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App. No. 13/953,002 · Confirmation No. 7438

SEMICONDUCTOR MANUFACTURING APPARATUS

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2020-08-10 ABN Abandonment 2 View
2020-02-03 CTFR Final Rejection 7 View
2020-02-03 892 List of references cited by examiner 1 View
2020-02-03 SRFW Search information including classification, databases and other search related notes 1 View
2020-02-03 SRNT Examiner's search strategy and results 1 View
2019-11-04 WFEE Fee Worksheet (SB06) 1 View
2019-11-04 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2019-11-04 CLM Claims 6 View
2019-11-04 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2019-11-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-11-04 TRAN.LET Transmittal Letter 1 View
2019-08-02 CTNF Non-Final Rejection 9 View
2019-08-02 892 List of references cited by examiner 1 View
2019-08-02 SRFW Search information including classification, databases and other search related notes 1 View
2019-08-02 SRNT Examiner's search strategy and results 2 View
2019-06-06 RCEX Request for Continued Examination (RCE) 1 View
2019-06-06 WFEE Fee Worksheet (SB06) 2 View
2019-06-06 N417 Electronic Filing System Acknowledgment Receipt 3 View
2019-06-06 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2019-06-06 CLM Claims 7 View
2019-06-06 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2019-06-06 WFEE Fee Worksheet (SB06) 1 View
2019-03-06 CTFR Final Rejection 10 View
2019-03-06 892 List of references cited by examiner 1 View
2019-03-06 SRFW Search information including classification, databases and other search related notes 1 View
2019-03-06 SRNT Examiner's search strategy and results 2 View
2018-11-13 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2018-11-13 OA.APPENDIX Office Action Appendix 3 View
2018-11-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2018-11-12 TRAN.LET Transmittal Letter 1 View
2018-11-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-11-12 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2018-11-12 CLM Claims 9 View
2018-11-12 WFEE Fee Worksheet (SB06) 1 View
2018-08-10 CTNF Non-Final Rejection 13 View
2018-08-10 SRFW Search information including classification, databases and other search related notes 1 View
2018-08-10 SRNT Examiner's search strategy and results 1 View
2017-12-26 WFEE Fee Worksheet (SB06) 1 View
2017-12-26 RCEX Request for Continued Examination (RCE) 1 View
2017-12-26 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2017-12-26 CLM Claims 6 View
2017-12-26 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2017-12-26 WFEE Fee Worksheet (SB06) 2 View
2017-12-26 N417 Electronic Filing System Acknowledgment Receipt 3 View
2017-09-25 CTFR Final Rejection 12 View
2017-09-25 SRNT Examiner's search strategy and results 3 View
2017-09-25 1449 List of References cited by applicant and considered by examiner 1 View
2017-09-25 SRFW Search information including classification, databases and other search related notes 1 View
2017-07-13 PA.. Power of Attorney 2 View
2017-07-13 R3.73 Assignee showing of ownership per 37 CFR 3.73 6 View
2017-07-13 ADS Application Data Sheet 7 View
2017-07-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-06-07 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2017-06-07 OA.APPENDIX Office Action Appendix 1 View
2017-06-06 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2017-06-06 CLM Claims 6 View
2017-06-06 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2017-06-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-06-06 TRAN.LET Transmittal Letter 1 View
2017-06-06 WFEE Fee Worksheet (SB06) 1 View
2017-05-19 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2017-05-19 FOR Foreign Reference 12 View
2017-05-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-05-19 TRAN.LET Transmittal Letter 1 View
2017-03-06 CTNF Non-Final Rejection 9 View
2017-03-06 892 List of references cited by examiner 1 View
2017-03-06 SRFW Search information including classification, databases and other search related notes 1 View
2017-03-06 SRNT Examiner's search strategy and results 2 View
2017-03-06 1449 List of References cited by applicant and considered by examiner 1 View
2017-03-06 1449 List of References cited by applicant and considered by examiner 1 View
2017-03-06 1449 List of References cited by applicant and considered by examiner 1 View
2017-03-06 SRNT Examiner's search strategy and results 2 View
2017-03-06 1449 List of References cited by applicant and considered by examiner 1 View
2016-12-27 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2016-12-27 FOR Foreign Reference 16 View
2016-12-27 FOR Foreign Reference 21 View
2016-12-27 FOR Foreign Reference 18 View
2016-12-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-12-27 TRAN.LET Transmittal Letter 1 View
2016-11-03 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2016-11-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-11-03 TRAN.LET Transmittal Letter 1 View
2016-10-17 RCEX Request for Continued Examination (RCE) 1 View
