Nonvolatile semiconductor memory device
View Patent ↗A nonvolatile semiconductor memory device according to an embodiment includes: a semiconductor layer; a block insulating film; an organic molecular layer, which is formed between the semiconductor layer and the block insulating film, and provided with a first organic molecular film on the semiconductor layer side containing first organic molecules and a second organic molecular film on the block insulating film side containing second organic molecules, and in which the first organic molecule has a charge storing unit and the second organic molecule is an amphiphilic organic molecule; and a control gate electrode formed on the block insulating film.
1. A nonvolatile semiconductor memory device, comprising:
a semiconductor layer;
a block insulating film;
an organic molecular layer formed between the semiconductor layer and the block insulating film, the organic molecular layer having a first organic molecular film on the semiconductor layer side containing first organic molecules, the organic molecular layer having a second organic molecular film on the block insulating film side containing second organic molecules, the first organic molecule having a charge storing unit, the second organic molecule being an amphiphilic organic molecule; and
a control gate electrode formed on the block insulating film.
2. The device according to claim 1 , further comprising
a tunnel insulating film formed between the semiconductor layer and the organic molecular layer.
3. The device according to claim 1 , wherein
the first organic molecules have an insulating unit between the charge storing unit and the semiconductor layer, and the insulating unit contains straight chain saturated hydrocarbon.
4. The device according to claim 1 , further comprising:
a tunnel insulating film formed on the semiconductor layer side between the semiconductor layer and the organic molecular layer; and
a conductive layer formed on the organic molecular layer side between the semiconductor layer and the organic molecular layer.
5. The device according to claim 1 , wherein
the amphiphilic organic molecule has a hydrophobic unit and a hydrophilic unit,
the hydrophobic unit is an alkyl chain, a fluoroalkyl chain, a polysilane chain or a phenylene chain, and
the hydrophilic unit has one of an ether group, a carboxy group, a hydroxy group, an amino group or a thiol group.
6. The device according to claim 1 , wherein the amphiphilic organic molecule is a nonionic surfactant.
7. The device according to claim 1 , wherein the amphiphilic organic molecule is polyethylene glycol alkylether shown in General Formula (I),
wherein, n is an integer not smaller than 3 and not larger than 20, and m is an integer not smaller than 3 and not larger than 20.
8. The device according to claim 1 , wherein the amphiphilic organic molecule is trisiloxanepolyethylene glycol shown in General Formula (II),
wherein, n is an integer not smaller than 3 and not larger than 20, and m is an integer not smaller than 3 and not larger than 20.
9. The device according to claim 1 , wherein the amphiphilic organic molecule is pentaethyleneglycol monododecylether.