Resist pattern-forming method, and radiation-sensitive resin composition
A resist pattern-forming method includes forming a resist coating film using a radiation-sensitive resin composition. The resist coating film is exposed and developed using a developer solution containing no less than 80% by mass of an organic solvent. The radiation-sensitive resin composition includes a polymer component including a polymer having an acid-labile group, and a radiation-sensitive acid generator. The polymer component includes, in an identical polymer or different polymers, a first structural unit having a first hydrocarbon group, and a second structural unit having a second hydrocarbon group. The first hydrocarbon group is an unsubstituted or substituted branched chain group, or the like. The second hydrocarbon group has an adamantane skeleton. A molar ratio of the second hydrocarbon group to the first hydrocarbon group is less than 1. A proportion of a structural unit having a hydroxyl group in the polymer component is less than 5 mol %.
1. A resist pattern-forming method comprising:
forming a resist coating film using a radiation-sensitive resin composition;
exposing the resist coating film; and
developing the exposed resist coating film using a developer solution comprising no less than 80% by mass of an organic solvent,
the radiation-sensitive resin composition comprising:
a fluorine atom-containing polymer;
a polymer component other than the fluorine atom-containing polymer, the polymer component comprising a polymer having an acid-labile group; and
a radiation-sensitive acid generator,
the polymer component comprising, in an identical polymer or different polymers, a first structural unit comprising a first hydrocarbon group, and a second structural unit comprising a second hydrocarbon group,
the first hydrocarbon group being an unsubstituted or substituted branched chain group having no greater than 8 carbon atoms or an unsubstituted or substituted monocyclic alicyclic group having 3 to 8 ring carbon atoms,
the second hydrocarbon group having an adamantane skeleton,
a molar ratio of the second hydrocarbon group to the first hydrocarbon group being less than 1, and
a proportion of a structural unit having a hydroxyl group in the polymer component to a total amount of structural units in the polymer component being less than 5 mol %,
wherein an amount of the fluorine atom-containing polymer is 1 to 20 parts by mass with respect to 100 parts by mass of the polymer component.
2. The resist pattern-forming method according to claim 1 , wherein the first structural unit is represented by formula (1), and the second structural unit is represented by formula (2):
wherein, in the formulae (1) and (2), R and R′ each independently represent a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group; R 1 represents a monovalent group which is the first hydrocarbon group; and R 2 represents a monovalent group which is the second hydrocarbon group, and R 1 and R 2 each independently do not have or have a hydroxyl group, a carbonyl group, a cyano group, a nitro group, a sulfonamide group or a combination thereof.
3. The resist pattern-forming method according to claim 2 , wherein R 1 in the formula (1) represents an acid-labile group.
4. The resist pattern-forming method according to claim 2 , wherein R 2 in the formula (2) represents a group each represented by formulae (2-1) to (2-4), an acid-labile group or a combination thereof:
wherein, in the formulae (2-1) to (2-4),
R p1 , R p2 and R p3 each independently represent a hydroxyl group, a cyano group, a nitro group or a sulfonamide group; R a1 and R a2 each independently represent a methylene group or an alkylene group having 2 to 10 carbon atoms; R a3 represents a single bond, a methylene group or an alkylene group having 2 to 10 carbon atoms; q1 is an integer of 1 to 6; and q2 and q3 are each independently an integer of 1 to 15, wherein in a case where R p1 , R p2 and R a1 are each present in a plurality of number, a plurality of R p1 s are each identical or different, a plurality of R p2 s are each identical or different and a plurality of R a1 s are each identical or different, and wherein * denotes a binding site to the ester group in the formula (2).
5. The resist pattern-forming method according to claim 1 , wherein a molar ratio of the second hydrocarbon group to the first hydrocarbon group is no less than 0.1 and no greater than 0.9.
6. The resist pattern-forming method according to claim 1 , wherein the second hydrocarbon group has a hydroxyl group, a carbonyl group or a combination thereof.
7. The resist pattern-forming method according to claim 1 , wherein the polymer component further comprises a structural unit having a lactone group, a cyclic carbonate group or a combination thereof.
8. The resist pattern-forming method according to claim 1 , wherein a proportion of the acid-labile group in the first hydrocarbon group and the second hydrocarbon group to a total of the first hydrocarbon group and the second hydrocarbon group is no less than 50 mol %.
9. The resist pattern-forming method according to claim 1 , wherein the radiation-sensitive acid generator is represented by formula (B-1):
wherein, in the formula (B-1), Rf 1 and Rf 2 each independently represent a hydrogen atom, a fluorine atom, or a fluorinated alkyl group having 1 to 4 carbon atoms; n is an integer of 1 to 3, wherein any case in which Rf 1 and Rf 2 bonded to carbon at an α-position of the sulfonate group both represent a hydrogen atom is excluded, and in a case where Rf 1 and Rf 2 are each present in a plurality of number, a plurality of Rf 1 s are each identical or different and a plurality of Rf 2 s are each identical or different; R 1 represents a monovalent organic group having 3 to 20 carbon atoms and having an alicyclic structure; and X + represents a monovalent cation.
