Nonvolatile resistance change element

1. A nonvolatile resistance change element comprising:

a first electrode comprising a metal element;

a second electrode comprising an n type semiconductor;

a first layer provided between the first electrode and the second electrode, the first layer including a conductor portion made of the metal element, and the conductor portion and the second electrode being spaced apart; and

a second layer provided between the first layer and the second electrode, and which is in contact with the first layer and the second electrode,

wherein the first layer and the second layer are made of silicon oxide, or the first layer and the second layer are made of silicon nitride, or the first layer and the second layer are made of silicon oxynitride, and

wherein the second layer differs from the first layer in one of a density, a number of dangling bonds, or a number of defects.

2. The element according to claim 1 , wherein a diffusion coefficient for the metal element in the second layer is smaller than that of the first layer.

3. The element according to claim 1 , wherein an impurity concentration of the n-type semiconductor comprised in the second electrode is not more than 1×10 18 cm −3 .

4. The element according to claim 1 , wherein the metal element comprised in the first electrode includes at least one of Ag, Co, Ni, Ti, Cu, and Al.

5. The element according to claim 1 , further comprising:

an interconnection layer formed on a surface of the second electrode, which is opposite to a surface on which the first layer is formed; and

a third electrode formed on a surface of the interconnection layer, which is opposite to the surface on which the second electrode is formed, and comprising an n-type semiconductor.

6. A nonvolatile resistance change element comprising:

a first electrode comprising a metal element;

a second electrode comprising an n-type semiconductor;

a first layer provided between the first electrode and the second electrode; and

a second layer provided between the first layer and the second electrode,

wherein the first layer and the second layer are made of silicon oxide, or the first layer and the second layer are made of silicon nitride, or the first layer and the second layer are made of silicon oxynitride, and

wherein the second layer differs from the first layer in one of a density, a number of dangling bonds, or a number of defects,

wherein a reset operation of changing a low-resistance state to a high-resistance state is performed by a reset voltage to be applied between the first electrode and the second electrode, and

when a voltage is swept from 0 V to the reset voltage between the first electrode and the second electrode, a maximum value of a current change amount between a 1/10 voltage of the reset voltage and the reset voltage is not more than an order of magnitude.

7. The element according to claim 6 ,

wherein the first layer includes a conductor portion made of the metal element, and the second layer suppresses invasion of the conductor portion.

8. The element according to claim 7 , wherein a diffusion coefficient for the metal element in the second layer is smaller than that of the first layer.

9. The element according to claim 6 , wherein an impurity concentration of the n-type semiconductor comprised in the second electrode is not more than 1×10 18 cm −3 .

10. The element according to claim 6 , wherein the metal element comprised in the first electrode includes at least one of Ag, Co, Ni, Ti, Cu, and Al.

11. The element according to claim 6 , further comprising:

an interconnection layer formed on a surface of the second electrode, which is opposite to a surface on which the first layer is formed; and

a third electrode formed on a surface of the interconnection layer, which is opposite to the surface on which the second electrode is formed.

12. A nonvolatile resistance change element comprising:

a first electrode comprising a metal element;

a second electrode comprising an n-type semiconductor layer; and

a first layer provided between the first electrode and the second electrode; and

a second layer provided between the first layer and the second electrode,

wherein the first layer and the second layer are made of silicon oxide, or the first layer and the second layer are made of silicon nitride, or the first layer and the second layer are made of silicon oxynitride, and

wherein the second layer differs from the first layer in one of a density, a number of dangling bonds, or a number of defects,

wherein a reset operation of changing a low-resistance state to a high-resistance state is performed by a reset voltage to be applied between the first electrode and the second electrode, and

when a voltage is swept from 0 V to the reset voltage between the first electrode and the second electrode, a maximum value of a current change amount between 0 V and a ½ voltage of the reset voltage is smaller than that of a current change amount between the ½ voltage of the reset voltage and the reset voltage.

13. The element according to claim 12 ,

wherein the first layer includes a conductor portion made of the metal element, and the second layer suppresses invasion of the conductor portion.

14. The element according to claim 13 , wherein a diffusion coefficient for the metal element in the second layer is smaller than that of the first layer.

15. The element according to claim 12 , wherein an impurity concentration of the n-type semiconductor comprised in the second electrode is not more than 1×10 18 cm −3 .

16. The element according to claim 12 , wherein the metal element comprised in the first electrode includes at least one of Ag, Co, Ni, Ti, Cu, and Al.

17. The element according to claim 12 , further comprising:

an interconnection layer formed on a surface of the second electrode, which is opposite to a surface on which the first layer is formed; and

a third electrode formed on a surface of the interconnection layer, which is opposite to the surface on which the second electrode is formed.