Measurement or inspecting apparatus
View Patent ↗In the case of inspecting samples having different sizes by means of a semiconductor inspecting apparatus, a primary electron beam bends since distribution is disturbed on an equipotential surface at the vicinity of the sample at the time of inspecting vicinities of the sample, and what is called a positional shift is generated. A potential correcting electrode is arranged outside the sample and at a position lower than the sample lower surface, and a potential lower than that of the sample is applied. Furthermore, a voltage to be applied to the potential correcting electrode is controlled corresponding to a distance between the inspecting position and a sample outer end, sample thickness and irradiation conditions of the primary electron beam.
1. A measurement or inspecting apparatus, the apparatus comprising:
a sample stage holding a sample;
a unit moving the sample stage;
a beam source irradiating a charged particle beam on a surface of the sample;
a beam scanning unit scanning the charged particle beam on the surface of the sample;
a first potential correcting electrode installed at a position lower than a surface of the sample stage holding the sample,
and at an outside of an outer edge of the sample, for correcting an irradiating position of the charged particle beam on the surface of the sample;
a first voltage supply source applying voltage to the first potential correcting electrode; and
a controller determining the voltage to the first potential correcting electrode, and controlling the voltage of the first voltage supply source to supply the determined voltage to the first potential correcting electrode.
2. The measurement or inspecting apparatus according to claim 1 , further comprising:
a retarding power supply source applying a retarding voltage to the sample,
wherein the first voltage supply source and the retarding power supply source are electrically connected in series.
3. The measurement or inspecting apparatus according to claim 1 , further comprising:
a second potential correcting electrode installed at a position lower than the surface holding the sample of the sample stage, and at an outside of an outer edge of the first potential correcting electrode; and
a second voltage supply source applying voltage to the second potential correcting electrode,
wherein the controller controls the voltage of the second voltage supply source.
4. The measurement or inspecting apparatus according to claim 1 , further comprising:
a first attracting electrode and a second attracting electrode attracting the sample, being installed within the sample stage.
5. The measurement or inspecting apparatus according to claim 1 ,
wherein the first potential correcting electrode is a ring-shaped electrode.
6. The measurement or inspecting apparatus according to claim 1 , further comprising:
an objective lens converging the charged particle beam on the sample;
a deflector deflecting a secondary electron generated from the sample, being installed at a beam source side of the objective lens, and
a detector detecting the secondary electron deflected by the deflector, being installed at a beam source side of the deflector.
7. The measurement or inspecting apparatus according to claim 6 , further comprising:
a shield electrode which has a hole passing the charged particle beam, being installed between the objective lens and the sample stage.
8. A measurement or inspecting apparatus, the apparatus comprising:
a sample stage holding a sample;
a unit moving the sample stage;
a beam source irradiating a charged particle beam on a surface of the sample;
a beam scanning unit scanning the charged particle beam on the surface of the sample;
a first potential correcting electrode installed at a position lower than a surface of the sample stage holding the sample, and at an outside of an outer edge of the sample, for correcting an irradiating position of the charged particle beam on the surface of the sample;
a first voltage supply source applying voltage to the first potential correcting electrode;
a retarding power supply source applying a retarding voltage to the sample,
and
a controller determining the voltage to the first potential correcting electrode, and controlling the voltage of the first voltage supply source to supply the determined voltage to the first potential correcting electrode
wherein the first voltage supply source and the retarding power supply source are electrically connected in series.