Semiconductor device and manufacturing method thereof
The present invention discloses a semiconductor device and a method for manufacturing the semiconductor device. The semiconductor device includes a gate insulating layer formed on an inner wall of a substrate recess, a work function material layer formed on the gate insulating layer so as to apply a tensile stress or a compressive stress to a channel of a MOS field-effect transistor, and a gate metal formed on the work function material layer. The method for manufacturing the semiconductor device includes forming a work function material layer on a gate insulating layer so as to apply a tensile stress or a compressive stress to a channel of a MOS field-effect transistor, wherein the gate insulating layer is formed on an inner wall of a substrate recess, and depositing a gate metal on the work function material layer.
1. A semiconductor device, comprising:
a gate insulating layer selectively formed on an inner wall of a silicon substrate recess;
a work function material layer directly formed on the gate insulating layer so as to apply a tensile stress or a compressive stress to a channel of a MOS field-effect transistor;
a gate metal formed on the work function material layer; and
a barrier layer formed between the work function material layer and the gate metal.
2. The semiconductor device according to claim 1 further comprising a gate structure of an nMOS field-effect transistor, and the work function material layer comprises a first work function material layer for applying a tensile stress to a channel of the nMOS field-effect transistor.
3. The semiconductor device according to claim 1 further comprising a gate structure of a pMOS field-effect transistor, and the work function material layer comprises a second work function material layer for applying a compressive stress to a channel of the pMOS field-effect transistor.
4. The semiconductor device according to claim 1 , further comprising:
a second metal layer formed on a surface common to the work function material layer, the barrier layer, and the gate metal.
5. The semiconductor device according to claim 1 , wherein the gate metal is formed so as to apply a tensile stress to the channel.
6. The semiconductor device according to claim 1 , further comprising:
a protection layer formed between the gate insulating layer and the work function material layer so as to protect the gate insulating layer.
7. A semiconductor device having a gate structure of an nMOS field-effect transistor, the semiconductor device comprising:
a gate insulating layer selectively formed on an inner wall of a silicon substrate recess;
a work function material layer directly formed on the gate insulating layer; and
a gate metal formed on the work function material layer so as to apply a tensile stress to a channel of the nMOS field-effect transistor; and
a barrier layer formed between the work function material layer and the gate metal.
8. The semiconductor device according to claim 7 , further comprising:
a second metal layer formed on a surface common to the work function material layer, the barrier layer, and the gate metal.
9. The semiconductor device according to claim 7 , wherein the work function material layer is formed so as to apply a tensile stress to the channel, and the work function material layer includes TiAlN, a metal carbide, or a metal oxycarbide.
10. The semiconductor device according to claim 7 , further comprising:
a protection layer formed between the gate insulating layer and the work function material layer so as to protect the gate insulating layer.
11. A method for manufacturing a semiconductor device, comprising:
selectively forming a gate insulating layer on an inner wall of a silicon substrate recess of a MOS field-effect transistor;
forming a work function material layer directly on the gate insulating layer so as to apply a tensile stress or a compressive stress to a channel of the MOS field-effect transistor;
depositing a gate metal on the work function material layer, and
forming a barrier layer between the work function material layer and the gate metal.
12. The method according to claim 11 , wherein the semiconductor device includes a gate structure of an nMOS field-effect transistor, and forming the work function material layer so as to apply a tensile stress to a channel of the nMOS field-effect transistor.
13. The method according to claim 11 , wherein the semiconductor device includes a gate structure of a pMOS field-effect transistor, and forming the work function material layer so as to apply a compressive stress to a channel of the pMOS field-effect transistor.
14. The method according to claim 11 , wherein the semiconductor device includes a gate structure of a CMOS field-effect transistor, and the substrate recess includes a first recess for a pMOS field-effect transistor and a second recess for an nMOS field-effect transistor; and
forming the work function material layer on the gate insulating layer comprises:
forming a first work function material layer for the pMOS field-effect transistor on respective gate insulating layers of the first recess and the second recess, so as to apply a compressive stress to the channel;
etching off an upper portion of the first work function material layer in the first recess and the first work function material layer in the second recess; and
forming a second work function material layer for the nMOS field-effect transistor in the first recess and the second recess, so as to apply a tensile stress to the channel.
15. The method according to claim 11 , wherein forming the work function material layer on the gate insulating layer comprises:
depositing a first work function material on the gate insulating layer; and
performing ion implantation on the first work function material so as to increase the applied compressive stress.
16. The method according to claim 11 , further comprising forming the gate metal so as to apply a tensile stress to the channel.
17. The method according to claim 11 , further comprising:
removing a portion of the work function material layer, the barrier layer, and the gate metal;
forming a second metal layer on a surface common to the work function material layer, the barrier layer, and the gate metal, so as to reduce contact resistance; and
depositing an insulator on the gate insulating layer and the second metal layer.
18. The method according to claim 11 , wherein forming the work function material layer on the gate insulating layer comprises:
forming a protection layer on the gate insulating layer; and
forming the work function material layer on the protection layer.
19. A method for manufacturing a semiconductor device having a gate structure of an nMOS field-effect transistor, the method comprising:
selectively forming a gate insulating layer on an inner wall of a silicon substrate recess of the nMOS field-effect transistor;
forming a work function material layer directly on the gate insulating layer; and
depositing a gate metal on the work function material layer so as to apply a tensile stress to a channel of the nMOS field-effect transistor, and
forming a barrier layer between the work function material layer and the gate metal.
20. The method according to claim 19 , wherein forming the work function material layer on the gate insulating layer comprises:
forming a protection layer on the gate insulating layer; and
forming the work function material layer on the protection layer.