Surface-defect inspection device
View Patent ↗A data processing and controlling portion calculates the amounts of coordinate deviations between artificial defects on a standard sample and detected defects on an inspected sample, checks the sensitivity (instrumental sensitivity (luminance, brightness, or the like)), and proceeds to execution of hardware corrections. If the coordinate deviation is less than a certain value, software corrections are carried out. In the case of the software corrections, coordinate corrections are made for the whole standard sample. The amounts of coordinate deviations are computed and checked. If the amounts of coordinate deviations are outside a tolerance, coordinate corrections are made for each region obtained by dividing the standard sample.
1. An inspection apparatus comprising:
an optical system configured to illuminate light to a standard sample having plural artificial defects disposed at known positions;
a detector configured to detect scattered light from the standard sample;
a determination unit configured to detect the artificial defects based on a signal from the detector; and
a data processing unit configured to compare a coordinate position of the artificial defects outputted from the determination unit and the known positions, and to correct a coordinate deviation based on a result of the comparison;
wherein the data processing unit is configured to divide the whole standard sample into plural regions, and
wherein the data processing unit is configured to perform fine adjustments to correct the coordinate deviation for each of the regions, obtained by the division of the whole standard sample based on the result of the comparison for each of the plural artificial defects.
2. The inspection apparatus according to claim 1 ,
wherein a correction amount for each of the regions obtained by the division is determined independent of a correction amount for other regions obtained by the division.
3. The inspection apparatus according to claim 1 ,
wherein rough adjustments to correct a coordinate deviation in a same direction over the whole standard sample are performed before the fine adjustments.
4. The inspection apparatus according to claim 3 ,
wherein at least one of an amount of deviation in a rotational direction, an amount of elongating or shrinking deviation, an amount of conveyance errors deviations, and an amount of deviation of an optical axis is corrected by the rough adjustments.
5. The inspection apparatus according to claim 1 ,
wherein the standard sample is divided into grid-like areas.
6. The inspection apparatus according to claim 1 ,
wherein the standard sample is divided into concentric areas and divided by plural lines extending radially.
7. The inspection apparatus according to claim 1 ,
wherein one defect is included in each of the region obtained by the division.
8. The inspection apparatus according to claim 1 ,
wherein a first region of the regions obtained by the division includes a first artificial defect;
wherein a second region of the regions obtained by the division includes a second artificial defect;
wherein a third region of the regions obtained by the division includes a third artificial defect; and
wherein an interval between the first artificial defect and the second artificial defect is equal to an interval between the second artificial defect and the third artificial defect.
9. The inspection apparatus according to claim 1 , wherein the determination unit comprises a foreign material/defect decision unit configured to record coordinates of positions at which the scattered light is detected, and wherein the data processing unit comprises a data processing and controlling portion configured to analyze positions, sizes and shapes of the detected artificial defects and to provide feedback control to a stage on which the standard sample is mounted based on the corrected coordinate deviation determined by the determination unit.
10. A coordinate adjustment method comprising:
illuminating light to a standard sample having plural artificial detects disposed at known positions;
detecting scattered light from the standard sample;
detecting the artificial defects based on a signal from the detector;
dividing the whole standard sample into plural regions;
comparing a coordinate position of the detected artificial defects and the known positions; and
performing fine adjustments to correct the coordinate deviation for each of the regions, obtained by the division of the whole standard sample based on the result of the comparison for each of the plural artificial defects.
11. The coordinate adjustment method according to claim 10 ,
wherein a correction amount for each of the regions, obtained by the division is determined independent of a correction amount for other regions obtained by the division.
12. The coordinate adjustment method according to claim 10 ,
wherein rough adjustments to correct a coordinate deviation in a same direction over the whole standard sample are performed before the fine adjustments.
13. The coordinate adjustment method according to claim 12 ,
wherein at least one of an amount of deviation in a rotational direction, an amount of elongating or shrinking deviation, an amount of conveyance errors deviations, and an amount of deviation of an optical axis is corrected by the rough adjustments.
14. The coordinate adjustment method according to claim 10 ,
wherein the standard sample is divided into grid-like areas.
15. The coordinate adjustment method according to claim 10 ,
wherein the standard sample is divided into concentric areas and divided by plural lines extending radially.
16. The coordinate adjustment method according to claim 10 ,
wherein one defect is included in each of the region obtained by the division.
17. The coordinate adjustment method according to claim 10 ,
wherein a first region of the regions obtained by the division includes a first artificial defect;
wherein a second region of the regions obtained by the division includes a second artificial defect;
wherein a third region of the regions obtained by the division includes a third artificial defect; and
wherein an interval between the first artificial defect and the second artificial defect is equal to an interval between the second artificial defect and the third artificial defect.