2016-10-17 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2016-10-17 CLM Claims 5 View
2016-10-17 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2016-10-17 WFEE Fee Worksheet (SB06) 2 View
2016-10-17 N417 Electronic Filing System Acknowledgment Receipt 3 View
2016-10-17 WFEE Fee Worksheet (SB06) 1 View
2016-09-22 CTAV Advisory Action (PTOL-303) 3 View
2016-09-22 OA.APPENDIX Office Action Appendix 1 View
2016-09-15 A.NE Response After Final Action 1 View
2016-09-15 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2016-09-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-09-15 TRAN.LET Transmittal Letter 1 View
2016-07-15 CTFR Final Rejection 14 View
2016-07-15 892 List of references cited by examiner 1 View
2016-07-15 SRFW Search information including classification, databases and other search related notes 1 View
2016-07-15 SRNT Examiner's search strategy and results 1 View
2016-06-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2016-06-07 CLM Claims 4 View
2016-06-07 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2016-06-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-06-07 TRAN.LET Transmittal Letter 1 View
2016-06-07 WFEE Fee Worksheet (SB06) 1 View
2016-06-03 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2016-06-03 OA.APPENDIX Office Action Appendix 1 View
2016-04-27 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2016-04-27 FOR Foreign Reference 40 View
2016-04-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-04-27 TRAN.LET Transmittal Letter 1 View
2016-03-16 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2016-03-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-03-16 TRAN.LET Transmittal Letter 1 View
2016-03-10 CTNF Non-Final Rejection 10 View
2016-03-10 892 List of references cited by examiner 1 View
2016-03-10 SRNT Examiner's search strategy and results 1 View
2016-03-10 SRFW Search information including classification, databases and other search related notes 1 View
2015-08-06 RCEX Request for Continued Examination (RCE) 1 View
2015-08-06 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2015-08-06 CLM Claims 4 View
2015-08-06 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2015-08-06 WFEE Fee Worksheet (SB06) 2 View
2015-08-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-08-06 WFEE Fee Worksheet (SB06) 1 View
2015-08-03 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2015-05-06 CTFR Final Rejection 10 View
2015-05-06 892 List of references cited by examiner 1 View
2015-05-06 SRNT Examiner's search strategy and results 2 View
2015-05-06 SRFW Search information including classification, databases and other search related notes 1 View
2015-04-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2015-04-22 CLM Claims 4 View
2015-04-22 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2015-04-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-04-22 TRAN.LET Transmittal Letter 1 View
2015-04-22 WFEE Fee Worksheet (SB06) 1 View
2015-01-22 CTNF Non-Final Rejection 25 View
2015-01-22 892 List of references cited by examiner 1 View
2015-01-22 FOR Foreign Reference 22 View
2015-01-22 1449 List of References cited by applicant and considered by examiner 1 View
2015-01-22 SRFW Search information including classification, databases and other search related notes 1 View
2015-01-22 BIB Bibliographic Data Sheet 1 View
2015-01-22 SRNT Examiner's search strategy and results 4 View
2014-10-29 ELC. Response to Election / Restriction Filed 1 View
2014-10-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-10-29 TRAN.LET Transmittal Letter 1 View
2014-09-10 CTRS Requirement for Restriction/Election 4 View
2014-08-27 PD.FILED.E Priority Documents electronically retrieved by USPTO from a participating IP Office 22 View
2014-07-31 NTC.PUB Notice of Publication 1 View
2013-08-16 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-08-16 WFEE Fee Worksheet (SB06) 1 View
2013-08-16 APP.FILE.REC Filing Receipt 3 View
2013-07-29 TRNA Transmittal of New Application 1 View
2013-07-29 ADS Application Data Sheet 5 View
2013-07-29 SPEC Specification 21 View
2013-07-29 CLM Claims 3 View
2013-07-29 ABST Abstract 1 View
2013-07-29 DRW Drawings-only black and white line drawings 7 View
2013-07-29 OATH Oath or Declaration filed 3 View
2013-07-29 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2013-07-29 FOR Foreign Reference 22 View
2013-07-29 FOR Foreign Reference 17 View
2013-07-29 FOR Foreign Reference 14 View
2013-07-29 FOR Foreign Reference 13 View
2013-07-29 FOR Foreign Reference 14 View
2013-07-29 FOR Foreign Reference 26 View
2013-07-29 FOR Foreign Reference 8 View
2013-07-29 WFEE Fee Worksheet (SB06) 2 View
2013-07-29 N417 Electronic Filing System Acknowledgment Receipt 3 View
2013-07-29 PA.. Power of Attorney 2 View
2013-07-29 TRAN.LET Transmittal Letter 1 View
2013-07-29 OATH Oath or Declaration filed 5 View
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Quick Facts
App. No.
13/953,002
Filed
2013-07-29
Pub. No.
US20140213064A1
Art Unit
1716