Substrate processing method and storage medium
A substrate processing method and apparatus for preventing evaporation of an anti-drying fluorine-containing organic solvent from a substrate during transportation of the substrate into a processing container and can prevent decomposition of a fluorine-containing organic solvent in the processing container. A substrate, the surface of which is covered with a first fluorine-containing organic solvent, is carried into a processing container. The first fluorine-containing organic solvent is removed from the substrate surface by forming a high-pressure fluid atmosphere of a mixture of the first fluorine-containing organic solvent and a second fluorine-containing organic solvent, having a lower boiling point than the first fluorine-containing organic solvent, in the processing container e.g. by supplying a high-pressure fluid of the second fluorine-containing organic solvent into the processing container. Thereafter, a fluid in the state of a high-pressure fluid or a gas is discharged from the processing container to obtain the substrate in the dried state.
1. A substrate processing method for removing a fluorine-containing organic solvent, which has been supplied to a surface of a substrate, having a pattern formed in the surface, after processing of the substrate with a liquid and which covers the surface of the substrate, from the surface of the substrate by bringing the solvent into contact with a high-pressure fluid, said method comprising the steps of:
carrying the substrate to a processing container, the surface of the substrate being covered with a first fluorine-containing organic solvent, the first fluorine-containing organic solvent having a first boiling point, the first boiling point being one of 165° C. or 174° C., and evaporating, while the substrate is being carried to the processing container, only an amount of the first fluorine-containing organic solvent from the substrate, the amount maintaining, for a selected amount of time, while the substrate is being carried to the processing container, the surface of the substrate wet with the first fluorine-containing organic solvent, the selected amount of time being based on a selected volume of the first fluorine-containing organic solvent necessary to cover the surface of the substrate, the size of the substrate, and the first boiling point;
forming a high-pressure fluid atmosphere of a mixture of the first fluorine-containing organic solvent and a second fluorine-containing organic solvent, the second fluorine-containing organic solvent having a second boiling point, the second boiling point being lower than the first boiling point of the first fluorine-containing organic solvent, and a critical temperature, the critical temperature of the second fluorine-containing organic solvent being higher than the first boiling point of the first fluorine-containing organic solvent, and forming a supercritical fluid at a critical temperature which prevents release of fluorine atoms due to decomposition of the first and second fluorine-containing organic solvents, in the processing container;
supplying a high-pressure fluid of the second fluorine-containing organic solvent into the processing container, or by supplying a gas or liquid of the second fluorine-containing organic solvent into the processing container and then heating the gas or liquid to a temperature not less than the critical temperature of the second fluorine-containing organic solvent to turn the gas or liquid into a high-pressure fluid; and then
discharging a fluid in the state of a high-pressure fluid or a gas from the processing container.
2. The substrate processing method according to claim 1 , wherein the high-pressure fluid atmosphere of the mixture is formed in the processing container when stopping the supply of the second fluorine-containing organic solvent.
3. The substrate processing method according to claim 1 , wherein the critical temperature of the second fluorine-containing organic solvent is not more than 200° C.
4. The substrate processing method according to claim 1 , wherein a mol-based mixing ratio of the first fluorine-containing organic solvent to the second fluorine-containing organic solvent is not more than 1/10.
5. The substrate processing method according to claim 1 , wherein an internal temperature of the processing container in the step of forming a high-pressure fluid atmosphere of the mixture is so determined as to make the content of fluorine, generated by decomposition of the fluorine-containing organic solvents of the mixture, in the fluid discharged from the processing container not more than 100 weight ppm.
6. A non-transitory storage medium storing a computer program for use in a substrate processing apparatus for removing a fluorine-containing organic solvent, which has been supplied to a surface of a substrate having a pattern formed in the surface, by bringing the solvent into contact with a high-pressure fluid, wherein said program contains steps to perform the substrate processing method according to claim 1 .
7. A substrate processing method for removing a fluorine-containing organic solvent, which has been supplied to a surface of a substrate, having a pattern formed in the surface, after processing of the substrate with a liquid and which covers the surface of the substrate, from the surface of the substrate by bringing the solvent into contact with a high-pressure fluid, said method comprising the steps of:
carrying the substrate to a processing container, the surface of the substrate being covered with a first fluorine-containing organic solvent, the first fluorine-containing organic solvent having a first boiling point, the first fluorine-containing organic solvent being PFC, and evaporating, while the substrate is being carried to the processing container, only an amount of the first fluorine-containing organic solvent from the substrate, the amount maintaining, for a selected amount of time, while the substrate is being carried to the processing container, the surface of the substrate wet with the first fluorine-containing organic solvent, the selected amount of time being based on a selected volume of the first fluorine-containing organic solvent necessary to cover the surface of the substrate, the size of the substrate, and the first boiling point;
forming a high-pressure fluid atmosphere of a mixture of the first fluorine-containing organic solvent and a second fluorine-containing organic solvent, the second fluorine-containing organic solvent having a second boiling point the second boiling point being lower than the first boiling point of the first fluorine-containing organic solvent, and a critical temperature, the critical temperature of the second fluorine-containing organic solvent being higher than the first boiling point of the first fluorine-containing organic solvent, and forming a supercritical fluid at a critical temperature which prevents release of fluorine atoms due to decomposition of the first and second fluorine-containing organic solvents, in the processing container;
supplying a high-pressure fluid of the second fluorine-containing organic solvent into the processing container, or by supplying a gas or liquid of the second fluorine-containing organic solvent into the processing container and then heating the gas or liquid to a temperature not less than the critical temperature of the second fluorine-containing organic solvent to turn the gas or liquid into a high-pressure fluid; and then
discharging a fluid in the state of a high-pressure fluid or a gas from the processing container.