IP Library Granted Patent US 9,023,691
Granted Patent B2
US 9,023,691 · App. 13/942,568 · Granted May 5, 2015

Microelectronic assemblies with stack terminals coupled by connectors extending through encapsulation

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Quick Facts
Patent No.
US 9,023,691
App. No.
13/942,568
Granted
May 5, 2015
Kind
B2
Abstract

A microelectronic assembly or package can include first and second support elements and a microelectronic element between inwardly facing surfaces of the support elements. First connectors and second connectors such as solder balls, metal posts, stud bumps, or the like face inwardly from the respective support elements and are aligned with and electrically coupled with one another in columns. An encapsulation separates respective pairs of coupled first and second connectors from one another and may encapsulate the microelectronic element and fill spaces between the support elements. The first connectors, the second connectors or both may be partially encapsulated prior to electrically coupling respective pairs of first and second connectors in columns.

Claims (36)

1. A microelectronic assembly, comprising:

first and second support elements each having first and second oppositely facing surfaces;

a microelectronic element mounted to the second surface of a support element of the first and second support elements;

electrically conductive first connectors projecting above the second surface of the first support element;

electrically conductive second connectors projecting above the second surface of the second support element and coupled to ends of the first connectors; and

a monolithic first encapsulation formed in contact with the second surface of a support element of the first and second support elements, and being formed in contact with at least one of: the second surface of another support element of the first and second support elements; or a monolithic second encapsulation formed in contact with the second surface of the another support element,

wherein first package terminals at the first surface of the first support element are electrically coupled with corresponding second package terminals at the first surface of the second support element through pairs of said first connectors aligned with and joined with said second connectors, and

at least one of: the first connectors and second connectors include electrically conductive masses.

2. The microelectronic assembly as claimed in claim 1 , wherein a standoff height between the second surfaces of the support elements is greater than a pitch of the first connectors in at least one direction parallel to the second surface of the first support element.

3. The microelectronic assembly as claimed in claim 1 , wherein the microelectronic element has a face facing away from the support element to which it is mounted, and the first encapsulation is formed in contact with at least one of: the face of the microelectronic element or a third encapsulation formed on the face of the microelectronic element.

4. The microelectronic assembly as claimed in claim 1 , wherein the microelectronic assembly includes the second encapsulation and the first encapsulation is formed in contact with the second encapsulation.

5. The microelectronic assembly as claimed in claim 1 , wherein at least one of the first connectors or the second connectors include at least one of: stud bumps or solid substantially rigid metal posts.

6. A stacked multi-chip microelectronic assembly including the microelectronic assembly as claimed in claim 1 , and a microelectronic package overlying the first support element of the microelectronic assembly, the microelectronic package having terminals connected with the first package terminals of the microelectronic assembly.

7. The microelectronic assembly as claimed in claim 6 , wherein the second connectors are conductive metal masses projecting from pads at the second surface of the second support element, each of the conductive metal masses is surrounded by the encapsulation, and the first connectors include solid substantially rigid metal posts.

8. The microelectronic assembly as claimed in claim 6 , wherein the first connectors are conductive metal masses projecting from pads at the second surface of the first support element and the second connectors include solid substantially rigid metal posts.

9. The microelectronic assembly as claimed in claim 8 , wherein each of the conductive metal masses is surrounded by the first encapsulation.

10. The microelectronic assembly as claimed in claim 1 , further comprising third connectors each aligned with an end of one of the first connectors and aligned with an end of one of the second connectors and being joined with at least one of the aligned first and second connectors, wherein coupled first, second and third connectors are aligned in respective columns which are separated from one another and from the microelectronic element by the material of the first encapsulation, and the first package terminals are electrically coupled with the corresponding second package terminals through the third connectors.

11. The microelectronic assembly as claimed in claim 10 , wherein the first encapsulation separates and insulates individual third connectors from one another.

12. A microelectronic assembly, comprising:

a first microelectronic package having a first support element having first and second oppositely facing surfaces, a first microelectronic element mounted to a surface of the first and second surfaces, and a plurality of electrically conductive first connectors extending away from the second surface;

a second microelectronic package including a second support element having first and second oppositely facing surfaces, a microelectronic element mounted to the second surface of the second support element, and electrically conductive second connectors projecting above the second surface of the second support element and coupled to ends of the first connectors; and

a monolithic first encapsulation formed in contact with the second surface of a support element of the first and second support elements, and formed in contact with a monolithic second encapsulation, the second encapsulation formed in contact with the second surface of another support element of the first and second support elements,

wherein package terminals at the first surface of the second support element are coupled with conductive elements at the first surface of the first support element through respective pairs of the first connectors aligned with and coupled with the second connectors, and

at least one of: the first connectors and second connectors include electrically conductive masses.

13. The microelectronic assembly as claimed in claim 12 , wherein a standoff height between the second surfaces of the first and second support elements is greater than a pitch of the first connectors in at least one direction parallel to the second surface of the first support element.

