IP Library › Granted Patent US 9,349,948
Granted Patent B2
US 9,349,948 · App. 13/965,733 · Granted May 24, 2016

Non-volatile variable resistive element, controlling device and storage device

Inventors: Jiezhi Chen (Kanagawa, JP); Reika Ichihara (Kanagawa, JP); Yuuichiro Mitani (Kanagawa, JP)
Assignee: Kabushiki Kaisha Toshiba
H01L45/12G11C11/5685G11C13/0002G11C13/004G11C13/0007G11C13/0069H01L27/2463H01L45/085H01L45/1233H01L45/1266H01L45/148H01L45/16G11C2013/0073G11C2213/77
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Quick Facts
Patent No.
US 9,349,948
App. No.
13/965,733
Granted
May 24, 2016
Kind
B2
Abstract

A non-volatile variable resistive element according to an embodiment comprises a first electrode including a first metal, a second electrode including a second metal, a third electrode placed opposite to the first and second electrodes, and a variable resistive layer placed between the first and second electrodes and the third electrode, a resistance of the variable resistive layer reducing when at least either one of the first metal and the second metal is diffused into the variable resistive layer and the resistance of the variable resistive layer rising when at least either one of the first metal and the second metal diffused into the variable resistive layer is collected by the first electrode or the second electrode.

Claims (34)

1. A non-volatile resistive element comprising:

a variable resistive laver;

a first electrode including a first metal and placed at a first side of the variable resistive layer;

a second electrode including a second metal and placed at the first side of the variable resistive layer; and

a third electrode placed at a second side of the variable resistive layer;

the second side being opposed to the first side of the variable resistive laver, and the variable resistive layer being sandwiched between the first and second electrodes and the third electrode;

wherein a resistance of the variable resistive layer reduces when at least either one of the metal and the second metal is diffused into the variable resistive layer, and the resistance of the variable resistive layer increases when at least either one of the first metal and the second metal diffused into the variable resistive layer is collected by the first electrode or the second electrode.

2. The element according to claim 1 , wherein

a thickness of a part of the variable resistive layer lying between the first electrode and the third electrode differs from a thickness of the other part of the variable resistive layer lying between the second electrode and the third electrode.

3. The element according to claim 1 , wherein

a thickness of a part of the variable resistive layer lying between the second electrode and the third electrode is thinner than a thickness of the other part of the variable resistive layer lying between the first electrode and the third electrode.

4. The element according to claim 1 , wherein

a distance between the first electrode and the third electrode is greater than a distance between the second electrode and the third electrode.

5. The element according to claim 1 , wherein

at least one between a data retention characteristic and a number of cyclings of a conductive filament formed in the variable resistive layer by the second metal differs from a data retention characteristic or a number of cyclings of a conductive filament formed in the variable resistive layer by the first metal.

6. The element according to claim 5 , wherein

a thickness of a part of the variable resistive layer lying between the second electrode and the third electrode is thinner than a thickness of the other part of the variable resistive layer lying between the first electrode and the third electrode.

7. The element according to claim 1 , wherein

a minimum voltage value for diffusing the first metal into the variable resistive layer is smaller than a minimum voltage value for diffusing the second metal into the variable resistive layer.

8. The element according to claim 1 , wherein

a period of time for the second metal to diffuse into the variable resistive layer when a first voltage is impressed is longer than a period of time for the first metal to diffuse into the variable resistive layer when the first voltage is impressed, and

a period of time for the second metal to diffuse into the variable resistive layer when a second voltage of which voltage value is larger than a voltage value of the first voltage is impressed is shorter than a period of time for the first metal to diffuse into the variable resistive layer when the second voltage is impressed.

9. The element according to claim 1 , further comprising:

a first wiring contacting with the first and second electrodes; and

a second wiring contacting with the third electrode, wherein

the first wiring and the second wiring sandwich the first to third electrodes and the variable resistive layer therebetween, and

the first electrode is located on a side face of the second electrode so that the second electrode is surrounded by the first electrode.

10. The element according to claim 1 , further comprising:

a first wiring on which the first electrode is located directly; and

a second wiring lying above the first wiring and under which the third electrode is located directly, wherein

the first wiring and the second wiring sandwich the first to third electrode and the variable resistive layer therebetween, and

the second electrode is located directly on the first electrode.

11. The element according to claim 10 , wherein

a stack structure constructed by the first electrode and the second electrode has a tapered shape in which a face of the first electrode contacting with the first wiring is greater than a face of the second electrode facing the third electrode.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 24, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043709/0035 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 13, 2013
From: CHEN, JIEZHI; ICHIHARA, REIKA; MITANI, YUUICHIRO
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 031000/0379 →
Priority Claims (1)
JP 2012-221295 · Oct 3, 2012 · national
Continuity (1)
Related Publication 20140092669A1 · Apr 3, 2014