10. The resist pattern-forming method according to claim 9 , wherein Win the formula (B-1) is represented by formula (i):
wherein, in the formula (i), A represents a linking group having a valency of (m+1); m is an integer of 1 to 3; and R r1 represents a monovalent organic group having 3 to 20 carbon atoms and having an alicyclic structure.
11. A radiation-sensitive resin composition comprising:
a fluorine atom-containing polymer;
a polymer component other than the fluorine atom-containing polymer, the polymer component comprising a polymer having an acid-labile group; and
a radiation-sensitive acid generator,
the polymer component comprising, in an identical polymer or different polymers, a first structural unit comprising a first hydrocarbon group, and a second structural unit comprising a second hydrocarbon group,
the first hydrocarbon group being an unsubstituted or substituted branched chain group having no greater than 8 carbon atoms or an unsubstituted or substituted monocyclic alicyclic group having 3 to 8 ring carbon atoms,
the second hydrocarbon group having an adamantane skeleton,
a molar ratio of the second hydrocarbon group to the first hydrocarbon group being less than 1,
a proportion of a structural unit having a hydroxyl group in the polymer component to a total of structural units in the polymer component being less than 5 mol %, and
the radiation-sensitive resin composition being for use in a resist pattern-forming method carried out using a developer solution comprising no less than 80% by mass of an organic solvent,
wherein an amount of the fluorine atom-containing polymer is 1 to 20 parts by mass with respect to 100 parts by mass of the polymer component.
12. The resist pattern-forming method according to claim 1 , wherein the amount of the fluorine atom-containing polymer is 3 to 20 parts by mass with respect to 100 parts by mass of the polymer component.
13. The radiation-sensitive resin composition according to claim 11 , wherein the amount of the fluorine atom-containing polymer is 3 to 20 parts by mass with respect to 100 parts by mass of the polymer component.
14. The radiation-sensitive resin composition according to claim 11 , wherein the first structural unit is represented by formula (1), and the second structural unit is represented by formula (2):
wherein, in the formulae (1) and (2), R and R′ each independently represent a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group; R 1 represents a monovalent group which is the first hydrocarbon group; and R 2 represents a monovalent group which is the second hydrocarbon group, and R 1 and R 2 each independently do not have or have a hydroxyl group, a carbonyl group, a cyano group, a nitro group, a sulfonamide group or a combination thereof.
15. The radiation-sensitive resin composition according to claim 14 , wherein R 1 in the formula (1) represents an acid-labile group.
16. The radiation-sensitive resin composition according to claim 14 , wherein R 2 in the formula (2) represents a group each represented by formulae (2-1) to (2-4), an acid-labile group or a combination thereof:
wherein, in the formulae (2-1) to (2-4),
R p1 , R p2 and R p3 each independently represent a hydroxyl group, a cyano group, a nitro group or a sulfonamide group; R a1 and R a2 each independently represent a methylene group or an alkylene group having 2 to 10 carbon atoms; R a3 represents a single bond, a methylene group or an alkylene group having 2 to 10 carbon atoms; q1 is an integer of 1 to 6; and q2 and q3 are each independently an integer of 1 to 15, wherein in a case where R p1 , R p2 and R a1 are each present in a plurality of number, a plurality of R p1 s are each identical or different, a plurality of R p2 s are each identical or different and a plurality of R a1 s are each identical or different, and wherein * denotes a binding site to the ester group in the formula (2).
17. The radiation-sensitive resin composition according to claim 11 , wherein a molar ratio of the second hydrocarbon group to the first hydrocarbon group is no less than 0.1 and no greater than 0.9.
18. The radiation-sensitive resin composition according to claim 11 , wherein the second hydrocarbon group has a hydroxyl group, a carbonyl group or a combination thereof.
19. The radiation-sensitive resin composition according to claim 11 , wherein the polymer component further comprises a structural unit having a lactone group, a cyclic carbonate group or a combination thereof.
20. The radiation-sensitive resin composition according to claim 11 , wherein a proportion of the acid-labile group in the first hydrocarbon group and the second hydrocarbon group to a total of the first hydrocarbon group and the second hydrocarbon group is no less than 50 mol %.
21. The radiation-sensitive resin composition according to claim 11 , wherein the radiation-sensitive acid generator is represented by formula (B-1):
wherein, in the formula (B-1), Rf 1 and Rf 2 each independently represent a hydrogen atom, a fluorine atom, or a fluorinated alkyl group having 1 to 4 carbon atoms; n is an integer of 1 to 3, wherein any case in which Rf 1 and Rf 2 bonded to carbon at an α-position of the sulfonate group both represent a hydrogen atom is excluded, and in a case where Rf 1 and Rf 2 are each present in a plurality of number, a plurality of Rf 1 s are each identical or different and a plurality of Rf 2 s are each identical or different; R r represents a monovalent organic group having 3 to 20 carbon atoms and having an alicyclic structure; and X + represents a monovalent cation.
22. The radiation-sensitive resin composition according to claim 21 , wherein R r in the formula (B-1) is represented by formula (i):
wherein, in the formula (i), A represents a linking group having a valency of (m+1); m is an integer of 1 to 3; and R r1 represents a monovalent organic group having 3 to 20 carbon atoms and having an alicyclic structure.