14. The microelectronic assembly as claimed in claim 12 , wherein the microelectronic element has a face facing away from the support element to which it is mounted, and the first encapsulation is formed in contact with at least one of: the face of the microelectronic element or a monolithic third encapsulation formed on the face of the microelectronic element.

15. The microelectronic assembly as claimed in claim 12 , further comprising third connectors each aligned with an end of one of the first connectors and aligned with an end of one of the second connectors and being joined with at least one of the aligned first and second connectors, wherein coupled first, second and third connectors are aligned in respective columns and are separated from one another and from the microelectronic element by the material of the encapsulation, and the first package terminals are electrically coupled with the conductive elements of the first support element through the third connectors.

16. The microelectronic assembly as claimed in claim 15 , wherein the first encapsulation separates and insulates individual third connectors from one another.

17. A method of fabricating a microelectronic assembly, comprising:

joining first and second subassemblies to form an assembly having first terminals at a first outwardly facing surface of the assembly and second terminals at a second outwardly facing surface of the assembly opposite from the first surface,

wherein at least one of the subassemblies has at least one microelectronic element mounted to an inwardly facing second surface thereof, the microelectronic element being electrically coupled to the at least one subassembly, the first subassembly including a first support element, and the second subassembly including a second support element, and at least one of the first or second subassemblies includes connectors projecting above and away from the inwardly facing second surface of the support element of the respective subassembly towards the inwardly facing second surface of the other support element, and

each of a plurality of the first terminals are electrically coupled with respective second terminals through a respective pair of a first connector having an end coupled with an end of a corresponding second connector, the second connector extending above the first connector; and

flowing an encapsulant into a space between the first and second support elements and onto the second surface of at least one of the support elements so as to form a monolithic encapsulation separating at least portions of individual pairs of joined first and second connectors from one another.

18. The method as claimed in claim 17 , wherein at least one of: the first connectors or the second connectors are constrained during the joining process to maintain a height of such connectors.

19. The method as claimed in claim 17 , wherein the encapsulation is a first encapsulation, and one of the first or second subassemblies includes a monolithic second encapsulation separating at least some of the connectors thereof from one another, wherein the first encapsulation is formed in contact with the second encapsulation.

20. The method as claimed in claim 17 , wherein the first connectors and the second connectors have ends at maximum heights above the second surfaces of the first and second support elements, respectively, and the ends of the first connectors are aligned with and joined directly to ends of the second connectors.

Assignments (6)
CHANGE OF NAME Recorded Nov 24, 2025
From: INVENSAS LLC
To: ADEIA SEMICONDUCTOR TECHNOLOGIES LLC
Reel/Frame 073508/0661 →
CHANGE OF NAME Recorded Nov 24, 2025
From: INVENSAS CORPORATION
To: INVENSAS LLC
Reel/Frame 073689/0793 →
RELEASE OF SECURITY INTEREST Recorded Jun 11, 2020
From: ROYAL BANK OF CANADA
To: TESSERA, INC.; INVENSAS BONDING TECHNOLOGIES, INC. (F/K/A ZIPTRONIX, INC.); FOTONATION CORPORATION (F/K/A DIGITALOPTICS CORPORATION AND F/K/A DIGITALOPTICS CORPORATION MEMS); INVENSAS CORPORATION; TESSERA ADVANCED TECHNOLOGIES, INC; DTS, INC.; DTS LLC; PHORUS, INC.; IBIQUITY DIGITAL CORPORATION
Reel/Frame 052920/0001 →
SECURITY INTEREST Recorded Jun 1, 2020
From: ROVI SOLUTIONS CORPORATION; ROVI TECHNOLOGIES CORPORATION; ROVI GUIDES, INC.; TIVO SOLUTIONS INC.; VEVEO, INC.; INVENSAS CORPORATION; INVENSAS BONDING TECHNOLOGIES, INC.; TESSERA, INC.; TESSERA ADVANCED TECHNOLOGIES, INC.; DTS, INC.; PHORUS, INC.; IBIQUITY DIGITAL CORPORATION
To: BANK OF AMERICA, N.A.
Reel/Frame 053468/0001 →
SECURITY INTEREST Recorded Dec 2, 2016
From: INVENSAS CORPORATION; TESSERA, INC.; TESSERA ADVANCED TECHNOLOGIES, INC.; ZIPTRONIX, INC.; DIGITALOPTICS CORPORATION; DIGITALOPTICS CORPORATION MEMS; DTS, LLC; DTS, INC.; PHORUS, INC.; IBIQUITY DIGITAL CORPORATION
To: ROYAL BANK OF CANADA, AS COLLATERAL AGENT
Reel/Frame 040797/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 13, 2013
From: MOHAMMED, ILYAS; HABA, BELGACEM
To: INVENSAS CORPORATION
Reel/Frame 031169/0468 →