Work heating device and work treatment device
Provided are a work heating device which is capable of heating a work piece with high soaking properties as well as fine temperature control and which remains highly reliable over a long-term use by preventing the deformation or the like of a chuck member, and a work treating device that uses the work heating device. The work heating device is a work heating device in which the chuck member including a work attraction electrode for work attraction and a heater member including a heating element for work heating are layered, and which is capable of heating with the heater member the work piece stuck by attraction on the chuck member side, in which the heater member includes a chuck attraction electrode for causing the chuck member to stick by attraction, between a surface of the heater member that is opposed to the chuck member and the heating element, so that the chuck member and the heater member are layered detachably. The work treating device is obtained by putting the work heating device on a base platform.
1. A work heating device comprising:
a chuck member comprising a work attraction electrode for generating work attraction, the chuck member having an upper surface, to which a work piece is attracted by the work attraction generated by the work attraction electrode and a bottom surface contacting an upper surface of a heat member; and
the heater member comprising a chuck attraction electrode for causing the chuck member to stick by attraction and a heating element for work heating, wherein
the chuck member is disposed on the heater member so that the heater member is capable of heating with the heating element, the work piece stuck by attraction on the upper surface of the chuck member,
the chuck attraction electrode of the heater member is disposed between a surface of the heater member that faces to the chuck member and the heating element, so that the chuck member is disposed on the heater member detachably,
a thickness of the chuck member is 120 μm to 300 μm, and
a thickness of the heater member is 0.2 mm to 0.7 mm.
2. The work heating device according to claim 1 ,
wherein the work heating device is disposed on a base platform with the heater member facing to the base platform, the base platform comprising therein a conduit for flowing a gas medium and comprising in a front surface, a gas hole which connects to the conduit,
wherein the heater member comprises a through hole that leads to the gas hole of the base platform, and
wherein the heater member and the chuck member are layered so that the gas medium supplied from the base platform side stays at a boundary between the heater member and the chuck member.
3. The work heating device according to claim 2 , wherein the heater member is disposed on the base platform detachably by providing a base attraction electrode for causing the base platform to stick by attraction between a surface of the heater member that faces to the base platform and the heating element, or by providing an attraction sheet that is made from a resin material on the surface of the heater member that faces to the base platform.
4. The work heating device according to claim 3 , wherein the attraction sheet is made from a resin material that has an elasticity modulus of 0.5 MPa or more and 10 MPa or less and a three-dimensional average surface roughness (SRa) of 0.01 μm or more and 0.55 μm or less.
5. A work treating device comprising the work heating device according to claim 1 , wherein the work heating device is disposed on a base platform.
6. The work heating device according to claim 1 , wherein the chuck member is disposed on the heater member without interposing an adhesive layer between the chuck member and the heater member.
7. The work heating device according to claim 1 , wherein the chuck member is directly disposed on the heater member.
8. The work heating device according to claim 1 , wherein the work heating device is disposed on a base platform with the heater member facing to the base platform, the base platform comprising therein a conduit for flowing a gas medium and comprising in a front surface, a gas hole which connects to the conduit,
wherein the heater member comprises a through hole that leads to the gas hole of the base platform,
wherein the heater member and the chuck member are layered so that the gas medium supplied from the base platform side stays at a boundary between the heater member and the chuck member,
wherein the heater member is disposed on the base platform detachably by providing a base attraction electrode for causing the base platform to stick by attraction between a surface of the heater member that faces to the base platform and the heating element, or by providing an attraction sheet that is made from a resin material on the surface of the heater member that faces to the base platform, and
wherein the chuck member is directly disposed on the heater member without interposing an adhesive layer between the chuck member and the heater member.
9. The work heating device according to claim 1 , wherein the heater member is formed of layered polyimide films, the chuck attraction electrode, and the heating element, and
the chuck attraction electrode and the heating element are disposed between said polyimide films, and the heating element and polyimide films are isolated from each other by at least one of said polyimide films.
10. The work heating device according to claim 8 , wherein the heater member is formed of layered polyimide films, the chuck attraction electrode, and the heating element, and
the chuck attraction electrode and the heating element are disposed between said polyimide films, and the heating element and polyimide films are isolated from each other by at least one of said polyimide films.