein the polymer further comprises a structural unit comprising a lactone structure or a cyclic carbonate structure, a structural unit comprising a polar group, or a combination thereof.

5. The radiation-sensitive resin composition according to claim 1 , wherein M + is a sulfonium cation or an iodonium cation.

6. The radiation-sensitive resin composition according to claim 1 , further comprising a fluorine atom-containing polymer.

7. The radiation-sensitive resin composition according to claim 1 , further comprising a nitrogen-containing compound.

8. A compound represented by formula (1):

wherein, in the formula (1),

R 1 represents —ZR 5 , and R 4 represents —ZR 6 , wherein each Z represents —O— or —NH—, and R 5 and R 6 each independently represent an alicyclic group having 3 to 10 carbon atoms or a group comprising a lactone structure having 4 to 12 carbon atoms;

R 2 and R 3 each independently represent a hydrogen atom or a monovalent organic group;

X 1 and X 2 each independently represent a hydrogen atom, a hydroxyl group, a thiol group, a sulfonyl group or a monovalent organic group, or X 1 and X 2 taken together represent —S—, —O—, —SO 2 —, an alkanediyl group having 1 to 10 carbon atoms or a combined group thereof; and

A represents an ethanediyl group,

wherein at least one hydrogen atom included in X 1 , X 2 and A is substituted by —Y—SO 3 − M + , wherein Y represents an alkanediyl group having 1 to 10 carbon atoms that is substituted with a fluorine atom and two fluorine atoms bond to a carbon atom adjacent to SO 3 − , and M + represents a monovalent onium cation, and in the case where —Y—SO 3 − M + is present in a plurality of number, a plurality of Ys are each identical or different and a plurality of M + s are each identical or different.

9. The compound according to claim 8 , wherein

R 1 represents —OR 5 , and R 4 represents —OR 6 , wherein R 5 and R 6 each independently represent an alicyclic group having 3 to 10 carbon atoms or a group comprising a lactone structure having 4 to 12 carbon atoms.

10. A compound represented by formula (2):

wherein, in the formula (2),

R 1 represents —ZR 5 , and R 4 represents —ZR 6 , wherein each Z represents —O— or —NH—, and R 5 and R 6 each independently represent an alicyclic group having 3 to 10 carbon atoms or a group comprising a lactone structure having 4 to 12 carbon atoms;

R 2 and R 3 each independently represent a hydrogen atom or a monovalent organic group;

Y represents an alkanediyl group having 1 to 10 carbon atoms that is substituted with a fluorine atom, and two fluorine atoms bond to a carbon atom adjacent to SO 3 − ;

M + represents a monovalent onium cation;

X represents —S—, —O—, —SO 2 —, an alkanediyl group having 1 to 10 carbon atoms or a combined group thereof;

n is an integer of 1 to 4; and

in the case where —Y—SO 3 − M + is present in a plurality of number, a plurality of Ys are each identical or different and a plurality of M + s are each identical or different.

11. The compound according to claim 10 , wherein R 1 represents —OR 5 , and R 4 represents —OR 6 , wherein R 5 and R 6 each independently represent an alicyclic group having 3 to 10 carbon atoms or a group comprising a lactone structure having 4 to 12 carbon atoms.