Two-step silicide formation
View Patent ↗One embodiment of the present invention comprises a transistor having a source/drain region within a substrate, an extension region within the substrate adjoining the source/drain region and extending toward a gate on the substrate, and a dielectric spacer against the gate wherein the dielectric spacer covers at least part of the extension region. A silicide intermix layer is formed over both the source/drain region and a portion of the extension region. A silicide contact is formed through the silicide intermix layer over the source/drain region.
1. A method for forming a semiconductor device, the method comprising the steps of:
providing a transistor comprising a source/drain region within a substrate, an extension region within the substrate adjoining the source/drain region and extending toward a gate on the substrate, and a dielectric spacer against the gate wherein the dielectric spacer covers at least part of the extension region;
depositing a metal layer over both the source/drain region and a portion of the extension region which is not covered by the dielectric spacer such that metal from the metal layer diffuses into the source/drain region and the portion of the extension region to form, without a thermal anneal, a silicide intermix layer having a thickness no greater than 3 nm;
removing metal, from the metal layer, that has not diffused into the source/drain region and the portion of the extension region;
depositing dielectric material over the silicide intermix layer on top of the source/drain region;
creating a contact opening through the dielectric material, wherein the contact opening extends at least as far as the silicide intermix layer over the source/drain region; and
forming a silicide contact at the bottom of the contact opening.
2. The method of claim 1 , further comprising the step of removing an outer region of the dielectric spacer to expose part of the extension region.
3. The method of claim 2 , wherein the dielectric spacer comprises an inner spacer against the gate and outer spacer, and wherein the outer region removed is the outer spacer.
4. The method of claim 3 , further comprising the step of:
after forming the silicide intermix layer and before the step of depositing the dielectric material, replacing the outer spacer.
5. The method of claim 1 , wherein the step of forming the silicide contact at the bottom of the contact opening comprises the silicide contact consuming less than a length of the source/drain region.
6. The method of claim 1 , further comprising the step of:
after removing the metal that has not diffused into the source/drain region and the portion of the extension region, performing an annealing process on the silicide intermix layer.